IP Library Granted Patent US 12,253,669
Granted Patent B2
US 12,253,669 · App. 17/530,782 · Granted Mar 18, 2025

Time-sequential MEMS projector

Inventor: Daniel Adema (Kitchener, CA)
Assignee: GOOGLE LLC
G02B26/105G02B26/0833G02B27/0172
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 12,253,669
App. No.
17/530,782
Granted
Mar 18, 2025
Kind
B2
Abstract

A display system employs multiple micro-electromechanical system (MEMS) mirrors in series to receive collimated light and direct the light to provide light having input angles corresponding to a desired field of view at a point or line at an incoupler (IC) of a waveguide without an optical relay. An initial one or more MEMS mirrors accepts collimated light and generates the scan angles. A last MEMS mirror in the series scans at a range of angles proportional to the scan angles generated by the initial MEMS mirror(s) and directs the scanned light back to a spot or a line at the IC.

Claims (24)

1. A near-eye display system comprising:

a waveguide having an incoupler (IC); and

multiple micro-electromechanical system (MEMS) mirrors in series to receive collimated light and direct the light to one or more input angles at a point or a line at the IC independent of an optical relay, wherein an initial MEMS mirror and a second MEMS mirror in the series are co-planar and the scanned light generated by the initial MEMS mirror reflects off a reflective surface of the waveguide to the second MEMS mirror.

2. The near-eye display system of claim 1 , wherein

the initial MEMS mirror in the series is configured to receive the collimated light and rotate across a first range of angles at a first frequency and a first phase to scan the light along scan angles corresponding to the first range of angles; and

a last MEMS mirror in the series is configured to rotate across a second range of scan angles at the first frequency and a second phase different from the first phase to direct the scanned light to the point or the line at the IC.

3. The near-eye display system of claim 2 , wherein the last MEMS mirror is larger than the initial MEMS mirror.

4. The near-eye display system of claim 2 , wherein at least one of the initial MEMS mirror and the last MEMS mirror rotates about two axes.

5. A display system comprising:

a first micro-electromechanical system (MEMS) mirror to receive collimated light and rotate about a first axis to generate scanned light having a first range of scan angles; and

a second MEMS mirror in series and co-planar with the first MEMS mirror to rotate about a second axis to direct the scanned light to a spot or a line at an incoupler of a waveguide independent of an optical relay, wherein the scanned light generated by the first MEMS mirror reflects off a reflective surface of the waveguide to the second MEMS mirror.

6. The display system of claim 5 , wherein the second MEMS mirror is to generate scanned light having a second range of scan angles based on the first range of scan angles.

7. The display system of claim 5 , wherein

the first MEMS mirror rotates at a first frequency and a first phase; and

the second MEMS mirror rotates at the first frequency and a second phase different from the first phase.

8. The display system of claim 5 , wherein the second MEMS mirror is larger than the first MEMS mirror.

9. The display system of claim 5 , wherein at least one of the first MEMS mirror and the second MEMS mirror is configured to rotate about two axes.

10. A method, comprising:

directing collimated light received at an initial micro-electromechanical system (MEMS) mirror in a series of multiple MEMS mirrors comprising an initial MEMS mirror and a last MEMS mirror to a spot or a line at an incoupler of a waveguide independent of an optical relay, wherein the initial MEMS mirror and a second MEMS mirror in the series are co-planar and the scanned light generated by the initial MEMS mirror reflects off a reflective surface of the waveguide to the second MEMS mirror.

11. The method of claim 10 , further comprising:

rotating the initial MEMS mirror at a first frequency and a first phase; and

rotating a last MEMS mirror at the first frequency and a second phase different from the first phase.

12. The method of claim 11 , further comprising:

rotating at least one of the initial MEMS mirror and the last MEMS mirror about two axes.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 22, 2021
From: ADEMA, DANIEL
To: GOOGLE LLC
Reel/Frame 058180/0573 →
Continuity (2)
Provisional Application 63116341 · Nov 20, 2020
Related Publication 20220163790A1 · May 26, 2022
References Cited (4)
US 6776492B1 · Chang · 2004 [cited by examiner]
US 10976811B2 · Cirucci · 2021 [cited by examiner]
US 11924401B2 · Chen · 2024 [cited by examiner]
US 20180082644A1 · Bohn · 2018 [cited by examiner]