IP Library Patent Application 17435426
Patent Application
App. No. 17/435,426

PROBE PRODUCTION METHOD AND SURFACE OBSERVATION METHOD

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Quick Facts
Patent No.
US None
App. No.
17/435,426
Abstract

This probe production method is a method of producing a probe ( 101 ) having a coating layer ( 104 ) on a surface thereof, in which the coating layer ( 104 ) is formed on a surface of a base material ( 103 ) having a sharp tip end portion ( 103 a ) using a gas phase method.

Claims (12)

1 . A method of producing a probe having a coating layer on a surface thereof, comprising: forming the coating layer on a surface of a base material having a sharp tip end portion using a gas phase method.

2 . The method of producing a probe according to claim 1 , wherein a high-frequency plasma treatment method is used as the gas phase method.

3 . The method of producing a probe according to claim 2 , wherein, in the high-frequency plasma treatment method, a gas containing at least one type of fluorocarbon is used as a raw material gas.

4 . The method of producing a probe according to claim 1 , wherein a thickness of the coating layer is 100 Å or less.

5 . The method of producing a probe according to claim 1 , further comprising: a pretreatment step of pretreating the surface of the base material before performing the gas phase method, wherein the pretreatment step includes performing any treatment selected from the group consisting of a sputtering treatment, a corona treatment, a UV ozone irradiation treatment, and an oxygen plasma treatment.

6 . The method of producing a probe according to claim 2 , wherein the high-frequency plasma treatment method is performed in a plasma generator, and wherein a temperature inside the plasma generator is 20° C. or higher and 80° C. or lower.

7 . The method of producing a probe according to claim 1 , wherein a shape of the base material is a conical shape.

8 . The method of producing a probe according to claim 1 , wherein a thickness of the coating layer is 0.1 nm or more.

9 . A surface observation method, wherein the probe produced by the probe production method according to claim 1 is used as a probe of a scanning probe microscope.

10 . A surface observation method according to claim 9 , wherein a force due to a proximity interaction between the probe and a sample is measured using theft scanning probe microscope including the probe.

11 . The surface observation method according to claim 10 , wherein the force due to the proximity interaction is an atomic force.

12 . The surface observation method according to claim 9 , wherein a surface of a magnetic recording medium is observed using the probe.

Assignments (2)
CHANGE OF NAME Recorded Jun 23, 2023
From: SHOWA DENKO K.K.
To: RESONAC CORPORATION
Reel/Frame 064082/0513 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 1, 2021
From: KATO, TSUYOSHI; TOMITA, HIROYUKI; MINAMI, TAKUYA; NISHIZAWA, SHOHEI; SHIMAZU, YOSHITOMO; KUROKAWA, GOHEI; MUROFUSHI, KATSUMI; FUKUMOTO, NAOYA
To: SHOWA DENKO K.K.
Reel/Frame 057355/0718 →