Backside metal removal die singulation systems and related methods

1. A method of singulating a plurality of die comprised in a substrate, the method comprising:

forming a groove through a backside metal layer through laser ablating the backside metal layer at a die street of a substrate; and

singulating a plurality of die comprised in the substrate through plasma etching at the die street;

wherein the backside metal layer is used as a mask for the plasma etching at the die street.

2. The method of claim 1 , wherein the substrate is less than 50 micrometers thick.

3. The method of claim 1 , wherein the substrate is less than 30 micrometers thick.

4. The method of claim 1 , wherein the backside metal layer comprises copper.

5. The method of claim 1 , wherein the backside metal layer is substantially 10 micrometers thick.

6. The method of claim 1 , wherein the backside metal layer is one of evaporated or sputtered onto the substrate.

7. The method of claim 1 , wherein singulating the plurality of die comprised in the substrate through plasma etching further comprises removing a portion of the substrate having a width less than a width of the die street.

8. A method of singulating a plurality of die comprised in a substrate, the method comprising:

forming, on a first side of a substrate, one or more layers;

forming a backside metal layer on a second side of the substrate;

laser ablating a groove into the backside metal layer to expose at least a portion of the substrate, wherein the groove is located in a die street of the substrate; and

using the backside metal layer as a mask, singulating a plurality of die comprised in the substrate through plasma etching, from the second side of the substrate, at the portion of the substrate exposed by the groove.

9. The method of claim 8 , further comprising patterning the one or more layers.

10. The method of claim 8 , further comprising thinning the second side of the substrate, wherein the substrate is thinned to less than 50 micrometers.

11. The method of claim 8 , further comprising monitoring the laser ablating of the groove using a camera facing the second side of the substrate.

12. The method of claim 11 , further comprising making near-real-time adjustments to one or more laser parameters based upon data collected through the monitoring.

13. The method of claim 8 , wherein singulating the plurality of die comprised in the substrate through plasma etching further comprises removing a portion of the substrate of the substrate having a width less than a width of the die street.

14. The method of claim 8 , wherein the backside metal layer comprises copper.

15. A method of singulating a plurality of die comprised in a substrate, the method comprising:

using a laser, grooving through a backside metal layer in a die street coupled to a substrate; and

using the backside metal layer as a mask, singulating a plurality of die comprised in the substrate through removing, from a side of the substrate facing the backside metal layer, substrate material at a groove in the backside metal layer.

16. The method of claim 15 , further comprising actively measuring a thickness variation of the backside metal layer that is grooved as compared to an original thickness of the backside metal layer.

17. The method of claim 15 , further comprising making near-real-time adjustments to one or more laser parameters based upon data collected during active monitoring of grooving through the backside metal layer.

18. The method of claim 16 , wherein removing the substrate material at the groove further comprises removing through plasma etching.

19. The method of claim 16 , wherein the backside metal layer is substantially 10 micrometers thick.

20. The method of claim 16 , wherein the substrate is thinned to less than 50 micrometers.