Assemblies comprising memory cells and select gates; and methods of forming assemblies
Some embodiments include an assembly having a stack of alternating dielectric levels and conductive levels. Channel material pillars extend through the stack. Some of the channel material pillars are associated with a first sub-block, and others of the channel material pillars are associated with a second sub-block. Memory cells are along the channel material pillars. An insulative level is over the stack. A select gate configuration is over the insulative level. The select gate configuration includes a first conductive gate structure associated with the first sub-block, and includes a second conductive gate structure associated with the second sub-block. The first and second conductive gate structures are laterally spaced from one another by an intervening insulative region. The first and second conductive gate structures have vertically-spaced conductive regions, and have vertically-extending conductive structures which electrically couple the vertically-spaced conductive regions to one another. Some embodiments include methods of forming assemblies.
1. An assembly, comprising:
a stack comprising alternating dielectric levels and conductive levels;
channel material pillars extending through the stack; some of the channel material pillars being associated with a first sub-block and others of the channel material pillars being associated with a second sub-block;
memory cells along the channel material pillars;
an insulative level over the stack;
a select gate configuration over the insulative level; the select gate configuration including a first conductive gate structure associated with the first sub-block and a second conductive gate structure associated with the second sub-block, the first and second conductive gate structures being laterally spaced from one another by an intervening insulative region along a cross-section; the first conductive gate structure being along a first side of the intervening insulative region, and the second conductive gate structure being along a second side of the intervening insulative region; the second side being in opposing relation to the first side along the cross-section; and
wherein the first and second conductive gate structures have vertically-spaced conductive regions separated from one another by dielectric regions, and have vertically-extending conductive structures which electrically couple the vertically-spaced conductive regions to one another.
2. The assembly of claim 1 wherein the vertically-extending conductive structures comprise metal.
3. The assembly of claim 1 wherein the vertically-extending conductive structures comprise tungsten.
4. The assembly of claim 1 wherein the memory cells are NAND memory cells.
5. The assembly of claim 1 wherein the intervening insulative region includes a bottom portion which penetrates into the insulative level.
6. The assembly of claim 1 wherein the memory cells comprise charge-blocking material, and wherein the dielectric regions comprise a same composition as the charge-blocking material.
7. The assembly of claim 1 wherein the vertically-extending conductive structures extend through the intervening insulative region.
8. The assembly of claim 1 further comprising an insulative layer extending through the intervening insulative region and extending over the alternating dielectric levels and conductive levels.
9. The assembly of claim 1 further comprising an insulative layer extending through the intervening insulative region and extending over channel material pillars.
10. The assembly of claim 1 further comprising an insulative layer extending through the intervening insulative region and extending over at least one of the sub-blocks.
11. The assembly of claim 1 further comprising an insulative layer extending through the intervening insulative region and extending over the memory cells.
12. The assembly of claim 1 further comprising an insulative layer extending through the intervening insulative region and extending over the insulative level.
13. The assembly of claim 1 further comprising an insulative layer extending through the intervening insulative region and extending over the select gate configuration.
14. The assembly of claim 1 further comprising an insulative layer extending through the intervening insulative region and extending over at least one of the conductive gate structures.
15. The assembly of claim 1 wherein the first conductive gate structure comprises a different structural configuration relative to the second conductive gate structure.
16. The assembly of claim 1 wherein two of the vertically-spaced conductive regions of at least one of the first and second conductive gate structures comprise different structural configurations.
17. The assembly of claim 1 further comprising an insulative liner against the insulative level.
18. The assembly of claim 17 further comprising an insulative layer against the insulative liner.
19. The assembly of claim 17 wherein the vertically-extending conductive structures extend through the insulative liner.
20. The assembly of claim 1 further comprising an insulative liner over the insulative level and against an uppermost surface of the channel material pillars.