Laser processing device and laser processing method using same
A laser processing device includes a laser oscillator, optical fiber ( 90 ), beam control mechanism ( 20 ), and a laser light emitting head. The laser oscillator includes first and second laser oscillation units that generate first and second laser light rays (LB 1 ) and (LB 2 ), respectively. Beam control mechanism ( 20 ) includes optical path changing and holding mechanism ( 40 ) that is disposed between second condenser lens ( 32 ) that condenses second laser light (LB 2 ) and dichroic mirror ( 33 ) that multiplexes first and second laser light rays (LB 1 ) and (LB 2 ) and causes the multiplexed light to be incident on optical fiber ( 90 ). Beam control mechanism ( 20 ) changes an incident position of second laser light (LB 2 ) on optical fiber ( 90 ).
1. A laser processing device, comprising at least:
a laser oscillator that generates laser light;
an optical fiber that includes at least a core, a first cladding provided coaxially with the core on an outer peripheral side of the core, and a second cladding provided coaxially with the core on an outer peripheral side of the first cladding, and includes an incident end face and an emission end opposite to the incident end face;
a beam control mechanism that is provided in the laser oscillator, introduces the laser light into the incident end face of the optical fiber, and controls a power distribution of the laser light emitted from the emission end of the optical fiber; and
a laser light emitting head that is attached to the emission end of the optical fiber, and illuminates the laser light to a workpiece, wherein
the laser oscillator includes a first laser oscillation unit that generates first laser light having a first wavelength, and a second laser oscillation unit that generates second laser light having a second wavelength different from the first wavelength,
the beam control mechanism includes at least
a first condenser lens that receives the first laser light, and condenses the first laser light at a predetermined magnification,
a second condenser lens that receives the second laser light, and condenses the second laser light at a predetermined magnification,
an optical combining member that receives the first laser light condensed by the first condenser lens and the second laser light condensed by the second condenser lens, forms the laser light by combining the first laser light and the second laser light, an optical axis of the first laser light coinciding with an optical axis of the second laser light, and causes the laser light to be directed to the incident end face of the optical fiber,
an optical path changing and holding mechanism that is disposed on at least one of an optical path of the first laser light between the first condenser lens and the optical combining member and an optical path of the second laser light between the second condenser lens and the optical combining member, and changes and holds at least one of the optical path of the first laser light and the optical path of the second laser light, and
a controller that controls an operation of the optical path changing and holding mechanism, and
the beam control mechanism controls a power distribution of the laser light emitted from the laser light emitting head by changing an incident position of at least one of the first laser light and the second laser light on the incident end face of the optical fiber.
2. The laser processing device according to claim 1 , wherein
the optical path changing and holding mechanism includes
a parallel plate-shaped optical member that transmits at least one of the first laser light and the second laser light, and is provided to be tiltable about an axis intersecting with at least one of the optical axis of the first laser light and the optical axis of the second laser light, and
an actuator that is coupled to the parallel plate-shaped optical member, and
the controller drives the actuator to tilt the parallel plate-shaped optical member, and the beam control mechanism changes the incident position of the at least one of the first laser light and the second laser light on the incident end face of the optical fiber.
3. The laser processing device according to claim 1 , wherein the controller controls a power of the first laser light and a power of the second laser light, and the controller controls the power distribution of the laser light emitted from the laser light emitting head by changing a power ratio between the power of the first laser light and the power of the second laser light.
4. The laser processing device according to claim 1 , wherein the beam control mechanism causes the first laser light or the second laser light to be incident on at least one of the core and the first cladding.
5. The laser processing device according to claim 3 , wherein
the second wavelength is shorter than the first wavelength,
the second laser light is incident on the first cladding, and
the controller controls the power distribution of the laser light emitted from the laser light emitting head by changing the power of the second laser light with respect to the power of the first laser light.
6. The laser processing device according to claim 1 , wherein the beam control mechanism controls the power distribution of the laser light emitted from the laser light emitting head according to at least one of a material of the workpiece and a shape of a portion of the workpiece to be laser-machined.
7. The laser processing device according to claim 6 , wherein the beam control mechanism is configured to switch between power distributions of the laser light emitted from the laser light emitting head during the laser-processing of the workpiece.
8. The laser processing device according to claim 7 , wherein the beam control mechanism is configured to periodically switch between the power distributions of the laser light emitted from the laser light emitting head during the laser-processing of the workpiece.
9. The laser processing device according to claim 1 , wherein
the first laser oscillation unit is a disk laser, a fiber laser, or a yttrium aluminum garnet (YAG) laser, and the first wavelength is in a range from 1000 nm to 1100 nm, and
the second laser oscillation unit is a semiconductor laser, and the second wavelength is in a range from 800 nm to 1000 nm.
10. The laser processing device according to claim 1 ,
wherein the first laser oscillation unit is a disk laser, a fiber laser, or a YAG laser, and the first wavelength is in a range from 1000 nm to 1100 nm, and
the second laser oscillation unit is a visible-light laser, and the second wavelength is in a range from 400 nm to 800 nm.
11. The laser processing device according to claim 1 , wherein
the first laser oscillation unit is a semiconductor laser, and the first wavelength is in a range from 800 nm to 1000 nm, and
the second laser oscillation unit is a visible-light laser, and the second wavelength is in a range from 400 nm to 800 nm.
12. A laser processing method using the laser processing device according to claim 1 , the method comprising at least:
a first illumination step of illuminating the laser light having a first power distribution to the workpiece; and
a second illumination step of subsequently illuminating the laser light having a second power distribution different from the first power distribution to the workpiece.
13. The laser processing method according to claim 12 , wherein
in the first illumination step, a molten pool and a keyhole are formed on a surface of the workpiece, and
in the second illumination step, an opening of the keyhole is expanded, and the molten pool is grown so as to have a desired weld-penetration depth.
14. The laser processing method according to claim 12 , wherein
in the first illumination step, a first portion of the workpiece having a first thickness is illuminated by the laser light, and
in the second illumination step, a second portion of the workpiece having a second thickness different from the first thickness is illuminated by the laser light.
15. The laser processing method according to claim 13 , wherein in the second illumination step, the first power distribution and the second power distribution of the laser light are periodically switched at a predetermined frequency.
16. The laser processing method according to claim 15 , wherein the predetermined frequency is substantially equal to a natural vibration frequency of the keyhole formed in the workpiece.