IP Library › Granted Patent US 12,261,592
Granted Patent B2
US 12,261,592 · App. 17/591,809 · Granted Mar 25, 2025

Lamb wave delay line

Inventors: Siarhei Dmitrievich Barsukou (Takarazuka, JP); Rei Goto (Osaka, JP); Hiroyuki Nakamura (Osaka-Fu, JP)
Assignee: SKYWORKS SOLUTIONS, INC.
H03H9/68H03H9/02543H03H9/145H03H9/25
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Quick Facts
Patent No.
US 12,261,592
App. No.
17/591,809
Granted
Mar 25, 2025
Kind
B2
Abstract

A delay line for radio frequency circuits comprises a piezoelectric substrate, a transmission single phase unidirectional transducer (SPUDT) disposed on the piezoelectric substrate, and a receive SPUDT disposed on the piezoelectric substrate and separated from the transmission SPUDT in a direction of transmission of a main acoustic wave mode utilized by the transmission SPUDT.

Claims (29)

1. A delay line for radio frequency circuits, the delay line comprising:

a piezoelectric substrate;

a transmission single phase unidirectional transducer (SPUDT) disposed on the piezoelectric substrate; and

a receive SPUDT disposed on the piezoelectric substrate and separated from the transmission SPUDT in a direction of transmission of a main acoustic wave mode utilized by the transmission SPUDT, directivity of the transmission SPUDT and the receive SPUDT being such that the transmission SPUDT and the receive SPUDT, when excited, produce main acoustic waves having greatest amplitudes travelling toward one another.

2. The delay line of claim 1 wherein the piezoelectric substrate comprises aluminum nitride.

3. The delay line of claim 1 wherein the transmission SPUDT and the receive SPUDT are impedance matched to a radio frequency energy source electrically coupled to the delay line.

4. A radio frequency device including a delay line comprising:

a piezoelectric substrate;

a transmission single phase unidirectional transducer (SPUDT) disposed on the piezoelectric substrate; and

a receive SPUDT disposed on the piezoelectric substrate and separated from the transmission SPUDT in a direction of transmission of a main acoustic wave mode utilized by the transmission SPUDT, directivity of the transmission SPUDT and the receive SPUDT being such that the transmission SPUDT and the receive SPUDT, when exited, produce main acoustic waves having greatest amplitudes travelling toward one another.

5. The radio frequency device of claim 4 wherein the piezoelectric substrate comprises aluminum nitride.

6. The radio frequency device of claim 4 wherein the transmission SPUDT and the receive SPUDT are impedance matched to a radio frequency energy source electrically coupled to the delay line.

7. The delay line of claim 1 wherein at least one of the transmission SPUDT or the receive SPUDT includes interdigital transducer electrodes formed of aluminum.

8. The delay line of claim 7 wherein the interdigital transducer electrodes have thicknesses of between 0.01λ and 0.1, λ being a wavelength of a main acoustic wave generated by the at least one of the transmission SPUDT or the receive SPUDT.

9. The delay line of claim 1 wherein at least one of the transmission SPUDT or the receive SPUDT includes interdigital transducer electrodes having a first bus bar and a second bus bar and interdigitated electrode fingers extending from each of the first bus bar and the second bus bar, one thinner electrode finger and one thicker electrode finger extending from the first bus bar between adjacent electrode fingers extending from the second bus bar.

10. The delay line of claim 9 wherein the thinner electrode finger has a width of λ/4 and the thinner electrode finger has a width of λ/8, λ being a wavelength of a main acoustic wave generated by the at least one of the transmission SPUDT or the receive SPUDT.

11. The delay line of claim 1 wherein the piezoelectric 1 substrate of at least one of the transmission SPUDT or the receive SPUDT has a thickness of between 0.1λ and 1.0λ, , λ being a wavelength of a main acoustic wave generated by the at least one of the transmission SPUDT or the receive SPUDT.

12. A delay line for radio frequency circuits, the delay line comprising:

a piezoelectric substrate;

a transmission single phase unidirectional transducer (SPUDT) disposed on the piezoelectric substrate; and

a receive SPUDT disposed on the piezoelectric substrate and separated from the transmission SPUDT in a direction of transmission of a main acoustic wave mode utilized by the transmission SPUDT, the transmission SPUDT and the receive SPUDT being impedance matched to a radio frequency energy source electrically coupled to the delay line.

13. The delay line of claim 12 wherein the piezoelectric substrate comprises aluminum nitride.

14. The delay line of claim 12 wherein at least one of the transmission SPUDT or the receive SPUDT includes interdigital transducer electrodes formed of aluminum.

15. A radio frequency device including a delay line comprising:

a piezoelectric substrate;

a transmission single phase unidirectional transducer (SPUDT) disposed on the piezoelectric substrate; and

a receive SPUDT disposed on the piezoelectric substrate and separated from the transmission SPUDT in a direction of transmission of a main acoustic wave mode utilized by the transmission SPUDT, the transmission SPUDT and the receive SPUDT being impedance matched to a radio frequency energy source electrically coupled to the delay line.

16. The radio frequency device of claim 15 wherein the piezoelectric substrate comprises aluminum nitride.

17. The radio frequency device of claim 15 wherein at least one of the transmission SPUDT or the receive SPUDT includes interdigital transducer electrodes formed of aluminum.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 24, 2023
From: BARSUKOU, SIARHEI DMITRIEVICH; GOTO, REI; NAKAMURA, HIROYUKI
To: SKYWORKS SOLUTIONS, INC.
Reel/Frame 064691/0084 →
Continuity (2)
Provisional Application 63146244 · Feb 5, 2021
Related Publication 20220255534A1 · Aug 11, 2022
References Cited (7)
US 20190334568A1 · Gong · 2019 [cited by examiner]
CN 1677851A · 2005 [cited by examiner]
Ansari et al., “Gallium Nitride High-Order Mode Lamb-Wave Resonators and Delay-Lines”, Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head Island, South Carolina, Jun. 5-9, 2016. [cited by applicant]
Ingrosso et al., “Fabrication of AIN/Si SAW delay lines with very low RF signal noise”, Microelectronic Engineering 84 (2007), 1320-1324. [cited by applicant]
Naumenko et al., “Theoretical and Experimental Investigation of Spurious Modes in a SAW Delay Line Based on Langasite”, Proceedings of 2015 IEEE Ultrasonics Symposium, Taipei, Taiwan, Oct. 21-24, 2015. [cited by applicant]
Qamar et al., “Solidly Mounted Anti-Symmetric Lamb-Wave Delay Lines as an Alternate to SAW Devices”, IEEE Electron Device Letters, vol. 39, No. 12, Dec. 2018, pp. 1916-1919. [cited by applicant]
Wang et al., “Enhanced performance of 17.7 Ghz SAW devices based on AIN/diamond/Si layered structure with embedded nanotransducer”, Applied Physics Letters 111, 253502, Dec. 2017. [cited by applicant]