Open Czochralski furnace for single crystal growth
View Patent ↗The present disclosure provides a crystal growth apparatus. The crystal growth apparatus may include a furnace chamber; a temperature field device placed at least partially into the furnace chamber, wherein a cover plate of the temperature field device includes a first through hole; and a pulling rod component that passes through the first through hole and extends into the temperature field device.
1. An apparatus for crystal growth, comprising:
a furnace chamber;
a temperature field device placed at least partially into the furnace chamber, wherein a cover plate of the temperature field device includes a first through hole; and
a pulling rod component that passes through the first through hole and extends into the temperature field device.
2. The apparatus of claim 1 , wherein the furnace chamber is a non-closed structure.
3. The apparatus of claim 1 , wherein the furnace chamber includes:
a furnace body; and
a furnace cover, wherein the furnace cover is mounted on a top of the furnace body and includes a through hole through which the temperature field device is placed into the furnace chamber.
4. The apparatus of claim 3 , wherein a cooling structure is mounted on a sidewall of the furnace body or the furnace cover.
5. The apparatus of claim 4 , wherein the cooling structure mounted on the furnace cover includes at least one circle of cooling loop, a cooling medium passing through the cooling loop.
6. The apparatus of claim 1 , wherein a height of the temperature field device is higher than a height of the furnace chamber.
7. The apparatus of claim 1 , wherein a height of the temperature field device is lower than a height of the furnace chamber.
8. The apparatus of claim 1 , wherein the temperature field device includes:
a sealing drum;
the cover plate mounted on a top of the sealing drum; and
a bottom plate mounted on a bottom of the sealing drum.
9. The apparatus of claim 1 , the temperature field device includes:
a first drum;
a second drum mounted inside the first drum;
the cover plate mounted on a top of the temperature field device and covering an open end of the first drum; and
a bottom plate mounted on a bottom of the temperature field device and covering the other open end of the first drum.
10. The apparatus of claim 9 , wherein the temperature field device further includes:
a filler filled in the second drum and/or a space between the second drum and the first drum.
11. The apparatus of claim 1 , wherein the cover plate of the temperature field device includes two second through holes for allowing gases to enter into and/or exit from the temperature field device.
12. The apparatus of claim 11 , wherein the first through hole is located between the two second through holes.
13. The apparatus of claim 1 , wherein the apparatus further comprises:
a pulling component configured to drive the pulling rod component to move up and down.
14. The apparatus of claim 13 , wherein the pulling component includes a first driving device, a pillar, a slide, and a screw rod, wherein:
the first driving device is mounted on a top of the pillar;
the pillar includes a slide rail;
the screw rod is mounted in parallel with the slide rail and one end of the screw rod is connected to the first driving device; and
the slide is nested on the screw rod, at least a part of the slide is located within the slide rail, and a rotation of the screw rod drives the slide to move up and down along the slide rail.
15. The apparatus of claim 14 , wherein the apparatus further comprises a rotating component configured to drive the pulling rod component to rotate, the rotating component being mounted on the slide.
16. The apparatus of claim 15 , wherein the apparatus further comprises a weighing component configured to determine a weight of a crystal being grown on the pulling rod component, the weighing component being mounted on the slide.
17. The apparatus of claim 16 , wherein the rotating component at least includes a second driving device and a transmission component, wherein:
the second driving device drives the weighing component to rotate through the transmission component.
18. The apparatus of claim 17 , wherein the weighing component includes a weighing chamber and a weighing sensor, wherein:
the weighing sensor is mounted inside the weighing chamber;
one end of the weighing sensor is fixedly connected to the pulling rod component; and
the other end of the weighing sensor is fixedly connected to a cover plate of the weighing chamber.
19. The apparatus of claim 18 , wherein:
the transmission component includes a belt pulley and a belt;
an output spin axis of the second driving device is connected to a spin axis of the belt pulley; and
at least one belt pulley is mounted on the belt and the weighing chamber.
20. The apparatus of claim 19 , wherein the pulling rod component at least includes a middle rod and a guide rod, wherein:
one end of the middle rod is fixedly connected to the weighing chamber;
the middle rod passes through a through hole mounted on the slide;
the middle rod includes a hollow structure;
the guide rod passes through the middle rod; and
one end of the guide rod is connected to the weighing sensor and the other end of the guide rod is configured to connect a seed rod.