IP Library Granted Patent US 11,961,896
Granted Patent B2
US 11,961,896 · App. 17/474,879 · Granted Apr 16, 2024

Diamond-like carbon coating for passive and active electronics

Inventors: Erik Joseph Timpson (Lee's Summit, MO); Justin M. Schlitzer (Stillwell, KS); Thomas Matthew Selter (Blue Springs, MO); Michael Walsh (Overland Park, KS)
Assignee: Honeywell Federal Manufacturing & Technologies, LLC
H01L29/51H01L29/4916H01L29/84H01L29/868
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Quick Facts
Patent No.
US 11,961,896
App. No.
17/474,879
Granted
Apr 16, 2024
Kind
B2
Abstract

Systems and methods for building passive and active electronics with diamond-like carbon (DLC) coatings are provided herein. DLC may be layered upon substrates to form various components of electronic devices. Passive components such as resistors, capacitors, and inductors may be built using DLC as a dielectric or as an insulating layer. Active components such as diodes and transistors may be built with the DLC acting substantially like a semiconductor. The amount of sp 2 and sp 3 bonded carbon atoms may be varied to modify the properties of the DLC for various electronic components.

Claims (48)

1. A transistor, comprising:

a body region having a first end-region and a second end-region, the body region comprising at least one p-type dopant;

a source terminal connected to the first end-region;

a drain terminal connected to the second end-region,

wherein the source terminal and the drain terminal comprise at least one n-type dopant mixed with semiconducting diamond-like carbon (DLC);

a DLC layer disposed on top of and extending between the source terminal and the drain terminal; and

a gate terminal disposed on top of the DLC layer,

wherein the DLC layer electrically isolates the gate terminal from the source terminal and the drain terminal.

2. The transistor of claim 1 , wherein the DLC layer is doped with at least one of iron, silver, copper, nickel, or titanium.

3. The transistor of claim 1 , wherein the DLC layer is doped with silicon.

4. The transistor of claim 1 , wherein the DLC layer comprises a thickness in a range of 5 nanometers to 5 microns.

5. The transistor of claim 1 , wherein the gate terminal comprises polysilicon.

6. The transistor of claim 1 , wherein an sp 2 /sp 3 ratio of the semiconducting DLC is configured for electricity to pass through the semiconducting DLC via hopping conductivity.

7. The transistor of claim 1 , wherein the DLC layer comprises a hydrogen content in a range of 20% to 35%.

8. A transistor, comprising:

a body region having a first end-region and a second end-region, the body region comprising at least one p-type dopant;

a source terminal connected to the first end-region;

a drain terminal connected to the second end-region,

wherein the source terminal and the drain terminal comprise at least one n-type dopant mixed with semiconducting diamond-like carbon (DLC)

a DLC layer disposed on top of and extending between the source terminal and the drain terminal; and

a gate terminal comprising a refractory metal that is disposed on top of the DLC layer,

wherein the DLC layer electrically isolates the gate terminal from the source terminal and the drain terminal.

9. The transistor of claim 8 , wherein the DLC layer is doped with at least one of iron, silver, copper, nickel, or titanium.

10. The transistor of claim 8 , wherein the at least one n-type dopant comprises at least one of phosphorous, arsenic, bismuth, or antimony.

11. The transistor of claim 8 , wherein an sp 2 /sp 3 ratio of the semiconducting DLC is configured for electricity to pass through the semiconducting DLC via hopping conductivity.

12. The transistor of claim 8 , wherein the DLC layer comprises a hydrogen content in a range of 20% to 35%.

13. A transistor, comprising:

a body region having a first end-region and a second end-region, the body region comprising at least one p-type dopant;

a source terminal connected to the first end-region;

a drain terminal connected to the second end-region,

wherein the source terminal and the drain terminal comprise at least one n-type dopant mixed with semiconducting diamond-like carbon (DLC)

a DLC layer disposed on top of and extending between the source terminal and the drain terminal; and

a gate terminal comprising a silicide that is disposed on top of the DLC layer,

wherein the DLC layer electrically isolates the gate terminal from the source terminal and the drain terminal.

14. The transistor of claim 13 , wherein the DLC layer is doped with at least one of iron, silver, copper, nickel, or titanium.

15. The transistor of claim 13 , wherein the at least one n-type dopant comprises at least one of phosphorous, arsenic, bismuth, or antimony.

16. The transistor of claim 13 , wherein an sp 2 /sp 3 ratio of the semiconducting DLC is configured for electricity to pass through the semiconducting DLC via hopping conductivity.

17. The transistor of claim 13 , wherein the DLC layer comprises a hydrogen content in a range of 20% to 35%.

18. The transistor of claim 13 , wherein the DLC layer is doped with silicon.

19. A transistor, comprising:

a body region having a first end-region and a second end-region, the body region comprising at least one p-type dopant;

a source terminal connected to the first end-region;

a drain terminal connected to the second end-region,

wherein the source terminal and the drain terminal comprise at least one n-type dopant mixed with semiconducting diamond-like carbon (DLC)

a DLC layer disposed on top of and extending between the source terminal and the drain terminal; and

a gate terminal comprising a silicide that is disposed on top of the DLC layer,

wherein the DLC layer electrically isolates the gate terminal from the source terminal and the drain terminal.

20. The transistor of claim 19 , wherein the DLC layer is doped with silicon.

Assignments (4)
CONFIRMATORY LICENSE Recorded Dec 12, 2025
From: HONEYWELL FEDERAL MANUFACTURING & TECHNOLOGIES, LLC
To: NNSA
Reel/Frame 073200/0831 →
CONFIRMATORY LICENSE Recorded Jan 26, 2024
From: HONEYWELL FEDERAL MANUFACTURING & TECHNOLOGIES, LLC (FM&T)
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 066254/0942 →
CONFIRMATORY LICENSE Recorded Jan 25, 2024
From: HONEYWELL FEDERAL MANUFACTURING & TECHNOLOGIES, LLC (FM&T)
To: U.S. DEPARTMENT OF ENERGY
Reel/Frame 066250/0962 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 14, 2021
From: TIMPSON, ERIK JOSEPH; SCHLITZER, JUSTIN M.; SELTER, THOMAS MATTHEW; WALSH, MICHAEL
To: HONEYWELL FEDERAL MANUFACTURING & TECHNOLOGIES, LLC
Reel/Frame 057479/0817 →
Continuity (1)
Related Publication 20230083860A1 · Mar 16, 2023