Semiconductor device and a method of manufacturing the semiconductor device
Provided is a semiconductor device. The semiconductor device comprises a first active pattern extending in a first direction on a substrate, a second active pattern which extends in the first direction and is adjacent to the first active pattern in a second direction different from the first direction, a field insulating film placed between the first active pattern and the second active pattern, a first gate structure which crosses the first active pattern, extends in the second direction, and includes a first gate electrode and a first gate spacer, a second gate structure which crosses the second active pattern, extends in the second direction, and includes a second gate electrode and a second gate spacer, a gate separation structure placed on the field insulating film between the first gate structure and the second gate structure.
1. A semiconductor device comprising:
a first active pattern extending in a first direction on a substrate;
a second active pattern which extends in the first direction and is spaced apart from the first active pattern in a second direction different from the first direction;
a third active pattern which extends in the first direction and is spaced apart from the first active pattern in the second direction, the first active pattern being interposed between the second active pattern and the third active pattern;
a field insulating film placed between the first active pattern and the second active pattern and between the first active pattern and the third active pattern;
a first gate structure which crosses the first active pattern and the third active pattern, extends in the second direction, and includes a first gate electrode and a first gate insulating film, the first gate insulating film interposed between the first active pattern and the first gate electrode and between the third active pattern and the first gate electrode;
a second gate structure which crosses the second active pattern, extends in the second direction, and includes a second gate electrode and a second gate insulating film, the second gate insulating film interposed between the second active pattern and the second gate electrode;
a first gate separation structure placed on an upper surface of the field insulating film between the first gate structure and the second gate structure, the first gate separation structure including a first dam structure and a gate separation filling film which is at least partially placed on an upper surface of the first dam structure; and
a second dam structure placed on an upper surface of the field insulating film between the first active pattern and the third active pattern,
wherein the first gate insulating film extends along a side wall and an upper surface of the second dam structure, and
wherein the second gate insulating film extends along a side wall of the first dam structure and does not extend along a side wall of the gate separation filling film.
2. The semiconductor device of claim 1 , wherein a height of the first gate insulating film is the same as a height of the second gate insulating film from a top surface of the substrate.
3. The semiconductor device of claim 1 , wherein a height of the second gate insulating film is higher than a height of the first gate insulating film from a top surface of the substrate.
4. The semiconductor device of claim 1 , wherein a width of each of the first and second dam structures decreases in a direction approaching the substrate.
5. The semiconductor device of claim 4 , wherein the first gate insulating film is placed between the first dam structure and the gate separation filling film.
6. The semiconductor device of claim 1 , wherein a height of the first gate insulating film is between a height of the first gate electrode and a height of an uppermost surface of the first active pattern from a top surface of the substrate.
7. The semiconductor device of claim 1 , wherein an upper surface of the first gate electrode closest to the gate separation structure is flat and has a constant height from a top surface of the substrate.
8. The semiconductor device of claim 1 , wherein the first active pattern includes a first lower pattern, and a first sheet pattern spaced apart from the first lower pattern in a third direction which is perpendicular to the first and second directions, and
the first gate electrode wraps the first sheet pattern.
9. A semiconductor device comprising:
a first active pattern extending in a first direction on a substrate;
a second active pattern which extends in the first direction and is adjacent to the first active pattern in a second direction different from the first direction;
a field insulating film placed between the first active pattern and the second active pattern;
a first gate structure which crosses the first active pattern, extends in the second direction, and includes a first gate electrode and a first gate spacer;
a second gate structure which crosses the second active pattern, extends in the second direction, and includes a second gate electrode and a second gate spacer;
a gate separation structure placed on the field insulating film between the first gate structure and the second gate structure, the gate separation structure including a wedge-shaped dam structure whose width decreases in a direction approaching the substrate and a gate separation filling film which is at least partially placed on an upper surface of the dam structure; and
a first gate insulating film which extends along at least a part of a first side wall of the gate separation structure and an upper surface of the field insulating film,
wherein a width in the second direction of the first gate electrode placed between the first active pattern and the gate separation structure at a first height from a top surface of the substrate is the same as a width in the second direction of the second gate electrode placed between the second active pattern and the gate separation structure at the first height,
a height of the first gate insulating film is between a height of the first gate electrode and a height of an uppermost surface of the first active pattern from the top surface of the substrate, and
wherein an upper surface of the gate separation structure is higher than an upper surface of the first gate electrode.
10. The semiconductor device of claim 9 , wherein the first gate insulating film is placed on one side wall of the dam structure and is not placed on one side wall of the gate separation filling film.
11. The semiconductor device of claim 10 , wherein the first gate insulating film is placed between the dam structure and the gate separation filling film.
12. The semiconductor device of claim 9 , wherein an upper surface of the first gate electrode adjacent to the gate separation structure is flat and has a constant height from the top surface of the substrate.
13. The semiconductor device of claim 9 , further comprising:
a second gate insulating film extending along at least a part of a second side wall of the gate separation structure and the upper surface of the field insulating film, the second side wall being opposite the first side wall,
wherein the first gate insulating film extends along at least a part of the first side wall of the gate separation structure and the upper surface of the field insulating film, and at least a part of the first gate insulating film is placed between the first gate electrode and the gate separation structure, and
at least a part of the second gate insulating film is placed between the second gate electrode and the gate separation structure.
14. The semiconductor device of claim 13 , wherein a height of the first gate insulating film is the same as a height of the second gate insulating film from the top surface of the substrate.