Nitride semiconductor light-emitting element and method for manufacturing nitride semiconductor light-emitting element
A nitride semiconductor light-emitting element includes an n-type semiconductor layer, a p-type semiconductor layer, an active layer, and an electron blocking layer comprising at least one layer. The at least one layer of the electron blocking layer includes a peak-containing layer having an n-type impurity concentration peak in an n-type impurity concentration distribution along a stacking direction. The n-type impurity concentration peak appears as a local maximum in the n-type impurity concentration distribution along the stacking direction in the peak-containing layer and has an n-type impurity concentration of not less than 10 times a smallest value of the n-type impurity concentration in a region along the stacking direction between positions that are separated from a position of the peak in the stacking direction on both sides in the stacking direction by 10% of a thickness of the peak-containing layer.
1. A nitride semiconductor light-emitting element, comprising:
an n-type semiconductor layer;
a p-type semiconductor layer;
an active layer provided between the n-type semiconductor layer and the p-type semiconductor layer; and
an electron blocking layer comprising at least one layer and being provided between the active layer and the p-type semiconductor layer,
wherein the at least one layer of the electron blocking layer comprises a peak-containing layer having an n-type impurity concentration peak in an n-type impurity concentration distribution along a stacking direction, and
wherein the n-type impurity concentration peak appears as a local maximum in the n-type impurity concentration distribution along the stacking direction in the peak-containing layer and has an n-type impurity concentration of not less than 10 times a smallest value of the n-type impurity concentration in a region along the stacking direction between positions that are separated from a position of the peak in the stacking direction on both sides in the stacking direction by 10% of a thickness of the peak-containing layer.
2. The nitride semiconductor light-emitting element according to claim 1 , wherein the n-type impurity concentration peak has an n-type impurity concentration of not less than 21 times a smallest value of the n-type impurity concentration in the n-type impurity concentration distribution along the stacking direction in the peak-containing layer.
3. The nitride semiconductor light-emitting element according to claim 1 , wherein the electron blocking layer comprises a first layer formed adjacent to an upper side of the active layer and a second layer formed on an upper side of the first layer, and wherein the second layer comprises the peak-containing layer.
4. The nitride semiconductor light-emitting element according to claim 1 , wherein the peak-containing layer comprises at least one Al composition ratio peak in an Al composition ratio distribution along the stacking direction.
5. A method for manufacturing a nitride semiconductor light-emitting element that comprises an n-type semiconductor layer, a p-type semiconductor layer, an active layer provided between the n-type semiconductor layer and the p-type semiconductor layer, and an electron blocking layer comprising at least one layer and being provided between the active layer and the p-type semiconductor layer, the method comprising:
in a process of making the peak-containing layer constituting the at least one layer of the electron blocking layer, forming the peak-containing layer so that an n-type impurity concentration peak appears in an n-type impurity concentration distribution along a stacking direction in the peak-containing layer,
wherein the n-type impurity concentration peak appears as a local maximum in the n-type impurity concentration distribution along the stacking direction in the peak-containing layer and has an n-type impurity concentration of not less than 10 times a smallest value of the n-type impurity concentration in a region along the stacking direction between positions that are separated from a position of the peak in the stacking direction on both sides in the stacking direction by 10% of a thickness of the peak-containing layer.
6. The method according to claim 5 , wherein the process of making the peak-containing layer comprises forming a silicon nitride-containing portion containing SiN X in a part of a region of the peak-containing layer along the stacking direction, and wherein the peak-containing layer has the n-type impurity concentration peak in the n-type impurity concentration distribution along the stacking direction in the region along the stacking direction in which the silicon nitride-containing portion is present.
7. The nitride semiconductor light-emitting element according to claim 1 , wherein at least a portion of a region R 2 along the stacking direction above and below the position of the n-type impurity concentration peak P 2 within the 10% thickness and a portion of the region R 1 along the stacking direction above and below the position of the Al composition ratio peak P 1 within the 10% thickness are formed at a same position in the stacking direction.
8. The nitride semiconductor light-emitting element according to claim 1 , wherein the peak-containing layer comprises AlGaN having an Al composition ratio of 50% or more and precipitated silicon nitride.