Broadband laser-pumped plasma light source
A light source with radiating plasma sustained in the gas-filled chamber by a focused beam of CW laser. The gas is inert gas with a purity of at least 99.99%. The chamber contains a metal housing with at least one window made of MgF 2 for outputting a plasma radiation. Each window is located in a hole of the housing on the end of a sleeve and is soldered to the sleeve by means of glass cement, and each sleeve is welded to the hole of the metal housing on the outside seam. The sleeves and the housing are made of an alloy with a coefficient of linear thermal expansion (CLTE), matched with the CLTE of the MgF 2 crystal in the direction perpendicular to the optical axis of the MgF 2 crystal. The technical result consists in expanding the radiation spectrum of the light source into the VUV region.
1. A laser-pumped plasma light source, comprising: a chamber filled with a high-pressure gas, a means for plasma ignition, a region of radiating plasma sustained in the chamber by a focused beam of a continuous wave (CW) laser; at least one beam of plasma radiation exiting the chamber that contains a metal housing with a window for introducing into the chamber a beam of the CW laser and with at least one window for outputting a beam of plasma radiation from the chamber, wherein
the beam of the CW laser is focused by a lens installed in the chamber between the window and the region of radiating plasma,
the gas belongs to inert gases with a purity of at least 99.99% or is a mixture thereof,
at least one window for outputting the beam of plasma radiation is made of crystalline magnesium fluoride (MgF 2 ),
each window is located on an inner side of the chamber on an end of a sleeve closest to the region of radiating plasma, the sleeve located in a hole of the housing, each window is soldered to the sleeve by means of glass cement and the sleeve with the window soldered to it is welded to the hole of the metal housing.
2. The light source according to claim 1 , wherein a surface of the end face of the sleeve and an adjacent surface of the MgF 2 window are substantially perpendicular to an optical axis of the MgF 2 crystal.
3. The light source according to claim 1 , wherein each sleeve and the housing are made of a nickel-iron alloy with a coefficient of linear thermal expansion (CLTE) matched with the CLTE of the crystal magnesium fluoride in a direction perpendicular to an optical axis of the MgF 2 crystal.
4. The light source according to claim 1 , wherein a short-wave boundary of a spectrum in the beam of plasma radiation is determined by a MgF 2 transmission boundary in a vacuum ultraviolet (VUV) region, being equal to 110 nm.
5. The light source according to claim 1 , wherein a vacuum or gas environment, which does not absorb VUV radiation with a wavelength of 110 nm and more, is located outside the MgF 2 window.
6. The light source according to claim 5 , wherein the chamber filled with the high-pressure gas is sealingly connected to an outside chamber with objects that are irradiated through the MgF 2 window by plasma radiation, said outside chamber is sealingly connected by means of a branch pipe made as a thermal bridge and equipped with a cooling radiator.
7. The light source according to claim 1 , wherein the beam of plasma radiation is directed from the region of the radiating plasma to the MgF 2 window directly without reflections.
8. The light source according to claim 1 , wherein all sleeves are axisymmetric sleeves with the windows soldered to them, the axisymmetric sleeves are welded to the housing made in one piece.
9. The light source according to claim 1 , wherein the region of radiating plasma is located in a housing cavity formed by an intersection of at least two holes in each of which there is a sleeve with a window.
10. The light source according to claim 1 , wherein at least one the sleeves is located in the hole of the housing, said sleeve has a variable outer diameter and the window is located at the end of the sleeve with a smaller outer diameter.
11. The light source according to claim 1 , wherein the housing contains at least two housing parts with the windows, said housing parts are welded together after internal chamber parts are installed.
12. The light source according to claim 11 , in the chamber of which at least one retroreflector is placed, for example, in ϕ b form of a spherical mirror centered in the region of radiating plasma.
13. The light source according to claim 1 , wherein welds are outside the housing.
14. The light source according to claim 1 , wherein the means for plasma ignition is a solid-state laser system generating two pulsed laser beams in Q-switching mode and in free-running mode, while in a continuous mode of operation a gas pressure in the chamber is around 50 bar or higher with a temperature of the chamber's inside surface of at least 600 K.
15. The light source according to claim 1 , wherein the focused beam of the CW laser is directed into the chamber vertically upwards and an upper wall of the housing is located at a distance from the region of radiating plasma of no more than 5 mm.
16. The light source according to claim 1 , wherein the lens focusing the beam of the CW laser and each window for outputting the beam of plasma radiation are located at a distance from the region of radiating plasma of no more than 5 mm.
17. The light source according to claim 1 , wherein the window is a lens arranged for reducing aberrations which distort a path of rays of the beam of plasma radiation passing through the window, and for reducing the angular aperture of the beam of plasma radiation exiting the chamber.
18. The light source according to claim 1 , wherein a direction of the beam of plasma radiation differs from a direction of the CW laser beam having passed through the region of radiating plasma.
19. The light source according to claim 1 , wherein the chamber housing is designed as a rectangular prism, while the focused beam of the CW laser and the beams of plasma radiation have mutually orthogonal axes which intersect in the region of radiating plasma.
20. The light source according to claim 1 , wherein the housing contains either a sealed gas inlet or a gas port designed to fill the chamber with gas and to control the pressure and composition of the gas in the chamber.