IP Library Granted Patent US 11,652,449
Granted Patent B2
US 11,652,449 · App. 17/546,273 · Granted May 16, 2023

Radio frequency transistor amplifiers having engineered intrinsic capacitances for improved performance

Inventors: Qianli Mu (San Jose, CA); Zulhazmi Mokhti (Morgan Hill, CA); Jia Guo (Durham, NC); Scott Sheppard (Chapel Hill, NC)
Assignee: Wolfspeed, Inc.
H03F1/30H01L29/2003H01L29/7787H03F3/193
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Quick Facts
Patent No.
US 11,652,449
App. No.
17/546,273
Granted
May 16, 2023
Kind
B2
Abstract

Gallium nitride based RF transistor amplifiers include a semiconductor structure having a gallium nitride based channel layer and a gallium nitride based barrier layer thereon, and are configured to operate at a specific direct current drain-to-source bias voltage. These amplifiers are configured to have a normalized drain-to-gate capacitance at the direct current drain-to-source bias voltage, and to have a second normalized drain-to-gate capacitance at two-thirds the direct current drain-to-source bias voltage, where the second normalized drain-to-gate capacitance is less than twice the first normalized drain-to-gate capacitance.

Claims (32)

1. A radio frequency (“RF”) transistor amplifier, comprising:

a semiconductor structure that includes a gallium nitride based channel layer and a gallium nitride based barrier layer that has a higher bandgap than the gallium nitride based channel layer on the gallium nitride based channel layer;

a source contact on the gallium nitride based barrier layer;

a drain contact on the gallium nitride based barrier layer; and

a gate contact on the gallium nitride based barrier layer between the source contact and the drain contact,

wherein the RF transistor amplifier is configured to operate at a first direct current drain-to-source bias voltage,

wherein the RF transistor amplifier is configured to have a first normalized drain-to-gate capacitance at the first direct current drain-to-source bias voltage, and to have a second normalized drain-to-gate capacitance at two-thirds the first direct current drain-to-source bias voltage, and

wherein the second normalized drain-to-gate capacitance is less than twice the first normalized drain-to-gate capacitance.

2. The RF transistor amplifier of claim 1 , wherein a normalized drain-to-gate capacitance response of the RF transistor amplifier varies by less than a factor of four for all values of the drain-to-source voltage that are between one half the first direct current drain-to-source bias voltage and twice the first direct current drain-to-source bias voltage.

3. The RF transistor amplifier of claim 1 , wherein a normalized drain-to-gate capacitance response of the RF transistor amplifier varies by less than a factor of three for all values of the drain-to-source voltage that are between one half the first direct current drain-to-source bias voltage and twice the first direct current drain-to-source bias voltage.

4. A radio frequency (“RF”) transistor amplifier, comprising:

a semiconductor structure that includes a gallium nitride based channel layer and a gallium nitride based barrier layer that has a higher bandgap than the gallium nitride based channel layer on the gallium nitride based channel layer;

a source contact on the gallium nitride based barrier layer;

a drain contact on the gallium nitride based barrier layer; and

a gate contact on the gallium nitride based barrier layer between the source contact and the drain contact,

wherein the RF transistor amplifier is configured to operate at a first direct current drain-to-source bias voltage,

wherein the RF transistor amplifier is configured to have a first normalized drain-to-gate capacitance at the first direct current drain-to-source bias voltage, and to have a second normalized drain-to-gate capacitance at two-thirds the first direct current drain-to-source bias voltage, and

wherein the second normalized drain-to-gate capacitance is less than twice the first normalized drain-to-gate capacitance

wherein the RF transistor amplifier is configured to have a normalized drain-to-source capacitance response that maintains at least 80% symmetry for a range of drain-to-source voltage values about the first direct current drain-to-source bias voltage that is equal to 50% of the first direct current drain-to-source bias voltage.

5. The RF transistor amplifier of claim 1 , wherein the RF transistor amplifier is configured to have a normalized drain-to-source capacitance response that maintains at least 90% symmetry for a range of drain-to-source voltage values about the first direct current drain-to-source bias voltage that is equal to 50% of the first direct current drain-to-source bias voltage.

6. The RF transistor amplifier of claim 1 , wherein the RF transistor amplifier is configured to have a normalized drain-to-source capacitance response that maintains at least 70% symmetry for a range of drain-to-source voltage values about the first direct current drain-to-source bias voltage that is equal to 100% of the first direct current drain-to-source bias voltage.

7. A radio frequency (“RF”) transistor amplifier, comprising:

a semiconductor structure that includes a gallium nitride based channel layer and a gallium nitride based barrier layer that has a higher bandgap than the gallium nitride based channel layer on the gallium nitride based channel layer;

a source contact on the gallium nitride based barrier layer;

a drain contact on the gallium nitride based barrier layer; and

a gate contact on the gallium nitride based barrier layer between the source contact and the drain contact,

wherein the RF transistor amplifier is configured to operate at a first direct current drain-to-source bias voltage,

wherein the RF transistor amplifier is configured to have a first normalized drain-to-gate capacitance at the first direct current drain-to-source bias voltage, and to have a second normalized drain-to-gate capacitance at two-thirds the first direct current drain-to-source bias voltage, and

wherein the second normalized drain-to-gate capacitance is less than twice the first normalized drain-to-gate capacitance

wherein the RF transistor amplifier is configured to have a normalized drain-to-source capacitance response that maintains at least 80% symmetry for a range of drain-to-source voltage values about the first direct current drain-to-source bias voltage that is equal to 100% of the first direct current drain-to-source bias voltage.

8. The RF transistor amplifier of claim 7 , wherein the RF transistor amplifier is configured so that the normalized drain-to-gate capacitance response varies by less than 100% for drain-to-source voltages in a range from the first direct current drain-to-source bias voltage to 20 volts below the first direct current drain-to-source bias voltage.

9. The RF transistor amplifier of claim 1 , wherein the first direct current drain-to-source bias voltage is between 48 volts and 55 volts, and wherein values of the normalized drain-to-gate capacitance are less than 5×10 −15 farads per watt for all drain-to-source voltage values greater than 30 volts.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Dec 29, 2023
From: WOLFSPEED, INC.
To: MACOM TECHNOLOGY SOLUTIONS HOLDINGS, INC.
Reel/Frame 066236/0086 →
CORRECTIVE ASSIGNMENT TO CORRECT THE ASSIGNEE NAME PREVIOUSLY RECORDED AT REEL: 058827 FRAME: 0757. ASSIGNOR(S) HEREBY CONFIRMS THE CHANGE OF NAME. Recorded Feb 7, 2022
From: CREE, INC.
To: WOLFSPEED, INC.
Reel/Frame 058959/0622 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 24, 2022
From: MU, QIANLI; MOKHTI, ZULHAZMI; GUO, JIA; SHEPPARD, SCOTT
To: CREE, INC.
Reel/Frame 058746/0198 →
CHANGE OF NAME Recorded Jan 24, 2022
From: CREE, INC.
To: WOLFSPEED,INC.
Reel/Frame 058827/0757 →