Magnetic sensor
Reduction of the S/N in an output from a magnetic sensor using the magnetic impedance effect is suppressed. A magnetic sensor 1 is provided with a sensitive element 31 including: plural soft magnetic material layers 105 ; and a nonmagnetic amorphous metal layer 106 provided between the plural soft magnetic material layers 105 , wherein the soft magnetic material layers 105 facing each other with the nonmagnetic amorphous metal layer 106 interposed therebetween are antiferromagnetically coupled to sense a magnetic field by a magnetic impedance effect.
1. A magnetic sensor comprising:
a sensitive element comprising:
plural soft magnetic material layers; and
a nonmagnetic amorphous metal layer provided between the plural soft magnetic material layers, wherein
the soft magnetic material layers facing each other with the nonmagnetic amorphous metal layer interposed therebetween are antiferromagnetically coupled to allow the sensitive element to sense a magnetic field by a magnetic impedance effect,
wherein the nonmagnetic amorphous metal layer is composed of amorphous metal containing Ti.
2. The magnetic sensor according to claim 1 , wherein the sensitive element further comprises a conductor layer having conductivity higher than that of the soft magnetic material layer, the conductor layer being provided between a set of the plural soft magnetic material layers facing each other with the nonmagnetic amorphous metal layer interposed therebetween and another set of the plural soft magnetic material layers facing each other with the nonmagnetic amorphous metal layer interposed therebetween.
3. The magnetic sensor according to claim 1 , wherein the nonmagnetic amorphous metal layer is composed of one of CrTi and AlTi.
4. The magnetic sensor according to claim 3 , wherein, when the nonmagnetic amorphous metal layer is composed of CrTi, a thickness thereof is 15 nm or more and 50 nm or less.
5. The magnetic sensor according to claim 1 , wherein, in the sensitive element, when the soft magnetic material layer is viewed from a thickness direction thereof, no closure magnetic domain is formed.
6. The magnetic sensor according to claim 1 , further comprising:
a nonmagnetic substrate; and
a thin film magnet provided between the substrate and the sensitive element, the thin film magnet being configured with a hard magnetic material and having magnetic anisotropy in an in-plane direction, wherein
the sensitive element has a longitudinal direction and a short direction, the longitudinal direction taking a direction of a magnetic field generated by the thin film magnet.
7. The magnetic sensor according to claim 6 , further comprising:
a pair of yokes, each being laminated on the thin film magnet to face an end portion of the sensitive element in the longitudinal direction thereof, and guiding a magnetic flux generated from the thin film magnet to pass through the sensitive element in the longitudinal direction thereof, wherein
the yoke comprises the plural soft magnetic material layers and a nonmagnetic amorphous metal layer laminated between the soft magnetic material layers.