Silicon etchant composition, pattern formation method and manufacturing method of array substrate using the etchant composition, and array substrate manufactured therefrom
The present disclosure relates to a silicon etchant composition comprising (A) an alkaline compound, (B) a metal salt, and (C) water, a pattern formation method and a manufacturing method of an array substrate using the silicon etchant composition, and an array substrate manufactured therefrom.
1. A silicon etchant composition, comprising an alkaline compound, a metal salt, and water,
wherein the metal salt is in an amount of 0.1 to 1.5% by weight relative to a total weight of the silicon etchant composition,
wherein an etch selectivity according to Equation 1 is equal to or greater than 10,000 when etching a silicon film and a silicon oxide film using the silicon etchant composition,
Etch
rate
of
silicon
film
Etch
rate
of
silicon
oxide
film
=
Etch
selectivity
,
[
Equation
1
]
wherein the metal salt is one or more of aluminum hydroxide, aluminum acetate, iron chloride, and titanium chloride.
2. The silicon etchant composition of claim 1 , wherein the silicon etchant composition comprises 1 to 23% by weight of the alkaline compound relative to the total weight of the silicon etchant composition.
3. The silicon etchant composition of claim 1 , wherein the alkaline compound includes organic hydroxide, inorganic hydroxide, or an azabicyclo-type compound, wherein the azabicyclo-type compound comprises one or more selected from the group consisting of an azabicyclo compound, a diazabicyclo compound, and a triazabicyclo compound.
4. The silicon etchant composition of claim 3 , wherein the organic hydroxide comprises a quaternary alkylammonium compound.
5. The silicon etchant composition of claim 3 , wherein the inorganic hydroxide is one or more selected from the group consisting of lithium hydroxide, sodium hydroxide, potassium hydroxide, rubidium hydroxide, cesium hydroxide, and francium hydroxide.
6. The silicon etchant composition of claim 1 , further comprising one or more additives selected from powdered silicon, a compound represented by Formula 2, and an alkanolamine-based compound
wherein R 1 to R 4 are each independently a hydrogen atom, a hydroxyl group, an alkoxy group having 1 to 5 carbon atoms, an acetate group having 1 to 5 carbon atoms, an aryl group having 6 to 30 carbon atoms, or an alkyl group having 1 to 5 carbon atoms that is unsubstituted or substituted with one or more of a hydroxyl group, an alkoxy group, and an amino group, and at least one of R 1 to R 4 includes a hydroxyl group or an alkoxy group.
7. The silicon etchant composition of claim 6 , wherein the alkanolamine-based compound is one selected from the group consisting of 1-amino-2-propanol, 2-amino-1-butanol, 3-amino-1-propanol, 3-amino-1,2-propanediol, methyldiethanolamine, propanolamine, ethanolamine, diethanolamine, N-methylethanolamine, N-methyldiethanolamine, 2-amino-3-methyl-1-butanol, 3-amino-2,2-dimethyl-1-propanol, tris(hydroxymethyl)aminomethane, 1,3-diamino-2-propanol, 2-amino-2-methyl-1,3-propanediol, 3-methylamino-1-propanol, 2-dimethylamino-2-methyl-1-propanol, 1-dimethylamino-2-propanol, 3-dimethylamino-1-propanol, 2-dimethylamino-1-propanol, 2-diethylamino-1-propanol, 2-diethylamino-1-ethanol, 2-ethylamino-1-ethanol, 1-(dimethylamino)2-propanol, diethanolamine N-propyldiethanolamine, N-isopropyldiethanolamine; N-(2-methylpropyl) diethanolamine, N-n-butyldiethanolamine, N-t-butylethanolamine, N-cyclohexyldiethanolamine, 2-(dimethylamino)ethanol; 2-diethylaminoethanol, 2-dipropylaminoethanol, 2-butylaminoethanol, 2-t-butylaminoethanol, 2-cycloaminoethanol, 2-amino-2-pentanol, 2-[bis(2-hydroxyethyl)amino]-2-methyl-1-propanol, 2-[bis(2-hydroxyethyl)amino]-2-propanol, N,N-bis(2-hydroxypropyl)ethanolamine, 2-amino-2-methyl-1-propanol triisopropanolamine, and combinations thereof.
8. The silicon etchant composition of claim 6 , wherein the powdered silicon includes silicon or a structure in which a silicon oxide film is formed on the surface.
9. A pattern formation method, comprising:
forming a silicon film on a substrate; and
etching the silicon film using the silicon etchant composition of claim 1 .
10. A manufacturing method of an array substrate, comprising the pattern formation method of claim 9 .