Structure and formation method of package containing chip structure with inclined sidewalls
A package structure and a formation method of a package structure are provided. The method includes disposing a chip structure over a substrate. The chip structure has an inclined sidewall, the inclined sidewall is at an acute angle to a vertical, the vertical is a direction perpendicular to a main surface of the chip structure, and the acute angle is in a range from about 12 degrees to about 45 degrees. The method also includes forming a protective layer to surround the chip structure.
1. A method for forming a package structure, comprising:
cutting an upper portion of a semiconductor wafer using a first dicing saw to form a trench extending into the semiconductor wafer, wherein the first dicing saw gradually becomes thicker along a direction from an edge of the first dicing saw towards an inner portion of the first dicing saw;
cutting a lower portion of the semiconductor wafer using a second dicing saw to deepen the trench, wherein an edge portion and an inner portion of the second dicing saw are substantially as thick as each other;
cutting the semiconductor wafer to obtain a chip structure;
disposing the chip structure over a substrate, wherein the chip structure has an inclined sidewall, the inclined sidewall is at an acute angle to a vertical, the vertical is a direction perpendicular to a main surface of the chip structure, and the acute angle is in a range from about 12 degrees to about 45 degrees; and
forming a protective layer to surround the chip structure.
2. The method for forming a package structure as claimed in claim 1 , further comprising:
cutting upper portions of the semiconductor wafer using the first dicing saw to form a plurality of second trenches extending into the semiconductor wafer; and
cutting lower portions of the semiconductor wafer using the second dicing saw to deepen the second trenches after the second trenches are formed.
3. The method for forming a package structure as claimed in claim 1 , further comprising forming a redistribution structure over the substrate before the chip structure is disposed.
4. The method for forming a package structure as claimed in claim 1 , further comprising forming a redistribution structure over the chip structure and the protective layer.
5. The method for forming a package structure as claimed in claim 1 , further comprising removing the substrate after the protective layer is formed.
6. The method for forming a package structure as claimed in claim 1 , further comprising disposing a second chip structure over the substrate before the protective layer is formed.
7. The method for forming a package structure as claimed in claim 6 , wherein the second chip structure has a second inclined sidewall, and the second inclined sidewall is steeper than the inclined sidewall of the chip structure.
8. A method for forming a package structure, comprising:
cutting an upper portion of a semiconductor wafer using a first dicing saw to form a trench extending into the semiconductor wafer, wherein the first dicing saw gradually becomes thicker along a direction from an edge of the first dicing saw towards an inner portion of the first dicing saw;
cutting a lower portion of the semiconductor wafer using a second dicing saw to deepen the trench;
cutting the semiconductor wafer to obtain at least one chip structure, wherein the chip structure has an inclined sidewall, the inclined sidewall is at an acute angle to a vertical, and the vertical is a direction perpendicular to a main surface of the chip structure; and
forming a protective layer laterally surrounding the chip structure.
9. The method for forming a package structure as claimed in claim 8 , wherein an edge portion and an inner portion of the second dicing saw are substantially as thick as each other.
10. The method for forming a package structure as claimed in claim 8 , further comprising:
cutting upper portions of the semiconductor wafer using the first dicing saw to form a plurality of second trenches extending into the semiconductor wafer; and
cutting lower portions of the semiconductor wafer using the second dicing saw to deepen the second trenches after the second trenches are formed.
11. A method for forming a package structure, comprising:
cutting an upper portion of a semiconductor wafer using a first dicing saw to form a trench extending into the semiconductor wafer, wherein the first dicing saw gradually becomes thicker along a direction from an edge of the first dicing saw towards an inner portion of the first dicing saw;
cutting a lower portion of the semiconductor wafer using a second dicing saw to deepen the trench;
partially removing the semiconductor wafer to obtain at least one chip structure, wherein the chip structure has an inclined sidewall, the inclined sidewall is at an acute angle to a vertical, and the vertical is a direction perpendicular to a main surface of the chip structure; and
forming a protective layer laterally surrounding the chip structure.
12. The method for forming a package structure as claimed in claim 11 , wherein an edge portion and an inner portion of the second dicing saw are substantially as thick as each other.
13. The method for forming a package structure as claimed in claim 11 , further comprising:
cutting upper portions of the semiconductor wafer using the first dicing saw to form a plurality of second trenches extending into the semiconductor wafer; and
cutting lower portions of the semiconductor wafer using second dicing saw to deepen the second trenches after the second trenches are formed.
14. The method for forming a package structure as claimed in claim 6 , further comprising:
disposing a third chip structure, wherein the third chip structure is under the protective layer, the third chip structure extends across a first sidewall of the chip structure and a second sidewall of the second chip structure.
15. The method for forming a package structure as claimed in claim 1 , wherein the chip structure has a first side region, a second side region, and a corner region, the corner region connects the first side region and the second side region, the inclined sidewall of the chip structure is in the first side region, and the chip structure has a second inclined sidewall in the corner region.
16. The method for forming a package structure as claimed in claim 15 , wherein the inclined sidewall is steeper than the second inclined sidewall.
17. The method for forming a package structure as claimed in claim 16 , wherein a top view of the corner region has a rounded profile.
18. The method for forming a package structure as claimed in claim 8 , wherein the chip structure has a first side region, a second side region, and a corner region, the corner region connects the first side region and the second side region, the inclined sidewall of the chip structure is in the first side region, and the chip structure has a second inclined sidewall in the corner region.
19. The method for forming a package structure as claimed in claim 18 , wherein the inclined sidewall is steeper than the second inclined sidewall.
20. The method for forming a package structure as claimed in claim 11 , wherein a top view of the chip structure has a rounded corner.