Particle detection sensor and particle detector
A detection mechanism includes a light source disposed on a substrate, a condensing lens disposed between the substrate and light emitted from the light source, and a photodetector disposed on the substrate and under the condensing lens.
1. A particle detection sensor that is disposed on a substrate to detect particles in a gas, the particle detection sensor comprising:
a substrate
a light source member disposed on the substrate and configured to emit light in a light path, the light path being parallel to the substrate and towards a flow path through which gas containing the particles flows;
a condensing lens attached to the substrate and disposed between the substrate and the light path, the condensing lens being configured to transmit light scattered by the particles; and
a photodetector disposed on the substrate and under the condensing lens, the photodetector being configured to detect light transmitted through the condensing lens; wherein
the condensing lens is disposed parallel to the substrate.
2. The particle detection sensor according to claim 1 ,
wherein the substrate has a through-hole, and
wherein the photodetector extends through the through-hole.
3. The particle detection sensor according to claim 1 ,
wherein the substrate has a recess, and
wherein the photodetector is embedded in the recess.
4. The particle detection sensor according to claim 1 , wherein the condensing lens and the photodetector are integrated together.
5. The particle detection sensor according to claim 1 , wherein the condensing lens is removable.
6. The particle detection sensor according to claim 1 , wherein the condensing lens is spherical.
7. The particle detection sensor according to claim 1 , further comprising a holder that covers the condensing lens and the photodetector.
8. The particle detection sensor according to claim 7 , wherein the holder includes metal.
9. The particle detection sensor according to claim 1 , further comprising a projection lens disposed perpendicularly to the substrate,
wherein the condensing lens is disposed opposite to the light source member across the projection lens, and under light that is emitted from the light source member and that has passed through the projection lens.
10. The particle detection sensor according to claim 1 , further comprising a path disposed above at least the condensing lens, the path defines the light path and the gas path.
11. A particle detector, comprising:
the particle detection sensor according to claim 10 ; and
an air-current generation mechanism that generates an air current to cause the gas to flow through the path.
12. A particle detection sensor disposed on a substrate to detect particles in a gas, the particle detection sensor comprising:
a light source member disposed on the substrate;
a projection lens disposed perpendicularly to the substrate;
a condensing lens disposed parallel to the substrate, opposite to the light source member across the projection lens, and the condensing lens being on a light path from the light source member to the projection lens;
a photodetector disposed on the substrate, under the condensing lens, and on the light path of light emitted from the light source member; and
a path disposed above at least the condensing lens, the path defining the light path, and a gas path of the gas containing the particles.