Ni-based corrosion resistant alloy powder for additive manufacturing and manufacturing method of additive manufacturing product using said powder
To provide a Ni-based corrosion resistant alloy powder suitable for additive manufacturing and a manufacturing method using this powder for manufacturing an additive manufacturing product that has excellent corrosion resistance and few defects. This Ni-based corrosion resistant alloy powder for additive manufacturing has a component composition which contains, in mass %, Cr: 14.5-24.5%, Mo: 12.0-23.0%, Fe: 0.01-7.00%, Co: 0.001-2.500%, Mg: 0.010% or less, N: 0.040% or less, Mn: 0.001-0.50%, Si: 0.001-0.200%, Al: greater than 0-0.50%, Ti: 0.001-0.500%, Cu: 0.250% or less, V: 0.001-0.300%, B: 0.0001-0.0050%, Zr: 0.0001-0.0200% and O: 0.0010-0.0300%, the remainder being Ni and unavoidable impurities; the C, S and P contained as the aforementioned unavoidable impurities include less than 0.05% of C, less than 0.01% of S and less than 0.01% of P, wherein the powder has a particle distribution in which d10 is 15-100 μm, d50 is 30-250 μm and d90 is 50-480 μm.
1. A Ni-based corrosion resistant alloy powder for additive manufacturing, composed of a powder of a Ni-based alloy having a component composition including, in mass %,
Cr: 14.5 to 24.5%,
Mo: 12.0 to 23.0%,
Fe: 0.01 to 7.00%,
Co: 0.001 to 2.500%,
Ta: 1.0 to 2.5%,
Mg: 0.010% or less,
N: 0.040% or less,
Mn: 0.001 to 0.50%,
Si: 0.001 to 0.200%,
Al: more than 0 and 0.50% or less,
Ti: 0.001 to 0.500%,
Cu: 0.250% or less,
V: 0.001 to 0.300%,
B: 0.0001 to 0.0050%,
Zr: 0.0001 to 0.0200%, and
O: 0.0010 to 0.0300%,
with the remainder being Ni and unavoidable impurities,
wherein C, S and P are contained as the unavoidable impurities (C: less than 0.05%, S: less than 0.01% and P: less than 0.01%),
wherein, in a cumulative distribution curve showing the relationship between a particle size and a volume cumulative from a small particle size side obtained by a laser diffraction method,
a particle size d10 corresponding to a cumulative frequency of 10 volume % of the powder is 15 μm or more and 100 μm or less,
a particle size d50 corresponding to a cumulative frequency of 50 volume % of the powder is 30 μm or more and 250 μm or less, and
a particle size d90 corresponding to a cumulative frequency of 90 volume % of the powder is 50 μm or more and 480 μm or less.
2. The Ni-based corrosion resistant alloy powder for additive manufacturing according to claim 1 ,
wherein, in the cumulative distribution curve, the uniformity represented by (d90−d10)/d50 is 1.5 or less.
3. The Ni-based corrosion resistant alloy powder for additive manufacturing according to claim 1 ,
wherein the component composition of the Ni-based alloy further includes W: 5.0% or less.
4. The Ni-based corrosion resistant alloy powder for additive manufacturing according to claim 1 ,
wherein the particle size d50 corresponding to a cumulative frequency of 50 volume % of the powder is 60 μm or more and 250 μm or less.
5. A method of manufacturing an additive manufacturing product, comprising
performing additive manufacturing using the Ni-based corrosion resistant alloy powder for additive manufacturing according to claim 1 as a raw material powder.
6. The method of manufacturing an additive manufacturing product according to claim 5 ,
wherein the additive manufacturing product is a member for semiconductor manufacturing device.
7. The method of manufacturing an additive manufacturing product according to claim 5 ,
wherein the additive manufacturing is a powder bed fusion method using an electron beam or a directed energy deposition method using an electron beam.