IP Library Granted Patent US 11,993,864
Granted Patent B2
US 11,993,864 · App. 17/516,956 · Granted May 28, 2024

Silicon carbide magnetometer and associated material formation methods

Inventors: John B. Abraham (Baltimore, MD); Brian D. Clader (Ellicott City, MD); Robert Osiander (Columbia, MD); Cameron A. Gutgsell (Laurel, MD); Dalibor J. Todorovski (Columbia, MD); Scott A. Sperling (Baltimore, MD); Jacob E. Epstein (Takoma Park, MD); Timothy M. Sweeney (Fulton, MD); Elizabeth A. Pogue (Laurel, MD); Tyrel M. McQueen (Baltimore, MD)
Assignee: The Johns Hopkins University
C30B33/02C30B29/36C30B33/04G01R33/032
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Quick Facts
Patent No.
US 11,993,864
App. No.
17/516,956
Granted
May 28, 2024
Kind
B2
Abstract

A method for forming a silicon carbide material with a plurality of negatively charged silicon mono-vacancy defects includes irradiating a silicon carbide sample, annealing the irradiated silicon carbide sample in an annealing operation, and quenching the annealed silicon carbide sample. Quenching may include heating the annealed silicon carbide sample to a maximum temperature and quenching the annealed silicon carbide sample to form the silicon carbide sample with the plurality of negatively charged silicon mono-vacancy defects.

Claims (16)

1. A method for forming a silicon carbide material with a plurality of negatively charged silicon mono-vacancy defects, the method comprising:

irradiating a silicon carbide sample to form an irradiated silicon carbide sample;

annealing the irradiated silicon carbide sample in an annealing operation to form an annealed silicon carbide sample; and

quenching the annealed silicon carbide sample, wherein the quenching comprises heating the annealed silicon carbide sample to a maximum temperature and quenching the annealed silicon carbide sample to form the silicon carbide sample with the plurality of negatively charged silicon mono-vacancy defects;

wherein the silicon carbide sample exhibits a photoluminescence spectra with zero photon lines at about 1445, 1440, and 1354 millielectronvolts at temperatures below 10 Kelvin.

2. The method of claim 1 , wherein the n-type SiC wafer is a four layer hexagonal polytype.

3. The method of claim 1 , wherein the plurality of negatively charged silicon mono-vacancy defects are point defects in a crystalline material of the silicon carbide sample the plurality of negatively charged silicon mono-vacancy defects.

4. The method of claim 1 , wherein irradiating the silicon carbide sample comprises neutron irradiating the silicon carbide sample.

5. A method for forming a silicon carbide material with a plurality of negatively charged silicon mono-vacancy defects, the method comprising:

irradiating a silicon carbide sample to form an irradiated silicon carbide sample;

annealing the irradiated silicon carbide sample in an annealing operation to form an annealed silicon carbide sample; and

quenching the annealed silicon carbide sample, wherein the quenching comprises heating the annealed silicon carbide sample to a maximum temperature and quenching the annealed silicon carbide sample to form the silicon carbide sample with the plurality of negatively charged silicon mono-vacancy defects,

wherein the silicon carbide sample with the plurality of negatively charged silicon mono-vacancy defects exhibits a shot noise sensitivity in a range of about 3.5 nT/√{square root over (Hz)} to 2.0 nT/√{square root over (Hz)}.

6. The method of claim 1 , wherein the annealing operation comprises cooling the irradiated silicon carbide sample to room temperature.

7. The method of claim 1 further comprising cutting or dicing a SiC substrate comprising a purity layer with a nitrogen doping below 5.0×10 14 cm −3 disposed on an n-type SiC wafer to form the silicon carbide sample prior to irradiating.

8. The method of claim 1 , wherein the silicon carbide sample with the plurality of negatively charged silicon mono-vacancy defects responds to a presence of a magnetic field with a change in photoluminescence.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 27, 2021
From: ABRAHAM, JOHN B.; CLADER, BRIAN D.; OSIANDER, ROBERT; GUTGSELL, CAMERON A.; TODOROVSKI, DALIBOR J.; SPERLING, SCOTT A.; EPSTEIN, JACOB E.; SWEENEY, TIMOTHY M.; POGUE, ELIZABETH A.; MCQUEEN, TYREL M.
To: THE JOHNS HOPKINS UNIVERSITY
Reel/Frame 058478/0056 →
Continuity (2)
Provisional Application 63109503 · Nov 4, 2020
Related Publication 20220136135A1 · May 5, 2022