Solid-state imaging device with uneven structures and method for manufacturing the same, and electronic apparatus
The present disclosure relates to a solid-state imaging device, a method for manufacturing the same, and an electronic apparatus capable of improving sensitivity while suppressing degradation of color mixture. The solid-state imaging device includes an anti-reflection portion having a moth-eye structure provided on a boundary surface on a light-receiving surface side of a photoelectric conversion region of each pixel arranged two-dimensionally, and an inter-pixel light-blocking portion provided below the boundary surface of the anti-reflection portion to block incident light. In addition, the photoelectric conversion region is a semiconductor region, and the inter-pixel light-blocking portion has a trench structure obtained by digging the semiconductor region in a depth direction at a pixel boundary. The techniques according to the present disclosure can be applied to, for example, a solid-state imaging device of a rear surface irradiation type.
1. A light detecting device, comprising:
a semiconductor substrate including a first plane receiving incident light and a second plane opposite to the first plane in a cross-sectional view;
a photoelectric conversion region disposed in the semiconductor substrate;
a first pixel-separation trench disposed in the semiconductor substrate in the cross-sectional view;
a second pixel-separation trench disposed adjacent to the first pixel-separation trench in the cross-sectional view;
a first trench disposed between the first pixel-separation trench and the second pixel-separation trench in the cross-sectional view; and
a first film disposed above the first plane of the semiconductor substrate in the cross-sectional view,
wherein a depth of the first trench is shallower than a depth of the first pixel-separation trench and a depth of the second pixel-separation trench in the cross-sectional view,
wherein the first film is disposed in the first trench,
wherein the first film includes a first concave portion disposed above the first trench in the cross-sectional view.
2. The light detecting device of claim 1 , wherein the photoelectric conversion region is disposed between the first pixel-separation trench and the second pixel-separation trench in the cross-sectional view, wherein the first trench is disposed above the photoelectric conversion region in the cross-sectional view.
3. The light detecting device of claim 1 , further comprising:
a second trench is disposed between the first pixel-separation trench and the second pixel-separation trench in the cross-sectional view, wherein a depth of the second trench is shallower than the depth of the first pixel-separation trench and the depth of the second pixel-separation trench in the cross-sectional view.
4. The light detecting device of claim 3 , wherein a second concave portion of the first film is disposed above the second trench in the cross-sectional view.
5. The light detecting device of claim 4 , wherein the first concave portion of the first film and the second concave portion of the first film correspond to the first trench and the second trench in the cross-sectional view.
6. The light detecting device of claim 1 , wherein the first film includes one of hafnium oxide, aluminum oxide, tantalum oxide, or zirconium oxide.
7. The light detecting device of claim 1 , wherein the first film is disposed in the first pixel-separation trench and the second pixel-separation trench.
8. The light detecting device of claim 1 , further comprising:
a first flat portion of a light-receiving surface of the semiconductor substrate disposed between the first pixel-separation trench and the first trench in the cross-sectional view; and
a second flat portion of the light-receiving surface disposed between the second pixel-separation trench and the first trench in the cross-sectional view.
9. The light detecting device of claim 8 , wherein the first film is disposed above the first flat portion and the second flat portion in the cross-sectional view.
10. The light detecting device of claim 1 , wherein at least a part of the first film is fully embedded in the first trench in the cross-sectional view.
11. The light detecting device of claim 1 , wherein the first trench is a spindle-shape in the cross-sectional view.
12. The light detecting device of claim 1 , wherein widths of the first pixel-separation trench and the second pixel-separation trench are smaller than the depths of the first pixel-separation trench and the second pixel-separation trench in the cross-sectional view.
13. The light detecting device of claim 1 , wherein a refractive index of a material of the first film is smaller than a refractive index of a material of the semiconductor substrate.
14. The light detecting device of claim 1 , further comprising:
a second film disposed on the first film, wherein the second film includes silicon oxide.
15. The light detecting device of claim 14 , wherein the second film is disposed in the first concave portion in the cross-sectional view.
16. The light detecting device of claim 1 , further comprising:
a multi-layer wiring layer disposed on the second plane of the semiconductor substrate.