Optical modulator
To provide an optical modulator in which a plurality of Mach-Zehnder type optical waveguides are integrated, which can be driven at a low voltage, and in which the occurrence of a crosstalk phenomenon is suppressed. Provided is an optical modulator including a substrate 1 having an electro-optic effect, and an optical waveguide 10 and a control electrode that are formed on the substrate, in which the optical waveguide has a structure in which a plurality of Mach-Zehnder type optical waveguides are disposed in parallel, the control electrode has a GSSG type differential electrode structure in which two signal electrodes S are disposed between two ground electrodes G for one of the Mach-Zehnder type optical waveguides, and a crosstalk suppressing unit that suppresses signal crosstalk is provided in the ground electrode sandwiched between adjacent Mach-Zehnder type optical waveguides, so that optical modulator can be driven at a low voltage, and in which the occurrence of a crosstalk phenomenon is suppressed.
1. An optical modulator comprising:
a substrate having an electro-optic effect; and
an optical waveguide and a control electrode that are formed on the substrate, wherein
the optical waveguide has a structure in which a plurality of Mach-Zehnder type optical waveguides are disposed in parallel,
the control electrode has a GSSG type differential electrode structure in which two signal electrodes S are disposed between two ground electrodes G for one of the Mach-Zehnder type optical waveguides,
a distance W 1 between the two signal electrodes S is set to less than twice a distance W 2 between the adjacent signal electrode S and the ground electrode G,
a crosstalk suppressing unit that suppresses signal crosstalk is provided in the ground electrode sandwiched between adjacent Mach-Zehnder type optical waveguides,
the crosstalk suppressing unit is a protrusion formed on an upper surface of the ground electrode corresponding to, or aligned with, a resin layer, the resin layer arranged between the ground electrode and the substrate, and
the protrusion is higher than the upper surface of the signal electrode.
2. The optical modulator according to claim 1 , wherein
the crosstalk suppressing unit is set such that at least a part of lower surfaces of the ground electrodes is lower than lower surfaces of the signal electrodes.
3. The optical modulator according to claim 2 , wherein
in the ground electrode, a side surface portion facing the signal electrode is separated from a main body portion that is a portion excluding the side surface portion, and electrical connection is partially provided between the side surface portion and the main body portion, along an extending direction of the optical waveguide.
4. The optical modulator according to claim 1 , wherein
the protrusion of the ground electrode is separated from a side surface portion of the ground electrode facing the signal electrode and is locally higher than the height of the side surface portion.