Additive manufacturing article and method for producing additive manufacturing article
An additive manufacturing article according to the present invention is composed of an Ni-based alloy that contains Cr and Mo, while containing Ni in the largest amount in terms of the mass ratio; and an oxide film that is mainly composed of Cr is formed in a part or the entirety of the surface. This oxide film that is mainly composed of Cr has a region wherein the O content is higher in comparison to that in the inner part, and the Cr content is higher than the Ni content. It is preferable that this oxide film has a thickness of 1-20 nm from the surface; and it is also preferable that this oxide film is formed so as to be suited to a corrosive environment contact surface. In addition, this oxide film is able to be formed during additive manufacturing of the additive manufacturing article.
1. An additive manufacturing article comprising:
a Ni-based alloy that contains Cr and Mo, while containing Ni in a largest amount in terms of a mass ratio,
wherein an oxide film comprising Cr and Ni is formed in a part or an entirety of a surface,
containing in the Ni-based alloy, Cr is in a range of 14.5% mass % to 24.5 mass % and Mo is a range of 12.0 mass % to 23.0% mass %,
the oxide film has a surface layer part and an inner part, wherein in a region of the surface layer part, an O content is higher than the O content in the inner part, and a Cr content is higher than an Ni content, and
the oxide film has a region in the inner part where the Ni content is higher than the Cr content.
2. The additive manufacturing article according to claim 1 ,
wherein the oxide film has a thickness of 1 to 20 nm from the surface.
3. The additive manufacturing article according to claim 1 ,
wherein the oxide film is formed so as to be suited to a corrosive environment contact surface.
4. The additive manufacturing article according to claim 1 that is a component for semiconductor manufacturing device.
5. A method for producing an additive manufacturing article comprising:
a step of producing, by additive manufacturing, an additive manufacturing article composed of a Ni-based alloy that contains Cr and Mo, while containing Ni in a largest amount in terms of a mass ratio,
wherein, at the time of the additive manufacturing, an oxide film comprising Cr and Ni is formed in a part or an entirety of a surface of the additive manufacturing article,
containing in the Ni-based alloy, Cr is in a range of 14.5 mass % to 24.5 mass % and Mo is in a range of 12.0 mass % to 23.0 mass %,
the oxide film has a surface layer part and an inner part, wherein in a region of the surface layer part, an O content is higher than the O content in the inner part, and a Cr content is higher than an Ni content, and
the oxide film has a region in the inner part where the Ni content is higher than the Cr content.
6. The method for producing an additive manufacturing article according to claim 5 ,
wherein the additive manufacturing of the additive manufacturing article is performed by powder bed fusion in which a laser beam or an electron beam is used, and
the additive manufacturing is performed in an atmosphere having an oxygen concentration of 10 to 2000 ppm.
7. The method for producing an additive manufacturing article according to claim 5 ,
wherein the surface of the additive manufacturing article on which the oxide film is to be formed is irradiated with a laser beam or an electron beam repeatedly twice or more.