Granted Patent
B2
US 12,297,217 · App. 17/591,007 · Granted May 13, 2025
Process for preparing organotin compounds
Inventors:
David M. Ermert (Danbury, CT); Thomas M. Cameron (Newtown, CT); David Kuiper (Brookfield, CT); Thomas H. Baum (New Fairfield, CT)
Assignee:
ENTEGRIS, INC.
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Abstract
Provided is an efficient and effective process for preparing certain organotin compounds having alkyl and alkylamino substituents. The process provides the organotin compounds in a highly pure crystalline form which are particularly useful as precursors in the deposition of high-purity tin oxide films in, for example, extreme ultraviolet light (EUV) lithography techniques used in the manufacture of certain microelectronic devices.
Claims (5)
1. A compound of the Formula (II):
wherein each R is the same or different and is a C 1 -C 4 alkyl group and X is iodo, bromo, and chloro, provided that wherein X is chloro, at least one R is other than a methyl group.
2. The compound of claim 1 , wherein X is iodo.
3. The compound of claim 1 , wherein each R is the same.
4. The compound of claim 1 , wherein at least one R is a methyl group and X is chloro.
Assignments (2)
SECURITY INTEREST
Recorded Jul 8, 2022
From: ENTEGRIS, INC.; ENTEGRIS GP, INC.; POCO GRAPHITE, INC.; CMC MATERIALS, INC.; INTERNATIONAL TEST SOLUTIONS, LLC; QED TECHNOLOGIES INTERNATIONAL, INC.
To: TRUIST BANK, AS NOTES COLLATERAL AGENT
Reel/Frame 060613/0072 →
ASSIGNMENT OF ASSIGNOR'S INTEREST
Recorded Apr 25, 2022
From: ERMERT, DAVID M.; CAMERON, THOMAS M.; KUIPER, DAVID; BAUM, THOMAS H.
To: ENTEGRIS, INC.
Reel/Frame 059702/0951 →
Continuity (3)
Provisional Application
63047984
· Jul 3, 2020
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