Aluminum alloy member for forming fluoride film thereon and aluminum alloy member having fluoride film
An aluminum alloy member forms a fluoride film thereon, which does not form a black dot-shaped bulged portion and, therefore, has excellent smoothness and excellent corrosion resistance against a corrosive gas, plasma, and others. An aluminum alloy member for forming a fluoride film thereon, consists of: Si: 0.01 mass % to 0.3 mass %; Mg: 0.5 mass % to 5.0 mass %; Fe: 0.05 mass % to 0.5 mass %; Cu: 0.5 mass % or less; Mn: 0.30 mass % or less; Cr: 0.30 mass % or less, and the balance being Al and inevitable impurities, wherein when an average major diameter of Fe-based crystallized products in the aluminum alloy member is “D” (μm), and an average crystalline particle diameter in the aluminum alloy member is “Y” (μm), a relational expression: Log 10 Y<−0.320D+4.60 . . . (1) is satisfied. A fluoride film is formed on at least a part of a surface of the aluminum alloy.
1. An aluminum alloy member having a fluoride film thereon,
wherein the fluoride film is formed on at least a part of a surface of the aluminum alloy member wherein the aluminum alloy member consists of:
Si: 0.01 mass % to less than 0.3 mass %;
Mg: 0.5 mass % to 5.0 mass %;
Fe: 0.05 mass % to 0.5 mass %;
Cu: 0.5 mass % or less;
Mn: 0.30 mass % or less;
Cr: 0.30 mass % or less, and
the balance being Al and inevitable impurities,
wherein when an average major diameter of Fe-based crystallized products in the aluminum alloy member is “D” (μm), and an average crystalline particle diameter in the aluminum alloy member is “Y” (μm), a relational expression:
Log 10 Y<− 0.320 D+ 4.60 (1)
is satisfied, and
wherein the fluoride film is composed of a first film layer formed on the surface of the aluminum alloy member for forming a fluoride film thereon and a second film layer formed on a surface of the first film layer,
wherein the first film layer is a film containing a magnesium fluoride, and
wherein the second film layer is a film containing an oxide of aluminum fluoride and aluminum.
2. The aluminum alloy member having a fluoride film thereon of claim 1 ,
wherein the aluminum alloy member is suitable for use as a member for a semiconductor producing apparatus.
3. The aluminum alloy member having a fluoride film of claim 1 ,
wherein the fluoride film has a thickness of 0.1 μm to 10 μm.