Semiconductor devices
A semiconductor device includes a substrate including a cell region, a peripheral region, and a boundary region between the cell region and the peripheral region, cell active patterns on the cell region of the substrate, peripheral active patterns on the peripheral region of the substrate, a boundary insulating pattern disposed on the boundary region of the substrate and disposed between the cell active patterns and the peripheral active patterns, and a bumper pattern disposed on the cell region of the substrate and disposed between the boundary insulating pattern and the cell active patterns. A width of the bumper pattern in a first direction parallel to a top surface of the substrate is greater than a width of each of the cell active patterns in the first direction.
1. A semiconductor device comprising:
a substrate including a cell region, a peripheral region, and a boundary region dividing the cell region from the peripheral region, wherein the boundary region has a boundary trench between the cell region from the peripheral region;
cell active patterns on the cell region of the substrate;
peripheral active patterns on the peripheral region of the substrate;
a boundary insulating pattern disposed in the boundary trench and disposed between the cell active patterns and the peripheral active patterns;
a bumper pattern disposed on the cell region of the substrate and extending along the boundary insulating pattern between the boundary insulating pattern and the cell active patterns; and
word lines disposed on the cell region of the substrate, extending in a first direction, and spaced apart from each other in a second direction, the first and second directions parallel to a top surface of the substrate and crossing each other,
wherein the bumper pattern has a line shape that extends in the second direction, and the word lines extend in the first direction to intersect the cell active patterns and the bumper pattern,
wherein each of the word lines vertically overlaps the bumper pattern in a third direction perpendicular to the top surface of the substrate, and
wherein a width of the bumper pattern in the first direction is greater than a width of each of the cell active patterns in the first direction.
2. The semiconductor device of claim 1 ,
wherein each of the cell active patterns has a bar shape extending in a fourth direction which is parallel to the top surface of the substrate and intersects the first and second directions.
3. The semiconductor device of claim 2 , wherein the width of the bumper pattern is less than a width of each of the peripheral active patterns in the first direction.
4. The semiconductor device of claim 2 , further comprising:
at least one dummy cell active pattern between the bumper pattern and the cell active patterns,
wherein the width of the bumper pattern is greater than a width of the at least one dummy cell active pattern in the first direction.
5. The semiconductor device of claim 4 , wherein the at least one dummy cell active pattern has a bar shape extending in the fourth direction.
6. The semiconductor device of claim 2 , further comprising:
a line insulating pattern disposed in the bumper pattern,
wherein the line insulating pattern penetrates an upper portion of the bumper pattern and extends in the fourth direction.
7. The semiconductor device of claim 1 , further comprising:
cell device isolation patterns disposed between the cell active patterns on the cell region of the substrate; and
a dummy insulating pattern disposed between the bumper pattern and the cell active patterns on the cell region of the substrate,
wherein a bottom surface of the dummy insulating pattern is located at a lower height than bottom surfaces of the cell device isolation patterns.
8. The semiconductor device of claim 7 , wherein the bumper pattern is disposed between the dummy insulating pattern and the boundary insulating pattern.
9. The semiconductor device of claim 8 , wherein a bottom surface of the boundary insulating pattern is located at a lower height than the bottom surfaces of the cell device isolation patterns.
10. The semiconductor device of claim 9 , wherein a width of the dummy insulating pattern in the first direction is less than a width of the boundary insulating pattern in the first direction.
11. The semiconductor device of claim 7 , wherein the cell device isolation patterns include first cell device isolation patterns and second cell device isolation patterns,
wherein a first width of each of the first cell device isolation patterns in the first direction is greater than a second width of each of the second cell device isolation patterns in the first direction, and
wherein a third width of the dummy insulating pattern in the first direction is greater than the second width of each of the second cell device isolation patterns.
12. The semiconductor device of claim 11 , wherein the third width of the dummy insulating pattern is equal to or greater than the first width of each of the first cell device isolation patterns.
13. The semiconductor device of claim 11 , wherein the third width of the dummy insulating pattern is less than a fourth width of the boundary insulating pattern in the first direction.
14. The semiconductor device of claim 1 , wherein the word lines penetrate upper portions of the cell active patterns and an upper portion of the bumper pattern.
15. The semiconductor device of claim 1 , wherein each of the word lines comprises:
a gate electrode penetrating upper portions of corresponding cell active patterns of the cell active patterns and an upper portion of the bumper pattern; and
a gate capping pattern on a top surface of the gate electrode,
wherein a top surface of the gate capping pattern is substantially coplanar with top surfaces of the corresponding cell active patterns and a top surface of the bumper pattern.
16. The semiconductor device of claim 1 , further comprising:
an additional bumper pattern disposed between the bumper pattern and the peripheral active patterns and penetrating the boundary insulating pattern,
wherein the additional bumper pattern is spaced apart from the word lines.
17. A semiconductor device comprising:
a substrate including a cell region and a peripheral region;
cell active patterns on the cell region of the substrate;
peripheral active patterns on the peripheral region of the substrate;
a bumper pattern disposed between the cell active patterns and the peripheral active patterns on the substrate; and
word lines disposed on the cell region of the substrate, extending in a first direction parallel to a top surface of the substrate, and spaced apart from each other in a second direction, the first and second directions parallel to a top surface of the substrate and crossing to each other,
wherein the bumper pattern has a line shape that extends in the second direction, and the word lines extend in the first direction to intersect the cell active patterns and the bumper pattern, and
wherein each of the word lines vertically overlaps the bumper pattern in a third direction perpendicular to the top surface of the substrate.