IP Library › Granted Patent US 11,658,221
Granted Patent B2
US 11,658,221 · App. 17/522,764 · Granted May 23, 2023

Backside contact structures and fabrication for metal on both sides of devices

Inventors: Patrick Morrow (Portland, OR); Rishabh Mehandru (Portland, OR); Aaron D. Lilak (Beaverton, OR); Kimin Jun (Hillsboro, OR)
Assignee: Intel Corporation
H01L29/41791H01L21/823431H01L27/1266H01L29/0847H01L29/401H01L29/4236H01L29/6653H01L29/66553H01L29/66795H01L29/66803H01L29/78H01L29/785H01L21/2254H01L21/26513H01L29/66545
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Quick Facts
Patent No.
US 11,658,221
App. No.
17/522,764
Granted
May 23, 2023
Kind
B2
Abstract

An apparatus including a circuit structure including a device stratum including a plurality of devices including a first side and an opposite second side; and a metal interconnect coupled to at least one of the plurality of devices from the second side of the device stratum. A method including forming a transistor device including a channel between a source region and a drain region and a gate electrode on the channel defining a first side of the device; and forming an interconnect to one of the source region and the drain region from a second side of the device.

Claims (44)

1. An integrated circuit structure, comprising:

a semiconductor body having a top, a bottom, a first side and a second side, the first side and the second side between the top and the bottom, and the first side opposite the second side;

a gate structure over the top and extending along the first side and the second side of the semiconductor body;

a first source or drain structure in the semiconductor body at a first side of the gate structure;

a second source or drain structure in the semiconductor body at a second side of the gate structure, the second side opposite the first side; and

a conductive contact on the bottom of the semiconductor body at a location vertically beneath the first source or drain structure.

2. The integrated circuit structure of claim 1 , wherein the conductive contact is further along a portion of the first side of the semiconductor body.

3. The integrated circuit structure of claim 2 , wherein the conductive contact is further along a portion of the second side of the semiconductor body.

4. The integrated circuit structure of claim 1 , wherein the gate structure extends along only a portion of the first side and the second side of the semiconductor body.

5. The integrated circuit structure of claim 1 , further comprising:

a second conductive contact over the top of the semiconductor body at a location vertically above the second source or drain structure.

6. The integrated circuit structure of claim 5 , further comprising:

an epitaxial semiconductor structure vertically between the second conductive contact and the top of the semiconductor body.

7. The integrated circuit structure of claim 1 , further comprising:

a second conductive contact over the top of the semiconductor body at a location vertically above the first source or drain structure.

8. The integrated circuit structure of claim 1 , further comprising:

a second conductive contact on the bottom of the semiconductor body at a location vertically below the second source or drain structure.

9. The integrated circuit structure of claim 1 , further comprising:

an epitaxial semiconductor structure on the top of the semiconductor body at the first side of the gate structure.

10. A computing device, comprising:

a memory; and

an integrated circuit die coupled to the memory, the integrated circuit die comprising an integrated circuit structure, the integrated circuit structure comprising:

a semiconductor body having a top, a bottom, a first side and a second side, the first side and the second side between the top and the bottom, and the first side opposite the second side;

a gate structure over the top and extending along the first side and the second side of the semiconductor body;

a first source or drain structure in the semiconductor body at a first side of the gate structure;

a second source or drain structure in the semiconductor body at a second side of the gate structure, the second side opposite the first side; and

a conductive contact on the bottom of the semiconductor body at a location vertically beneath the first source or drain structure.

11. The system of claim 10 , further comprising:

a graphics processing unit coupled to the integrated circuit die.

12. The system of claim 10 , further comprising:

an antenna coupled to the integrated circuit die.

13. The system of claim 10 , further comprising:

a display coupled to the integrated circuit die.

14. The system of claim 10 , further comprising:

a battery coupled to the integrated circuit die.

15. The system of claim 10 , further comprising:

a global positioning system coupled to the integrated circuit die.

16. The system of claim 10 , further comprising:

a compass coupled to the integrated circuit die.

17. The system of claim 10 , wherein the conductive contact is further along a portion of the first side of the semiconductor body.

18. The system of claim 17 , wherein the conductive contact is further along a portion of the second side of the semiconductor body.

19. The system of claim 10 , wherein the gate structure extends along only a portion of the first side and the second side of the semiconductor body.

20. The system of claim 10 , the integrated circuit structure further comprising:

a second conductive contact over the top of the semiconductor body at a location vertically above the second source or drain structure.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 19, 2021
From: MORROW, PATRICK; MEHANDRU, RISHABH; LILAK, AARON D.; JUN, KIMIN
To: INTEL CORPORATION
Reel/Frame 058163/0573 →
Continuity (3)
Continuation 16999508 · Aug 21, 2020
Division 15747119
Related Publication 20220069094A1 · Mar 3, 2022