Magnetic sensor
It is aimed at improving sensitivity of a magnetic sensor using the magnetic impedance effect. A magnetic sensor includes: a non-magnetic substrate; and a sensitive element including a soft magnetic material layer composed of an amorphous alloy with an initial magnetic permeability of 5,000 or more, the soft magnetic material layer being provided on the substrate, having a longitudinal direction and a short direction, being provided with uniaxial magnetic anisotropy in a direction crossing the longitudinal direction, and sensing a magnetic field by a magnetic impedance effect.
1. A magnetic sensor comprising:
a non-magnetic substrate; and
a sensitive element including a soft magnetic material layer composed of an amorphous alloy with an initial magnetic permeability of 5,000 or more, the soft magnetic material layer being provided on the substrate, having a longitudinal direction and a short direction, being provided with uniaxial magnetic anisotropy in a direction crossing the longitudinal direction, and sensing a magnetic field by a magnetic impedance effect.
2. The magnetic sensor according to claim 1 , wherein the soft magnetic material layer has an initial magnetic permeability of 10,000 or more.
3. The magnetic sensor according to claim 1 , wherein the soft magnetic material layer is an amorphous alloy mainly composed of Co and also containing Fe, Si, B, and Mn.
4. The magnetic sensor according to claim 1 , wherein the soft magnetic material layer is an amorphous alloy mainly composed of Co and also containing Fe, Si, B, Mn, and Cr.
5. The magnetic sensor according to claim 1 , wherein
the sensitive element includes a plurality of the soft magnetic material layers, and
the sensitive element includes a magnetic domain suppression layer between the soft magnetic material layers, the magnetic domain suppression layer suppressing occurrence of a closure magnetic domain in the soft magnetic material layers.
6. The magnetic sensor according to claim 1 , wherein
the sensitive element comprises a plurality of the soft magnetic material layers, and
the sensitive element includes a non-magnetic conductor layer between the soft magnetic material layers, the non-magnetic conductor layer having higher conductivity than the soft magnetic material layers.
7. The magnetic sensor according to claim 1 , wherein
the sensitive element includes a plurality of the soft magnetic material layers, and
the sensitive element includes a non-magnetic antiferromagnetically coupling layer between the soft magnetic material layers, the antiferromagnetically coupling layer antiferromagnetically coupling the soft magnetic material layers.