Semiconductor memory device and method of fabricating the same
View Patent ↗The present disclosure relates to a semiconductor memory device and a fabricating method thereof, and the semiconductor memory device includes a substrate, bit lines, plugs and a spacer structure. The bit lines are separately disposed on the substrate, and the plugs are also disposed on the substrate to alternately arrange with the bit lines. The spacer structure is disposed on the substrate, between each of the bit lines and each of the plugs. The spacer structure includes a first air gap layer, a first spacer and a second air gap layer, and the first air gap layer, the first spacer and the second air gap layer are sequentially stacked between sidewalls of the bit lines and the plugs. Therefore, two air gap layers may be formed between the bit lines and the storage node contacts to improve the delay between the resistor and the capacitor.
1. A semiconductor memory device, comprising:
a substrate;
a plurality of bit lines, separately disposed on the substrate;
a plurality of plugs, disposed on the substrate, the plugs and the bit lines are alternately arranged with each other;
a spacer structure, disposed on the substrate between each of the bit lines and each of the plugs, wherein the spacer structure comprises a first air gap layer, a first spacer and a second air gap layer, and the first air gap layer, the first spacer and the second air gap layer are sequentially stacked between sidewalls of the bit lines and the plugs; and
an insulating layer, disposed on the bit lines, the plugs and the spacer structure, a portion of the insulating layer disposed on the bit lines surrounds a cavity.
2. The semiconductor memory device according to claim 1 , further comprising:
a plurality of storage node pads, disposed on the plugs and the bit lines, wherein the storage node pads respectively contact the plugs.
3. The semiconductor memory device according to claim 2 , wherein
the first air gap layer does not directly contact the storage node pads.
4. The semiconductor memory device according to claim 2 , wherein
the second air gap layer directly contact the storage node pads.
5. The semiconductor memory device according to claim 1 , wherein each of the bit lines comprises a semiconductor layer, a barrier layer and a metal layer stacked sequentially, and the insulating layer directly contacts the metal layer.
6. The semiconductor memory device according to claim 1 , wherein a width of a bottom surface of the cavity is larger than a width of the bit lines.
7. A semiconductor memory device comprising:
a substrate;
a plurality of bit lines, separately disposed on the substrate;
a plurality of plugs, disposed on the substrate, the plugs and the bit lines are alternately arranged with each other;
a spacer structure, disposed on the substrate between each of the bit lines and each of the plugs, wherein the spacer structure comprises a first air gap layer, a first spacer and a second air gap layer, and the first air gap layer, the first spacer and the second air gap layer are sequentially stacked between sidewalls of the bit lines and the plugs;
a plurality of storage node pads, disposed on the plugs and the bit lines, wherein the storage node pads respectively contact the plugs; and
a plurality of capacitors, disposed on the storage node pads to respectively in alignment with the storage node pads, each of the capacitors comprising a bottom electrode layer, a capacitor dielectric layer, and a top electrode layer stacked sequentially, wherein a bottommost surface of the capacitor dielectric layer is lower than a bottom surface of the storage node pads.
8. The semiconductor memory device according to claim 7 , wherein a portion of the capacitor dielectric layer disposed on the bit lines surrounds a cavity.
9. A method of fabricating a semiconductor memory device, comprising:
providing a substrate;
forming a plurality of bit lines separately disposed on the substrate;
forming a plurality of plugs on the substrate, the bit lines and the plugs being alternately arranged with each other; and
forming a spacer structure on the substrate, between each of the bit lines and each of the plugs, wherein the spacer structure comprises a first air gap layer, a first spacer and a second air gap layer, and the first air gap layer, the first spacer and the second air gap layer are sequentially stacked between sidewalls of the bit lines and the plugs, wherein the spacer structure further comprises a second spacer, the first air gap layer is disposed between the first spacer and the second spacer, and a width of the second spacer is smaller than a width of the first spacer.
10. The method of fabricating the semiconductor memory device according to claim 9 , the forming of the spacer structure further comprising:
sequentially forming a first material layer, the first spacer and a second material layer on the sidewalls of the bit lines;
removing the first material layer to form the first air gap layer; and
removing the second material layer to form the second air gap layer.
11. The method of fabricating the semiconductor memory device according to claim 10 , wherein the first material layer and the second material layer comprise the same material which is different from a material of the first spacer.
12. The method of fabricating the semiconductor memory device according to claim 9 , the forming of the spacer structure further comprising:
sequentially forming a first material layer, the first spacer and a second material layer on the sidewalls of the bit lines;
partially removing the first material layer to form the second spacer and the first air gap layer; and
removing the second material layer to form the second air gap layer.
13. The method of fabricating the semiconductor memory device according to claim 9 , wherein the second spacer and the first spacer comprise different materials.
14. The method of fabricating the semiconductor memory device according to claim 9 , wherein the first material layer and the second material layer comprise different materials.
15. The method of fabricating the semiconductor memory device according to claim 9 , further comprising:
forming a plurality of storage node pads on the plugs and the bit lines, the storage node pads contact the plugs respectively.
16. The method of fabricating the semiconductor memory device according to claim 15 , wherein the first air gap layer and the second air gap layer are formed after the storage node pads are formed.
17. The method of fabricating the semiconductor memory device according to claim 15 , further comprising:
forming an insulating layer on the storage node pads and the bit lines, wherein a portion of the insulating layer disposed on the bit lines surrounds a cavity.
18. The method of fabricating the semiconductor memory device according to claim 9 , wherein each of the bit lines comprises a protection layer disposed on a metal layer of the bit lines, and a material of the protection layer is the same as a material of the second spacer.