Three-dimensional device structure including embedded integrated passive device and methods of making the same

1. A three-dimensional device structure comprising:

a first die comprising a first semiconductor substrate;

a second die disposed on the first die and comprising a second semiconductor substrate;

a dielectric encapsulation (DE) layer disposed on the first die and surrounding the second die;

a redistribution layer structure disposed on the second die and the DE layer; and

deep trench capacitor (DTC) disposed in a trench formed in the DE layer and electrically connected to the first die and the redistribution layer structure, the DTC comprising:

a first conductive layer electrically connected to the first die;

a second conductive layer electrically connected to the redistribution layer structure; and

a first dielectric layer disposed between the first conductive layer and the second conductive layer.

2. The three-dimensional device structure of claim 1 , wherein the DTC comprises a second dielectric layer surrounded by the second conductive layer.

3. The three-dimensional device structure of claim 1 , wherein:

the DTC comprises a contact flange comprising end regions of the first conductive layer, the first dielectric layer, and the second conductive layer that are disposed on an upper surface of the DE layer; and

the redistribution layer structure comprises a metal feature that electrically contacts the end region of the second conductive layer.

4. The three-dimensional device structure of claim 1 , wherein:

the redistribution layer structure comprises metal features; and

one of the metal features electrically contacts the second conductive layer.

5. The three-dimensional device structure of claim 1 , further comprising a through dielectric via (TDV) structure extending from an upper surface of the first die through the DE layer to electrically connect the first die and the redistribution layer structure.

6. The three-dimensional device structure of claim 5 , wherein the DTC is disposed between the TDV structure and the second die.

7. The three-dimensional device structure of claim 1 , further comprising multiple DTCs disposed in trenches formed in the DE layer.

8. The three-dimensional device structure of claim 1 , wherein:

the first die further comprises a first interconnect structure disposed on the first semiconductor substrate; and

the second die further comprises a second interconnect structure disposed on the second semiconductor substrate and electrically connected to the first interconnect structure.

9. A three-dimensional device structure comprising:

a first die comprising a first semiconductor substrate;

second dies disposed on and electrically connected to the first die, each of the second dies comprising a respective second semiconductor substrate;

a dielectric encapsulation (DE) layer disposed on the first die and surrounding the second dies;

a redistribution layer structure disposed on the second dies and the DE layer;

through dielectric via (TDV) structures extending from an upper surface of the first die through the DE layer to electrically connect the first die and the redistribution layer structure; and

deep trench capacitors (DTC) disposed in respective trenches formed in the DE layer and electrically connected to the first die and the redistribution layer structure, wherein the DTCs are each disposed between one of the TDV structures and an adjacent one of the second dies, and each DTC comprises:

a first conductive layer electrically connected to the first die;

a second conductive layer electrically connected to the redistribution layer structure; and

a first dielectric layer disposed between the first conductive layer and the second conductive layer.

10. The three-dimensional device structure of claim 9 , wherein each DTC comprises a second dielectric layer surrounded by the second conductive layer.

11. The three-dimensional device structure of claim 9 , wherein:

each DTC comprises a contact flange comprising end regions of the first conductive layer, the first dielectric layer, and the second conductive layer that are disposed on an upper surface of the DE layer; and

the redistribution layer structure comprises metal features that electrically contact the end regions of the second conductive layers of the DTCs.

12. The three-dimensional device structure of claim 11 , wherein the redistribution layer structure comprises metal features embedded in a dielectric layer and electrically contacting the second conductive layers.

13. The three-dimensional device structure of claim 9 , wherein:

the first die further comprises a first interconnect structure disposed on the first semiconductor substrate; and

each of the second dies further comprises second interconnect structures disposed on the second semiconductor substrates and electrically connected to the first interconnect structure.

14. A three-dimensional device structure comprising:

a first die comprising a first semiconductor substrate and a first interconnect structure electrically connected to a device layer of the first semiconductor substrate;

a second die disposed on the first die and comprising a second semiconductor substrate;

a dielectric encapsulation (DE) layer disposed on the first die and surrounding the second die;

a redistribution layer structure disposed on the second die and the DE layer;

a deep trench capacitor (DTC) embedded in the DE layer and electrically connected to the first interconnect structure and the redistribution layer structure, the DTC comprising:

a first conductive layer electrically connected to the first die;

a second conductive layer electrically connected to the redistribution layer structure; and

a first dielectric layer disposed between the first conductive layer and the second conductive layer.

15. The three-dimensional device structure of claim 14 , further comprising:

a through dielectric via (TDV) structure embedded in the DE layer and electrically connected to the first interconnect structure and the redistribution layer structure.

16. The three-dimensional device structure of claim 15 , wherein the DTC is disposed between the TDV structure and the second die.

17. The three-dimensional device structure of claim 14 , wherein:

the redistribution layer structure comprises metal features embedded in a dielectric layer; and

one of the metal features electrically contacts the second conductive layer.

18. The three-dimensional device structure of claim 14 , wherein:

the DTC comprises a contact flange comprising end regions of the first conductive layer, the first dielectric layer, and the second conductive layer that are disposed on an upper surface of the DE layer; and

the redistribution layer structure comprises a metal feature that electrically contacts the end region of the second conductive layer.

19. The three-dimensional device structure of claim 14 , wherein the DTC comprises a second dielectric layer surrounded by the second conductive layer.

20. The three-dimensional device structure of claim 14 , further comprising multiple DTCs disposed in trenches formed in the DE layer.