Phase shifter with at least one phase control element having a membrane bridge including a support portion connected to a transmission line extension portion by an insulating layer
View Patent ↗The present disclosure provides a phase shifter, a method for fabricating the same, and an antenna. The phase shifter includes a substrate, first and second transmission lines spaced apart from each other on the substrate, and at least one phase control element on the substrate. Each phase control element includes a membrane bridge and a transmission line extension which is on the substrate, between the first and second transmission lines, and electrically coupled to the first transmission line; the membrane bridge is on a side of the transmission line extension distal to the substrate, opposite to and spaced apart from the transmission line extension, and electrically coupled to the second transmission line. The membrane bridge is configured to move a portion of the membrane bridge in response to the first and second transmission lines being applied with different voltages, to change a distance from the transmission line extension.
1. A phase shifter comprising a substrate, first and second transmission lines spaced apart from each other on the substrate, and at least one phase control element on the substrate, wherein
each of the at least one phase control element comprises a transmission line extension portion and a membrane bridge, and the transmission line extension portion is on the substrate, is between the first transmission line and the second transmission line, and is electrically coupled to the first transmission line;
the membrane bridge comprises a first portion, a first support portion and a second support portion, the first portion electrically couples the first support portion to the second support portion, and the membrane bridge is electrically coupled to the second transmission line through the first support portion; and
the first portion of the membrane bridge is configured to move in response to the first and second transmission lines being applied with different voltages, so as to change a distance from the first portion of the membrane bridge to the transmission line extension portion,
the phase shifter further comprises: an insulating layer, wherein
the insulating layer is on the transmission line extension portion and on a side of the transmission line extension portion distal to the substrate, and
the second support portion is connected between the first portion and the insulating layer.
2. The phase shifter of claim 1 , further comprising first and second bias wires each disposed on the substrate and electrically coupled to the first and second transmission lines, respectively, wherein
the first and second bias wires are configured to apply different voltages to the first and second transmission lines, respectively.
3. The phase shifter of claim 1 , wherein at least one hollow portion is provided in the membrane bridge, and the at least one hollow portion penetrates through the membrane bridge in a direction perpendicular to a plane in which the substrate is located.
4. The phase shifter of claim 3 , wherein the at least one hollow portion penetrates through the first portion in the direction perpendicular to the plane in which the substrate is located.
5. The phase shifter of claim 1 ,
wherein the insulating layer is configured to prevent the first portion of the membrane bridge from electrically communicating with the transmission line extension portion when moving in a direction approaching the transmission line extension portion.
6. The phase shifter of claim 1 , wherein
the first portion is configured to bend in a direction approaching the transmission line extension portion in response to the first and second transmission lines being applied with different voltages.
7. An antenna, comprising the phase shifter of claim 1 .
8. The phase shifter of claim 1 , wherein the transmission line extension portion is in a same layer as the first transmission line.
9. The phase shifter of claim 1 , wherein the transmission line extension portion and the first transmission line are formed as a single piece.
10. A method for fabricating a phase shifter, comprising:
forming, on a substrate, a first transmission line and a second transmission line spaced apart from each other and a transmission line extension portion of each of at least one phase control element, wherein the transmission line extension portion is between the first transmission line and the second transmission line, and is electrically coupled to the first transmission line;
forming a membrane bridge for each of the at least one phase control element on a side of the transmission line extension portion distal to the substrate, wherein
the membrane bridge comprises a first portion, a first support portion and a second support portion, the first portion electrically couples the first support portion to the second support portion, and the membrane bridge is electrically coupled to the second transmission line through the first support portion; and
the first portion of the membrane bridge is configured to move in response to the first and second transmission lines being applied with different voltages, so as to change a distance from the first portion of the membrane bridge to the transmission line extension portion,
the phase shifter further comprises: an insulating layer, wherein
the insulating layer is on the transmission line extension portion and on the side of the transmission line extension portion distal to the substrate, and
second support portion is connected between the first portion and the insulating layer.
11. The method of claim 10 , wherein the method further comprises:
forming at least one hollow portion in the membrane bridge, the at least one hollow portion penetrating through the membrane bridge in a direction perpendicular to a plane in which the substrate is located.