IP Library › Granted Patent US 11,631,665
Granted Patent B2
US 11,631,665 · App. 17/452,069 · Granted Apr 18, 2023

Semiconductor device

Inventor: Yuichi Harada (Matsumoto, JP)
Assignee: FUJI ELECTRIC CO., LTD.
H01L27/0664H01L29/0634H01L29/0638H01L29/0696H01L29/0834H01L29/1095H01L29/404H01L29/407H01L29/7397H01L29/8613
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Quick Facts
Patent No.
US 11,631,665
App. No.
17/452,069
Granted
Apr 18, 2023
Kind
B2
Abstract

Provided is a semiconductor device comprising a semiconductor substrate that includes a transistor region; an emitter electrode that is provided on the semiconductor substrate; a first dummy trench portion that is provided on the transistor region of the semiconductor substrate and includes a dummy conducting portion that is electrically connected to the emitter electrode; and a first contact portion that is a partial region of the transistor region, provided between an end portion of a long portion of the first dummy trench portion and an end portion of the semiconductor substrate, and electrically connects the emitter electrode and a semiconductor region with a first conductivity type provided in the transistor region.

Claims (52)

1. A semiconductor device including a transistor region, comprising:

an insulating film provided on a semiconductor substrate;

an emitter electrode contacting the semiconductor substrate and the insulating film;

a dummy trench portion provided in the transistor region and including a long portion that extends in a first direction, the dummy trench portion being electrically connected to the emitter electrode through a first portion in which the insulating film is not provided; and

a first contact portion, provided between the first portion and an end portion of the semiconductor substrate in the first direction and electrically connecting the emitter electrode and a semiconductor region with a first conductivity type that is provided in the semiconductor substrate,

wherein the first contact portion includes a region extending in the first direction.

2. The semiconductor device according to claim 1 , wherein

the dummy trench portion includes: a dummy trench; a dummy trench insulating film provided in an inner wall of the dummy trench; and a dummy conducting portion provided inside the dummy trench insulating film as a conductive material.

3. The semiconductor device according to claim 2 , further comprising:

a gate trench portion provided in the transistor region and including a long portion that extends in the first direction.

4. The semiconductor device according to claim 3 , wherein

the gate trench portion includes: a gate trench; a gate insulating film provided in an inner wall of the gate trench; and a gate conducting portion provided inside the gate insulating film as a conductive material.

5. The semiconductor device according to claim 4 , wherein

the region extending in the first direction in the first contact portion is provided between the dummy trench portion and the gate trench portion in a second direction that is orthogonal to the first direction.

6. The semiconductor device according to claim 5 , further comprising:

an emitter region with a second conductivity type provided in the semiconductor substrate; and

a base region with a first conductivity type provided in the semiconductor substrate,

wherein

a carrier concentration of the semiconductor region with the first conductivity type is higher than that of the base region, and

the emitter region and the base region are provided in a mesa region, the mesa region being a portion of the semiconductor substrate, sandwiched between the long portion of the dummy trench portion and the long portion of the gate trench portion in a second direction that is orthogonal to the first direction.

7. The semiconductor device according to claim 6 , wherein

the base region is provided continuously from the semiconductor region with the first conductivity type to which the first contact portion is connected to the mesa region.

8. The semiconductor device according to claim 7 , wherein

the first portion is formed father outward than the emitter region in the first direction.

9. The semiconductor device according to claim 8 , wherein

the region extending in the first direction in the first contact portion does not overlap with the dummy trench portion or the gate trench portion.

10. The semiconductor device according to claim 9 , further comprising:

a gate material layer positioned outside of an active region; wherein

the semiconductor region with the first conductivity type is provided continuously at least from below the first contact portion to below the gate metal layer.

11. The semiconductor device according to claim 9 , wherein

the dummy trench portion further includes: a short portion that extends in the second direction and is connected to an end portion of the long portion in the first direction of the dummy trench portion.

12. The semiconductor device according to claim 11 , further comprising:

a connection layer electrically connected to at least the dummy conducting portion of the short portion through the first portion.

13. The semiconductor device according to claim 12 , wherein

the dummy conducting portion and the connection layer are configured to include polysilicon, and

the dummy conducting portion and the connection layer are formed continuously.

14. The semiconductor device according to claim 12 , wherein

the first contact portion is provided between an end portion of the dummy trench portion and an end portion of the semiconductor substrate in the first direction.

15. The semiconductor device according to claim 12 , wherein

the connection layer includes a connection layer contact portion electrically connected to the emitter electrode, and

the first contact portion is provided between the connection layer contact portion and an end portion of the emitter electrode in the first direction.

16. The semiconductor device according to claim 14 , wherein

the gate trench portion further includes: a short portion that extends in the second direction and is connected to an end portion of the long portion in the first direction of the gate trench portion.

17. The semiconductor device according to claim 16 , wherein

the gate trench portion surrounds the dummy trench portion.

18. The semiconductor device according to claim 16 , wherein

an end portion of the long portion in the first direction of the gate trench portion is positioned farther outward than an end portion of the long portion in the first direction of the gate trench potion.

19. The semiconductor device according to claim 16 , wherein

a length of the end portion of the long portion in the first direction of the gate trench portion is longer than that of the end portion of the long portion in the first direction of the gate trench potion.

20. The semiconductor device according to claim 19 , wherein

the first contact portion includes a main region that extends in the second direction; and

the region that extends in the first direction in the first contact region is a sub region that is connected to the main region.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 28, 2021
From: HARADA, YUICHI
To: FUJI ELECTRIC CO., LTD.
Reel/Frame 057939/0786 →
Priority Claims (2)
JP JP2017-221127 · Nov 16, 2017 · national
JP JP2018-113413 · Jun 14, 2018 · national
Continuity (3)
Continuation 16664930 · Oct 27, 2019
Continuation PCTJP2018034933 · Sep 20, 2018
Related Publication 20220045047A1 · Feb 10, 2022