Photonic semiconductor device and method of manufacture
A package includes a photonic layer on a substrate, the photonic layer including a silicon waveguide coupled to a grating coupler; an interconnect structure over the photonic layer; an electronic die and a first dielectric layer over the interconnect structure, where the electronic die is connected to the interconnect structure; a first substrate bonded to the electronic die and the first dielectric layer; a socket attached to a top surface of the first substrate; and a fiber holder coupled to the first substrate through the socket, where the fiber holder includes a prism that re-orients an optical path of an optical signal.
1. A package comprising:
a photonic layer on a substrate, the photonic layer comprising a silicon waveguide coupled to a grating coupler;
an interconnect structure over the photonic layer;
an electronic die and a first dielectric layer over the interconnect structure, wherein the electronic die is connected to the interconnect structure;
a first substrate bonded to the electronic die and the first dielectric layer;
a socket attached to a top surface of the first substrate; and
a fiber holder coupled to the first substrate through the socket, wherein the fiber holder comprises a prism that re-orients an optical path of an optical signal.
2. The package of claim 1 , further comprising a micro lens attached to the top surface of the first substrate.
3. The package of claim 2 , wherein the micro lens comprises a polymer.
4. The package of claim 3 , further comprising a guide-pin attached to the top surface of the first substrate.
5. The package of claim 4 , wherein a material of the guide-pin and a material of the micro lens is the same.
6. The package of claim 1 , wherein the first substrate comprises silicon.
7. The package of claim 1 , wherein the socket comprises polyethylene terephthalate (PET) or polyvinyl chloride (PVC).
8. The package of claim 1 , wherein the prism comprises a polymer.
9. A package comprising:
a silicon waveguide on a substrate, the silicon waveguide comprising a first grating coupler;
a semiconductor device and a first dielectric layer over the silicon waveguide;
a first substrate bonded to the semiconductor device and the first dielectric layer;
a fiber holder coupled to the first substrate, the fiber holder comprising a prism; and
a channel in the fiber holder configured to hold an optical fiber that is optically coupled to the first grating coupler, wherein the prism is configured to re-orient an optical path of an optical signal from the optical fiber.
10. The package of claim 9 , wherein the first substrate is bonded to the semiconductor device and the first dielectric layer using a dielectric-to-dielectric bond.
11. The package of claim 9 , further comprising a socket that couples the fiber holder to the first substrate.
12. The package of claim 11 , further comprising a micro lens between the fiber holder and the silicon waveguide.
13. The package of claim 12 , wherein the micro lens is disposed in a cavity between inner sidewalls of the socket, a top surface of the first substrate, and a bottom surface of the fiber holder.
14. The package of claim 9 , wherein the first substrate has a thickness that is in a range from 10 μm to 10000 μm.
15. The package of claim 9 further comprising vias extending through the substrate, wherein the vias are electrically connected to the semiconductor device.
16. A method comprising:
patterning a silicon layer to form a waveguide;
forming a plurality of photonic components in the waveguide;
forming an interconnect structure over the waveguide and the plurality of photonic components;
bonding a semiconductor device to the interconnect structure;
forming a dielectric layer on the interconnect structure and surrounding the semiconductor device;
bonding a first substrate to the dielectric layer and the semiconductor device; and
coupling a prism to the first substrate.
17. The method of claim 16 , wherein the plurality of photonic components comprises at least one grating coupler.
18. The method of claim 17 , further comprising:
forming a micro lens on a top surface of the first substrate; and
forming a polymer layer over and around the micro lens, wherein the polymer layer and the micro lens is disposed between the prism and the first substrate.
19. The method of claim 18 , wherein the micro lens comprises a polymer.
20. The method of claim 18 , further comprising coupling a fiber holder to the first substrate, wherein the fiber holder is configured to hold an optical fiber that is optically coupled to at least one photonic component of the plurality of photonic components.