SRAM design with four-poly-pitch
One aspect of this description relates to a memory cell. In some embodiments, the memory cell includes a first gate structure, a second gate structure, a third gate structure, a fourth gate structure, and a fifth gate structure that each extend along a first lateral direction, a first active structure extending along a second lateral direction and overlaid by respective first portions of the first to fourth gate structures, a second active structure extending along the second lateral direction and overlaid by respective second portions of the first to fourth gate structures, and a third active structure extending along the second lateral direction and overlaid by respective third portions of the third and fifth gate structures. In some embodiments, the first and second gate structures are aligned with each other, with the fourth and fifth gate structures aligned with a first segment and a second segment of the third gate structure, respectively. In some embodiments, the second lateral direction perpendicular to the first lateral direction.
1. A memory cell, comprising:
a first gate structure, a second gate structure, a third gate structure, a fourth gate structure, and a fifth gate structure that each extend along a first lateral direction, wherein the first and second gate structures are aligned with each other, with the fourth and fifth gate structures aligned with a first segment and a second segment of the third gate structure, respectively;
a first active structure extending along a second lateral direction and overlaid by respective first portions of the first to fourth gate structures, the second lateral direction perpendicular to the first lateral direction;
a second active structure extending along the second lateral direction and overlaid by respective second portions of the first to fourth gate structures; and
a third active structure extending along the second lateral direction and overlaid by respective third portions of the third and fifth gate structures.
2. The memory cell of claim 1 , wherein the first and second gate structures are aligned with each other in the first lateral direction, and wherein the fourth and fifth gate structures are aligned with the first segment and the second segment of the third gate structure, respectively, in the first lateral direction.
3. The memory cell of claim 1 , wherein the fourth gate structure is aligned with the first gate structure.
4. The memory cell of claim 1 , wherein a first end of the third gate structure is aligned with a second end of the fourth gate structure, and wherein a third end of the third gate structure is aligned with a fourth end of the fifth gate structure.
5. The memory cell of claim 1 , wherein the third gate structure is longer than the first gate structure in the first lateral direction.
6. The memory cell of claim 1 , wherein the first active structure is longer than the third active structure in the second lateral direction.
7. The memory cell of claim 1 , wherein the first active structure is longer in the second lateral direction than the first gate structure is in the first lateral direction.
8. The memory cell of claim 1 , wherein the third gate structure is disposed between the first gate structure and the fourth gate structure in the second lateral direction.
9. The memory cell of claim 1 , wherein the second active structure is disposed between the first active structure and the third active structure in the first lateral direction.
10. The memory cell of claim 1 , wherein the respective portions of the first to fourth gate structures wrap around the first active structure.
11. The memory cell of claim 1 , further comprising:
a first metal-defined structure disposed between the first gate structure and the second gate structure;
a second metal-defined structure disposed between the second gate structure and the third gate structure; and
a third metal-defined structure disposed between the third gate structure and the fourth gate structure.
12. A memory cell, comprising:
a first n-type transistor, a second n-type transistor, a third n-type transistor, a fourth n-type transistor, a fifth n-type transistor, and a sixth n-type transistor;
a first p-type transistor and a second p-type transistor;
wherein the first and second p-type transistors are defined by a first active structure, the first to fourth n-type transistors are defined by a second active structure, and the fifth and sixth n-type transistors are defined by a third active structure, wherein the first active structure is spaced from the third active structure in a first lateral direction, wherein a first distance between the first n-type transistor and the fourth n-type transistor in a second lateral direction perpendicular to the first lateral direction is greater than a second distance between the fifth n-type transistor and the sixth n-type transistor in the second lateral direction.
13. The memory cell of claim 12 , wherein the second active structure is disposed between the first active structure and the third active structure.
14. The memory cell of claim 12 , wherein the first active structure is longer than the third active structure.
15. The memory cell of claim 12 , wherein the second n-type transistor and the second p-type transistor share a first gate structure, and wherein the third n-type transistor, the fifth n-type transistor, and the third p-type transistor share a second gate structure.
16. The memory cell of claim 15 , wherein the fourth n-type transistor includes a third gate structure, wherein the second gate structure is disposed between the first gate structure and the third gate structure.
17. The memory cell of claim 15 , wherein the second gate structure is longer than the first gate structure.
18. The memory cell of claim 15 , wherein each of the n-type and p-type transistors include alternating layers of gate structure and active structure, wherein the alternating layers are disposed along a vertical direction.
19. A method, comprising:
forming a first gate structure, a second gate structure, a third gate structure, a fourth gate structure, and a fifth gate structure that each extend along a first lateral direction, wherein the first and second gate structures are aligned with each other, with the fourth and fifth gate structures aligned with a first segment and a second segment of the third gate structure, respectively;
forming a first active structure extending along a second lateral direction and overlaid by respective first portions of the first to fourth gate structures, the second lateral direction perpendicular to the first lateral direction;
forming a second active structure extending along the second lateral direction and overlaid by respective second portions of the first to fourth gate structures; and
forming a third active structure extending along the second lateral direction and overlaid by respective third portions of the third and fifth gate structures.
20. The method of claim 19 , further comprising:
forming a first metal-defined structure between the first gate structure and the second gate structure;
forming a second metal-defined structure between the second gate structure and the third gate structure; and
forming a third metal-defined structure between the third gate structure and the fourth gate structure.