IP Library Granted Patent US 11,711,031
Granted Patent B2
US 11,711,031 · App. 17/604,603 · Granted Jul 25, 2023

Piezoelectric inertia actuator

Inventors: Eric Durand (Amilly, FR); Joel Mendes Pereira (Saint-Jean-de-Braye, FR)
Assignee: MICRO-CONTROLE—SPECTRA-PHYSICS
H02N2/025
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Quick Facts
Patent No.
US 11,711,031
App. No.
17/604,603
Granted
Jul 25, 2023
Kind
B2
Abstract

A piezoelectric inertia actuator is disclosed herein, which includes an actuator body, a coupling body defining a receiver, a lock body positioned within the receiver, and a piezo body attached to the coupling body. At least one flexible frame configured to support an engaging body may extend from the piezo body. A spring blade configured to apply a preload force to the engaging body via a decoupling preload body may extend from the coupling body. A tension member may be positioned within the lock body and apply a preload force to the piezo body, thereby creating a net compressive stress therein. The piezoelectric inertia actuator may further include a piezo preload body configured to apply a reaction force to the piezo body in order to maintain the compressive stress therein. The preload applied to the piezo body may be substantially decoupled from the preload applied to the engaging body.

Claims (35)

1. A piezoelectric inertia actuator, comprising:

at least one actuator body;

at least one coupling body defining a receiver;

at least one lock body configured to be positioned within the receiver formed in the at least one coupling body;

at least one piezo body coupled to the at least one coupling body;

at least one flexible frame coupled to and extending from the at least one piezo body;

at least one engaging body in communication with the at least one piezo body via the at least one flexible frame; and

at least one spring blade extending from the at least one actuator body, the at least one spring blade configured to selectively apply a pre-load biasing force to at least one of the at least one flexible frame and the engaging body.

2. The piezoelectric inertia actuator of claim 1 , wherein the at least one actuator body and at least one lock body form a monolithic structure.

3. The piezoelectric inertia actuator of claim 1 , further comprising at least one tension member receiver formed in the at least one lock body.

4. The piezoelectric inertia actuator of claim 3 , further comprising at least one tension member positioned within the at least one tension member receiver and configured to selectively engage the at least one coupling body and the at least one piezo body to apply a preload force to the at least one piezo body, the preload force configured to result in a net compressive stress within the at least one piezo body.

5. The piezoelectric inertia actuator of claim 1 , wherein the at least one actuator body, the at least one lock body, a tension member, the at least one coupling body and the at least one piezo body form a rigid structure.

6. The piezoelectric inertia actuator of claim 1 , further comprising at least one conduit coupled to the at least one piezo body and in communication with at least one source of voltage or current.

7. The piezoelectric inertia actuator of claim 1 , wherein the at least one flexible frame further comprises at least one flex region.

8. The piezoelectric inertia actuator of claim 1 , wherein the at least one engaging body is detachably coupled to the at least one flexible frame.

9. The piezoelectric inertia actuator of claim 1 , wherein the at least one engaging body is non-detachably coupled to the at least one flexible frame.

10. The piezoelectric inertia actuator of claim 4 , further comprising at least one piezo preload body in communication with at least one of the at least one actuator body or the at least one flexible frame, the at least one piezo preload body configured to apply a reaction force to the at least one piezo body to maintain the net compressive stress within the at least one piezo body.

11. The piezoelectric inertia actuator of claim 1 , further comprising at least one decoupling preload body in communication with at least one of the at least one spring blade, the at least one flexible frame and the at least one engaging body, the at least one decoupling preload body configured to adjustably apply a biasing force generated by the at least one spring blade to the at least one engaging body.

12. The piezoelectric inertia actuator of claim 11 , wherein a change in a preload force to the at least one piezo body does not result in a substantial change in the biasing force applied to the at least one engaging body by the at least one decoupling preload body.

13. A piezoelectric inertia actuator, comprising:

an actuator body;

at least one lock body formed on the actuator body;

at least one tension member receiver formed in the at least one lock body and configured to accept at least one tension member, the at least one tension member configured to apply a preload force to at least one coupling body;

at least one piezo body coupled to the at least one coupling body;

at least one flexible frame coupled to and extending from the at least one piezo body;

at least one engaging body in communication with the at least one piezo body via the at least one flexible frame; and

at least one spring blade extending from the actuator body, the at least one spring blade configured to selectively apply a preload biasing force to at least one of the at least one flexible frame and the at least one engaging body via at least one decoupling preload body.

14. The piezoelectric inertia actuator of claim 13 , further comprising at least one piezo preload body formed on the actuator body and in communication with the at least one flexible frame and the at least one piezo body.

15. The piezoelectric inertia actuator of claim 14 , wherein the at least one piezo preload body is configured to apply a reaction force to the at least one piezo body.

16. The piezoelectric inertia actuator of claim 15 , further comprising:

a first preload zone, configured to apply a first preload to the at least one piezo body in a first direction, the first preload zone including the actuator body, the at least one lock body, the at least one tension member, the at least one coupling body, the at least one flexible frame and the at least one piezo preload body;

a second preload zone, configured to apply a second preload to the at least one engaging body in a second direction, the second preload zone including the at least one spring blade, the at least one flex region and the at least one decoupling preload body; and

wherein an adjustment of the first preload does not result in a substantial change of the second preload.

17. The piezoelectric inertia actuator of claim 16 , wherein the first preload zone and the second preload zone are substantially mechanically decoupled.

18. The piezoelectric inertia actuator of claim 16 , wherein the first preload zone and the second preload zone are not substantially mechanically decoupled.

Assignments (2)
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 17, 2022
From: DURAND, ERIC; MENDES PEREIRA, JOEL
To: MICRO-CONTROLE - SPECTRA-PHYSICS
Reel/Frame 059928/0652 →
Continuity (2)
Provisional Application 62837878 · Apr 24, 2019
Related Publication 20220200485A1 · Jun 23, 2022