Embedded semiconductor packages and methods thereof
The present disclosure describes semiconductor packages and, more particularly, chip-embedded semiconductor packages. The packages include core panels with apertures extending through the core panel. Semiconductor chips are embedded within chip apertures. A molding compound can be positioned along one side of the core panel. In some examples, the semiconductor chips are embedded within the molding compound. In other examples, the semiconductor chips are adhered to the molding compound. The coefficient of thermal expansion (CTE) values of the core panels described herein can be tailored to decrease warpage of the package as the semiconductor chip heats during use.
1. An embedded semiconductor package comprising:
a core panel having a first side and a second side, wherein the core panel comprises:
a first through aperture extending from the first side to the second side of the core panel;
a second chip aperture extending from the first side to the second side of the core panel; and
a third chip aperture extending from the first side to the second side of the core panel;
a molding compound layer having a first side and a second side, wherein the first side is proximate the first side of the core panel and extends at least partially into the first chip aperture;
a first semiconductor chip disposed in the first chip aperture and at least partially within the molding compound layer, wherein the first semiconductor chip has a first side proximate the molding compound layer and a second side opposite the molding compound layer and proximate the second side of the core panel, and wherein the second side of the first semiconductor chip has a first electrode;
a second semiconductor chip disposed in the third chip aperture and at least partially within the molding compound layer;
a first dielectric layer positioned proximate the second side of the core panel and proximate the first electrode;
a first redistribution layer disposed within the first dielectric layer and in electrical communication with the first electrode;
a second dielectric layer positioned proximate to and in contact with the second side of the molding compound layer; and
a second redistribution layer disposed within the second dielectric layer and in electrical communication with the first redistribution layer.
2. The embedded semiconductor package of claim 1 further comprising a conductive material having a first end in electrical communication with the first redistribution layer and a second end in electrical communication with the second redistribution layer;
wherein the conductive material extends through the second through aperture.
3. The embedded semiconductor package of claim 1 , wherein the core panel comprises glass.
4. The embedded semiconductor package of claim 3 , wherein the glass has a coefficient of thermal expansion of approximately 3 ppm/° C.
5. The embedded semiconductor package of claim 3 , wherein the glass has a coefficient of thermal expansion of from approximately 3 ppm/° C. to approximately 7 ppm/° C.
6. The embedded semiconductor package of claim 3 , wherein the glass has a coefficient of thermal expansion of from approximately 7 ppm/° C. to approximately 10 ppm/° C.
7. The embedded semiconductor package of claim 3 , wherein the glass has a coefficient of thermal expansion of greater than 10 ppm/° C.
8. The embedded semiconductor package of claim 1 , wherein the core panel comprises at least one of an organic laminate material or an inorganic laminate material.
9. The embedded semiconductor package of claim 1 , wherein the core panel comprises at least one of quartz or a metallic material.
10. The embedded semiconductor package of claim 1 , wherein the second semiconductor chip has a first side proximate the molding compound layer and a second side opposite the molding compound layer and proximate the second side of the core panel; and
wherein the second side of the second semiconductor chip has a second electrode.
11. The embedded semiconductor package of claim 1 , wherein the core panel has a thickness of less than 100 μm.
12. The embedded semiconductor package of claim 1 , wherein:
the core panel does not extend over the first semiconductor chip; and
the embedded semiconductor package does not include an additional core panel parallel to the core panel.
13. The embedded semiconductor package of claim 1 , wherein the core panel has a coefficient of thermal expansion in a range between that of the first semiconductor chip and the molding compound layer.
14. An embedded semiconductor package comprising:
a core panel having a first side and a second side, the core panel comprising:
a first chip aperture extending from the first side to the second side of the core panel;
a second through aperture extending from the first side to the second side of the core panel; and
a third chip aperture extending from the first side to the second side of the core panel;
a molding compound layer having a first side and a second side, wherein the first side is proximate the first side of the core panel and does not extend into the first chip aperture;
a first semiconductor chip disposed in the first chip aperture, wherein the first semiconductor chip has a first side proximate the molding compound layer and a second side opposite the molding compound layer and proximate the second side of the core panel, and wherein the second side of the first semiconductor chip has a first electrode;
a second semiconductor chip disposed in the third chip aperture;
a first dielectric layer positioned proximate the second side of the core panel and proximate the first electrode;
a first redistribution layer disposed within the first dielectric layer and in electrical communication with the first electrode;
a second dielectric layer positioned proximate to and in contact with the second side of the molding compound layer; and
a second redistribution layer disposed within the second dielectric layer and in electrical communication with the first redistribution layer.
15. The embedded semiconductor package of claim 14 , wherein the first side of the first semiconductor chip is at least partially embedded into the first side of the molding compound layer.
16. The embedded semiconductor package of claim 14 , wherein the first side of the first semiconductor chip is laminated to the first side of the molding compound layer via an adhesive.
17. The embedded semiconductor package of claim 16 , wherein the adhesive is a die attach film.
18. The embedded semiconductor package of claim 14 further comprising a conductive material having a first end in electrical communication with the first redistribution layer and a second end in electrical communication with the second redistribution layer;
wherein the conductive material extends through the second through aperture.
19. The embedded semiconductor package of claim 14 , wherein the core panel comprises glass.
20. The embedded semiconductor package of claim 19 , wherein the glass has a coefficient of thermal expansion of approximately 3 ppm/° C.
21. The embedded semiconductor package of claim 19 , wherein the glass has a coefficient of thermal expansion of from approximately 3 ppm/° C. to approximately 7 ppm/° C.
22. The embedded semiconductor package of claim 19 , wherein the glass has a coefficient of thermal expansion of from approximately 7 ppm/° C. to approximately 10 ppm/° C.
23. The embedded semiconductor package of claim 19 , wherein the glass has a coefficient of thermal expansion of greater than 10 ppm/° C.
24. The embedded semiconductor package of claim 14 , wherein the core panel comprises at least one of an organic laminate material or an inorganic laminate material.
25. The embedded semiconductor package of claim 14 , wherein the core panel comprises at least one of quartz or a metallic material.
26. The embedded semiconductor package of claim 14 , wherein the second semiconductor chip has a first side proximate the molding compound layer and a second side opposite the molding compound layer and proximate the second side of the core panel; and
wherein the second side of the second semiconductor chip has a second electrode.
27. The embedded semiconductor package of claim 26 , wherein the first side of the second semiconductor chip is at least partially embedded into the first side of the molding compound layer.
28. The embedded semiconductor package of claim 26 , wherein the first side of the second semiconductor chip is laminated to the first side of the molding compound layer via an adhesive.
29. The embedded semiconductor package of claim 14 , wherein the core panel has a thickness of less than 100 μm.
30. The embedded semiconductor package of claim 14 , wherein:
the core panel does not extend over the first semiconductor chip; and
the embedded semiconductor package does not include an additional core panel parallel to the core panel.
31. The embedded semiconductor package of claim 14 , wherein the core panel has a coefficient of thermal expansion in a range between that of the first semiconductor chip and the molding compound layer.