Silicon photonics device for LIDAR sensor and method for fabrication
A structure of a silicon photonics device for LIDAR includes a first insulating structure and a second insulating structure disposed above one or more etched silicon structures overlying a substrate member. A metal layer is disposed above the first insulating structure without a prior deposition of a diffusion barrier and adhesion layer. A thin insulating structure is disposed above the second insulating structure. A first configuration of the metal layer, the first insulating structure and the one or more etched silicon structures forms a free-space coupler. A second configuration of the thin insulating structure above the second insulating structure forms an edge coupler.
1. A method for fabricating a silicon photonics device, the method comprising:
obtaining a substrate member and forming a silicon structure on the substrate member;
forming a first dielectric structure and a second dielectric structure above the silicon structure;
disposing a first oxide layer above the first dielectric structure and the second dielectric structure;
forming a third dielectric structure above the first oxide layer and the second dielectric structure;
forming a metal layer above the first oxide layer and the first dielectric structure; and
forming a diffusion barrier and adhesion layer above the metal layer.
2. The method of claim 1 , wherein the silicon structure is a grating.
3. The method of claim 1 , wherein forming the first dielectric structure includes:
disposing a first layer of insulator compound above the silicon structure; and
etching the first layer of insulator compound to form the first dielectric structure.
4. The method of claim 3 , further comprising:
disposing a second layer of insulator compound on a bottom side of the substrate member before etching the first layer of insulator compound; and
removing the second layer of insulator compound disposed on the bottom side of the substrate member after forming the first dielectric structure.
5. The method of claim 4 , wherein the first layer and the second layer of insulator compound are one from a group of silicon nitride (Si 3 N 4 ) and silicon.
6. The method of claim 4 , wherein disposing the first layer of insulator compound above the silicon structure and the second layer of insulator compound on the bottom side of the substrate member is performed through one from a group of a low pressure chemical vapor deposition (LPCVD) process and a plasma enhanced chemical vapor deposition (PECVD) process.
7. The method of claim 1 , wherein the diffusion barrier and adhesion layer above the metal layer forms a reflective mirror structure.
8. The method of claim 7 , wherein the first dielectric structure and the second dielectric structure are coplanar with each other.
9. The method of claim 7 , wherein forming the third dielectric structure includes:
disposing a second oxide layer above the metal layer;
etching an opening in the second oxide layer above the second dielectric structure; and
forming the third dielectric structure above the second dielectric structure in the opening.
10. The method of claim 1 , wherein the metal layer is one from a group of aluminum, gold, silver, and copper.
11. The method of claim 1 , wherein the diffusion barrier and adhesion layer is one from a group of tantalum nitride, indium oxide, copper silicide, tungsten nitride, and titanium nitride.
12. The method of claim 1 , further comprising:
forming a second silicon structure on the substrate member;
doping portions of the second silicon structure to form a photodiode; and
forming metal contacts for the photodiode above the doped portions of the second silicon structure.
13. The method of claim 1 , further comprising:
forming a second silicon structure on the substrate member;
forming a second diffusion barrier and adhesion layer above the second silicon structure;
forming a second metal layer above the second diffusion barrier and adhesion layer and the second silicon structure; and
forming a third diffusion barrier and adhesion layer above the second metal layer.
14. A silicon photonics device fabricated by a process comprising:
obtaining a substrate member and forming a silicon structure and a second dielectric structure on the substrate member;
forming a first dielectric structure above the silicon structure;
disposing a first oxide layer above the first dielectric structure and the second dielectric structure;
forming a third dielectric structure above the first oxide layer and the second dielectric structure;
forming a metal layer above the first oxide layer and the first dielectric structure; and
forming a diffusion barrier and adhesion layer above the metal layer.
15. The silicon photonics device of claim 14 , wherein forming the first dielectric structure includes:
disposing a first layer of insulator compound above the silicon structure; and
etching the first layer of insulator compound to form the first dielectric structure.
16. The silicon photonics device of claim 15 , wherein the process further comprises:
disposing a second layer of insulator compound on a bottom side of the substrate member before etching the first layer of insulator compound; and
removing the second layer of insulator compound disposed on the bottom side of the substrate member after forming the first dielectric structure.
17. The silicon photonics device of claim 16 , wherein the diffusion barrier and adhesion layer above the metal layer forms a reflective mirror structure.
18. The silicon photonics device of claim 17 , wherein forming the third dielectric structure includes:
disposing a second oxide layer above the metal layer;
etching an opening in the second oxide layer above the second dielectric structure; and
forming the third dielectric structure above the second dielectric structure in the opening.
19. The method of claim 1 , further comprising disposing a film of a resistive metallic alloy heater above the silicon structure.
20. The silicon photonics device of claim 14 , wherein the process further comprises disposing a film of a resistive metallic alloy heater above the silicon structure.