Coated mold, method for manufacturing coated mold, and hard coat-forming target
A coated mold which can exhibit good sliding properties, and has further reduced droplets and excellent durability. The coated mold has a hard coating on a work surface, the hard coating including layer A in which layer a1 and layer a2 are alternately laminated, wherein the layer a1 is composed of a Cr-based nitride and has a thickness of 100 nm or less, and the layer a2 is composed of a nitride or carbonitride of (V 1-a M a ) (M is at least one selected from Mo and W), has an atomic ratio a of M to the sum of V and M of 0.05 or more and 0.45 or less, and has a thickness of 80 nm or less. Also: a method for manufacturing a coated mold; and a hard coat-forming target which can be used in the method for manufacturing a coated mold.
1. A coated mold which has a hard coating on a work surface, wherein the hard coating comprises a layer A in which a layer a1 and a layer a2 are alternately laminated, the layer a1 being composed of a Cr-based nitride and having a thickness of 100 nm or less, the layer a2 being composed of a nitride or carbonitride of (V 1-a M a ), wherein M is at least one selected from Mo and W, having an atomic ratio a of M to a sum of V and M of 0.05 or more and 0.45 or less, and having a thickness of 80 nm or less.
2. The coated mold according to claim 1 , further comprising:
a layer B that is formed on an upper layer of the layer A, the layer B is composed of the nitride or carbonitride of (V 1-a M a ), wherein M is at least one selected from Mo and W, has the atomic ratio a of M to the sum of V and M of 0.05 or more and 0.45 or less, and has a thickness of 0.1 μm or more.
3. The coated mold according to claim 1 , wherein a Young's modulus in the layer A of the hard coating is 250 Gpa or more, and nanoindentation hardness is 25 Gpa or more.
4. A method for manufacturing a coated mold that has a hard coating on a work surface comprising:
applying a layer A in which a layer a1 and a layer a2 are alternately laminated, the layer a1 being composed of a Cr-based nitride and having a thickness of 100 nm or less, the layer a2 being composed of a nitride or carbonitride of (V 1-a M a ), wherein M is at least one selected from Mo and W, having an atomic ratio a of M to a sum of V and M of 0.05 or more and 0.45 or less, and having a thickness of 80 nm or less,
wherein the layer a2 is applied using a hard coat-forming target composed of (V 1-a M a ), wherein M is at least one selected from Mo and W and having the atomic ratio a of M to the sum of V and M of 0.05 or more and 0.45 or less.
5. The method for manufacturing a coated mold according to claim 4 , further comprising:
applying, on an upper layer of the layer A, a layer B that is composed of the nitride or carbonitride of (V 1-a M a ), wherein M is at least one selected from Mo and W, has the atomic ratio a of M to the sum of V and M of 0.05 or more and 0.45 or less, and has a thickness of 0.1 μm or more,
wherein the layer B is applied using a hard coat-forming target composed of (V 1-a M a ), wherein M is at least one selected from Mo and W and having the atomic ratio a of M to the sum of V and M of 0.05 or more and 0.45 or less.