Semiconductor device with high-resistance polysilicon resistor formation method

1. A high-resistance polysilicon resistor formation method, the method comprising:

forming a first isolation, a second isolation and a third isolation in a substrate;

forming a first gate electrode between the first isolation and the second isolation;

forming a second gate electrode between the second isolation and the third isolation;

forming a polysilicon pattern over the third isolation;

forming a first mask pattern which exposes the first gate electrode, and covers the second gate electrode and the polysilicon pattern;

performing a first ion implantation process to form a P-type well region under the first gate electrode with the first mask pattern;

removing the first mask pattern;

forming a second mask pattern which exposes the second gate electrode, and covers the first gate electrode and the polysilicon pattern;

performing a second ion implantation process to form a N-type well region under the second gate electrode with the second mask pattern;

removing the second mask pattern;

forming sidewall spacers on sidewalls of the polysilicon pattern;

forming a third mask pattern which exposes the first gate electrode and the polysilicon pattern, and covers the second gate electrode;

performing a third ion implantation process with N-type dopants on the polysilicon pattern with the third mask pattern, wherein N-type source and drain regions are formed in the P-type well region through the third ion implantation process;

removing the third mask pattern;

forming a fourth mask pattern which exposes the second gate electrode and the polysilicon pattern, and covers the first gate electrode;

performing a fourth ion implantation process with P-type dopants on the polysilicon pattern with the fourth mask pattern, wherein P-type source and drain regions are formed in the N-type well region by the fourth ion implantation process, and the implanted N-type dopants in the polysilicon pattern are compensated by the implanted P-type dopants to form the high-resistance polysilicon resistor; and

removing the fourth mask pattern.

2. The method of claim 1 ,

wherein a depth of the N-type well region under the second gate electrode is smaller than a depth of the N-type well region under the P-type source region and the P-type drain region.

3. The method of claim 1 ,

wherein a depth of the P-type well region under the first gate electrode is less than a depth of the P-type well region under the N-type source region and the N-type drain region.

4. The method of claim 1 ,

wherein the high-resistance polysilicon resistor has a higher resistance than a resistance of the first gate electrode or a resistance of the second gate electrode.

5. The method of claim 1 , further comprising:

forming a silicide blocking insulating on a first portion of the polysilicon pattern; and

forming silicide layers on a second portion of the polysilicon pattern.

6. The method of claim 1 ,

wherein the polysilicon pattern is configured to have a same thickness as a thickness of the first gate electrode or a thickness of the second gate electrode.

7. The method of claim 1 ,

wherein the P-type well region is in direct contact with the N-type well region under the second isolation region.

8. A high-resistance polysilicon resistor formation method, the method comprising:

forming a first gate electrode, a second gate electrode and a polysilicon pattern;

performing a first ion implantation process to form a P-type well region under the first gate electrode with a first mask pattern;

performing a second ion implantation process to form a N-type well region under the second gate electrode with a second mask pattern;

performing a third ion implantation process with N-type dopants on the polysilicon pattern with a third mask pattern, wherein N-type source and drain regions are formed in the P-type well region through the third ion implantation process; and

performing a fourth ion implantation with P-type dopants on the polysilicon pattern with a fourth mask pattern, wherein P-type source and drain regions are formed in the N-type well region by the fourth ion implantation process, and the implanted N-type dopants in the polysilicon pattern are compensated by the implanted P-type dopants to form the high-resistance polysilicon resistor,

wherein the first mask pattern exposes the first gate electrode, and covers the second gate electrode and the polysilicon pattern,

wherein the second mask pattern exposes the second gate electrode, and covers the first gate electrode and the polysilicon pattern,

wherein the third mask pattern exposes the first gate electrode and the polysilicon pattern, and covers the second gate electrode, and

wherein the fourth mask pattern exposes the second gate electrode and the polysilicon pattern, and covers the first gate electrode.

9. The method of claim 8 , wherein the performing of the first ion implantation process comprises:

forming a N-type lightly doped drain (N-LDD) region in the P-type well region; and

forming a first Halo region disposed adjacent to the N-LDD region.

10. The method of claim 8 ,

wherein a depth of the P-type well region under the first gate electrode is less than a depth of the P-type well region which does not overlap the first gate electrode.

11. The method of claim 8 , wherein the performing of the second ion implantation process comprises:

forming a P-type Lightly doped drain (P-LDD) region in the N-type well region; and

forming a second Halo region disposed adjacent to the P-LDD region.

12. The method of claim 8 ,

wherein a depth of the N-type well region under the second gate electrode is less than a depth of the N-type well region which does not overlap the second gate electrode.

13. The method of claim 8 ,

wherein the third ion implantation process is performed with N-type dopants having an energy of 40 keV to 70 KEV at a concentration of 4e15/cm −2 to 7e15/cm −2 , and

wherein the fourth ion implantation process is performed with P-type dopants having an energy of 4 keV to 10 KEV at a concentration of 2e15/cm −2 to 4e15/cm −2 .

14. A high-resistance polysilicon resistor formation method, the method comprising:

forming a first electrode in a NMOS region of a substrate;

forming a second electrode in a PMOS region of the substrate;

forming a polysilicon pattern in a high-resistance polysilicon resistor region of the substrate;

forming a first mask pattern to expose the first electrode and cover the second electrode and the polysilicon pattern;

performing a first ion implantation process to form a P-type well region under the first gate electrode with the first mask pattern on the NMOS region;

forming a second mask pattern to expose the second electrode, and cover the first electrode and the polysilicon pattern;

performing a second ion implantation process to form a N-type well region under the second gate electrode with the second mask pattern on the PMOS region;

forming a third mask pattern to completely expose the first electrode and the polysilicon pattern, and cover the second electrode;

performing a third ion implantation process to implant N-type dopants into the NMOS region and the high-resistance polysilicon resistor region, wherein N-type source and drain regions are formed in the P-type well region through the third ion implantation process;

forming a fourth mask pattern to completely expose the second gate electrode and the polysilicon pattern, and cover the first gate electrode; and

performing a fourth ion implantation process to implant P-type dopants into the PMOS region and the high-resistance polysilicon resistor region, wherein P-type source and drain regions are formed in the N-type well region by the fourth ion implantation process.

15. The method of claim 14 , wherein the N-type dopants are implanted with an energy of 40 keV to 70 KEV at a concentration of 4e15/cm −2 to 7e15/cm −2 .

16. The method of claim 14 , wherein the P-type dopants are implanted with an energy of 4 keV to 10 KEV at a concentration of 2e15/cm −2 to 4e15/cm −2.