N-polar devices including a depleting layer with improved conductivity

1. A method of operating a circuit comprising a depletion-mode transistor having a channel and an enhancement-mode transistor wherein a source of the depletion-mode transistor is connected to a drain of the enhancement-mode transistor, the method comprising:

biasing a gate of the depletion-mode transistor and a gate of the enhancement-mode transistor at zero volts and biasing a positive voltage to a drain of the depletion-mode transistor and blocking a current in a forward direction;

changing the bias of the gate of the enhancement-mode transistor to a first voltage greater than a threshold voltage of the enhancement-mode transistor while the gate of the depletion-mode transistor remains biased at zero volts such that a first current is allowed to flow through the channel in a forward direction; and

changing the bias of the gate of the depletion-mode transistor to a second voltage while the gate of the enhancement-mode transistor remains biased at the first voltage such that a second current is allowed to flow through the channel in a forward direction; wherein the second current is greater than the first current.

2. The method of claim 1 , further comprising removing the bias from the gate of the depletion-mode transistor and then removing the bias from the gate of the enhancement-mode transistor and blocking a current in a forward direction.

3. The method of claim 1 , wherein the second voltage is less than or equal to the first voltage.

4. The method of claim 1 , wherein the time between changing the gate of the enhancement-mode transistor to the first voltage and changing the gate of the depletion-mode transistor to the second voltage is less than 100 ns.

5. The method of claim 1 , wherein the channel has an on-resistance and the on-resistance of the channel is at least 25% lower when biasing the drain of the depletion-mode transistor at a the second voltage than when biasing the gate of the depletion-mode transistor at zero volts.

6. The method of claim 5 , wherein the depletion-mode transistor is a III-N HEMT transistor.

7. The method of claim 6 , wherein the depletion-mode transistor is an N-polar transistor.

8. The method of claim 7 , wherein the depletion-mode transistor comprises a p-type depleting layer formed between the gate and the channel.

9. The method of claim 8 , wherein when the gate of the depletion-mode transistor is biased at the second voltage, a capacitive conduction modulation between the p-type depleting layer and the channel induces an additional net negative charge in the channel.

10. The method of claim 9 , wherein the additional net negative charge is at least 1e 13 cm −2 charge.

11. The method of claim 1 , wherein the first voltage is greater than +5V and the second voltage is less than +5V.

12. A III-N device, comprising:

a III-N layer structure comprising a III-N channel layer and a III-N barrier layer, wherein a compositional difference between the III-N channel layer and the III-N barrier layer induces a 2DEG channel therein; and

a source contact, a gate contact, and a drain contact;

wherein the III-N device is characterized as a depletion-mode device, wherein a 2DEG channel has a first on-resistance between the source contact and the drain contact when the gate contact is biased at zero voltage, wherein the 2DEG channel has a second on-resistance between the source contact and the drain contact when the gate contact is biased at a positive voltage, wherein the second on-resistance is less than the first on-resistance; and wherein the second on-resistance is less than 25% of the first on-resistance when the gate contact is biased at +2.5V or greater.

13. The III-N device of claim 12 , wherein the first on-resistance is more than 300 Ω/sq and the second on-resistance is less than 150 Ω/sq.

14. The III-N device of claim 12 , wherein the III-N layer structure is formed in a N-polar direction.

15. The III-N device of claim 14 , wherein the device comprises a p-type layer formed between the gate contact and the III-N channel layer.

16. A III-N device, comprising:

a substrate;

a III-N layer structure on the substrate, the III-N layer structure including

a buffer layer,

a first III-N channel layer between a first III-N barrier layer and a first p-type III-N depleting layer, wherein the first III-N channel layer includes a first 2DEG channel formed therein,

a second III-N barrier layer between a second III-N channel layer and a second p-type III-N depleting layer, wherein the second III-N channel layer includes a second 2DEG channel formed therein with the second 2DEG channel being between the first 2DEG channel and the substrate, and wherein the second p-type III-N depleting layer is formed between the buffer layer and the second III-N barrier layer;

a source electrode and a drain electrode, each of which being electrically connected to the first 2DEG channel and the second 2DEG channel; and

a gate electrode between the source electrode and the drain electrode, the gate electrode being over the III-N layer structure, wherein the first p-type III-N depleting layer and the second p-type III-N depleting layer are electrically connected to the gate electrode;

wherein a dopant concentration in the first p-type III-N depleting layer is such that an areal p-type doping density in the first p-type III-N depleting layer is in the range of 10-150% of an areal sheet charge density of mobile charge in the first 2DEG channel.

17. The III-N device of claim 16 , wherein the III-N layer structure is grown in an N-polar orientation.

18. The III-N device of claim 17 , wherein the first p-type III-N depleting layer and the second p-type III-N depleting layer are physically separated from the source electrode and the drain electrode.

19. The III-N device of claim 17 , wherein a dopant concentration in the second p-type III-N depleting layer is such that an areal p-type doping density in the second p-type III-N depleting layer is in the range of 10-150% of an areal sheet charge density of mobile charge in the second 2DEG channel.

20. The III-N device of claim 19 , wherein the mobile charge in the first 2DEG channel is greater than the mobile charge in the second 2DEG channel.

21. The III-N device of claim 19 , the device further comprising more than two 2DEG channels wherein each 2DEG channel has an associated p-type III-N layer and each associated p-type depleting layer has an areal p-type doping density in the range of 10-150% of the areal sheet charge density of mobile charge in the associated 2DEG channel.