Optical inspection apparatus in semiconductor process system
The present invention discloses an optical detection apparatus for defining a detection surface on a carrier unit for a wafer in a semiconductor manufacturing process so as to obtain a corresponding detection image, wherein a vertical movement path for another device to move is defined above the carrier unit. The optical detection apparatus includes a support, and an imaging device disposed on the support and configured to be non-interfering with the movement path. The imaging device includes a lens group, an image capturing portion and a moving base. With the moving base, the photosensitive element of the image capturing portion is allowed to move horizontally relative to the lens group, and the imaging position can be adjusted, preventing image deformation or a reduced resolution easily caused by capturing at an oblique angle. Thus, the optical detection apparatus resolves complications of additionally mounting an optical detection apparatus in an optical detection environment within a narrow space.
1. An optical detection apparatus in a semiconductor manufacturing process, for defining a detection surface on a carrier unit for a wafer so as to obtain a corresponding detection image, a movement path in a vertical direction for another device to move being defined above the carrier unit, the optical detection apparatus comprising:
a support; and
an imaging device, disposed on the support and configured to be non-interfering with the movement path, the imaging device comprising:
a lens group, having an optical axis parallel to a normal line of the detection surface;
an image capturing portion, disposed behind the lens group to allow an image of the detection surface to be formed on a photosensitive element in the image capturing portion; and
a moving base, disposed between the lens group and the image capturing portion, the moving base having an adjustment sliding track, the adjustment sliding track allowing the photosensitive element of the image capturing portion to move in a horizontal direction relative to the lens group.
2. The optical detection apparatus of claim 1 , wherein the photosensitive element includes a diagonal line, and the adjustment sliding track allows the photosensitive element to move horizontally relative to the lens group and along a direction in which the diagonal line extends.
3. The optical detection apparatus of claim 1 , wherein a center axis of the photosensitive surface of the photosensitive element deviates from the optical axis of the lens group by a predetermined distance in a direction away from the movement path.
4. The optical detection apparatus of claim 3 , wherein the photosensitive element includes a diagonal line, and the adjustment sliding track allows the photosensitive element to move horizontally relative to the lens group and along a direction in which the diagonal line extends.
5. The optical detection apparatus of claim 3 , wherein the predetermined distance is between 2/9 and ⅖ of a length of a diagonal line of the photosensitive element.
6. The optical detection apparatus of claim 5 , wherein the photosensitive element includes a diagonal line, and the adjustment sliding track allows the photosensitive element to move horizontally relative to the lens group and along a direction in which the diagonal line extends.
7. The optical detection apparatus of claim 5 , wherein a vertical distance between the photosensitive surface of the photosensitive element and the detection surface is not more than 700 mm.
8. The optical detection apparatus of claim 7 , wherein the photosensitive element includes a diagonal line, and the adjustment sliding track allows the photosensitive element to move horizontally relative to the lens group and along a direction in which the diagonal line extends.
9. The optical detection apparatus of claim 1 , wherein the photosensitive surface of the photosensitive element is parallel to the detection surface, and the adjustment sliding track allows the photosensitive element of the image capturing portion to move horizontally in a direction parallel to the detection surface.
10. The optical detection apparatus of claim 9 , wherein the photosensitive element includes a diagonal line, and the adjustment sliding track allows the photosensitive element to move horizontally relative to the lens group and along a direction in which the diagonal line extends.
11. The optical detection apparatus of claim 1 , wherein the imaging device is configured above a side edge of the carrier unit.
12. The optical detection apparatus of claim 11 , wherein the photosensitive element includes a diagonal line, and the adjustment sliding track allows the photosensitive element to move horizontally relative to the lens group and along a direction in which the diagonal line extends.