IP Library Granted Patent US 12,490,543
Granted Patent B2
US 12,490,543 · App. 17/435,048 · Granted Dec 2, 2025

Arrangement, device, and method for heat treating a multilayer body

Inventors: Joerg Palm (Munich, DE); Martin Fuerfanger (Steinhoering, DE); Mike Verdenhalven (Torgau, DE)
Assignee: CNBM RESEARCH INSTITUTE FOR ADVANCED GLASS MATERIALS GROUP CO., LTD.
H10F71/128H01L21/67115
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Quick Facts
Patent No.
US 12,490,543
App. No.
17/435,048
Granted
Dec 2, 2025
Kind
B2
Abstract

An arrangement for heat treating a multilayer body, which arrangement comprises an energy source with at least one radiant heater for generating heating radiation, a multilayer body, and an intermediate element arranged between the energy source and the multilayer body. According to a first alternative, the intermediate element includes a surface element implemented in the form of a flexible film. According to a second alternative, the intermediate element includes a surface element implemented in the form of a flexible film or a rigid plate, wherein the surface element has a surface facing the energy source, which can be irradiated by the heating radiation and is mechanically supported by a supporting device in the direction toward the energy source.

Claims (18)

1 . An arrangement for heat treating a multilayer body, comprising:

an energy source with at least one radiant heater for generating heating radiation,

a multilayer body,

an intermediate element arranged between the energy source and the multilayer body, wherein the intermediate element comprises a surface element implemented in a form of a flexible film, the surface element has a surface facing the energy source, the surface element is irradiated by the heating radiation, and the surface facing the energy source is mechanically supported by a supporting device in a direction toward the energy source,

wherein the supporting device is implemented in a form of a grid of linear supporting elements or a side-by-side line arrangement of the linear supporting elements.

2 . The arrangement for heat treating the multilayer body according to claim 1 , wherein the flexible film has one of the following features:

a) the flexible film comprises graphite or a composite material, wherein the graphite or the composite material is carbon fiber-reinforced carbon,

b) the flexible film is a metal foil coated on one or both sides with a corrosion protection layer,

c) the flexible film is a composite film, wherein the composite film is a metal foil that is bonded to a graphite film on one or both sides by an adhesive.

3 . The arrangement for heat treating the multilayer body according to claim 2 , wherein the surface element has a thickness of less than 4 mm.

4 . The arrangement for heat treating the multilayer body according to claim 1 , wherein the surface element has a thickness of less than 4 mm.

5 . The arrangement for heat treating the multilayer body according to claim 1 , wherein the surface element has a reflection of the heating radiation of less than 10%.

6 . The arrangement for heat treating the multilayer body according to claim 1 , wherein the surface element has patterning in a form of elevations, wherein the elevations have a height of a few to several hundred microns, measured perpendicular around the surface element.

7 . The arrangement for heat treating the multilayer body according to claim 1 , wherein the linear supporting elements comprises a metal coated with one selected from the group consisting of a corrosion protection layer, graphite, ceramic, glass ceramic, a glass with a softening point above 800° C., aluminosilicate glass, quartz glass, a composite material,

wherein the glass with the softening point above 800° C. is borosilicate glass, and

the composite material is a carbon fiber-reinforced carbon.

8 . The arrangement for heat treating the multilayer body according to claim 1 , wherein the linear supporting elements occupy less than 10% of the surface facing the energy source.

9 . The arrangement for heat treating the multilayer body according to claim 1 , wherein the linear supporting elements are partially transparent or transparent to the heating radiation.

Assignments (2)
CHANGE OF NAME Recorded Aug 29, 2025
From: (CNBM) BENGBU DESIGN & RESEARCH INSTITUTE FOR GLASS INDUSTRY CO., LTD.
To: CNBM RESEARCH INSTITUTE FOR ADVANCED GLASS MATERIALS GROUP CO., LTD.
Reel/Frame 072710/0868 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 31, 2021
From: PALM, JOERG; FUERFANGER, MARTIN; VERDENHALVEN, MIKE
To: (CNBM) BENGBU DESIGN & RESEARCH INSTITUTE FOR GLASS INDUSTRY CO., LTD
Reel/Frame 057334/0323 →
Priority Claims (1)
EP 19154936 · Jan 31, 2019 · regional
Continuity (1)
Related Publication 20220158022A1 · May 19, 2022
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