IP Library Granted Patent US 11,859,288
Granted Patent B2
US 11,859,288 · App. 17/611,768 · Granted Jan 2, 2024

Corrosion-resistant member

Inventors: So Miyaishi (Tokyo, JP); Masahiro Okubo (Tokyo, JP); Masayuki Yoshimura (Tokyo, JP); Wataru Sakane (Tokyo, JP); Teppei Tanaka (Tokyo, JP); Saeko Nakamura (Tokyo, JP); Saori Yamaki (Tokyo, JP)
Assignee: Resonac Corporation
C23C28/345C23C28/32H01J37/32477
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Quick Facts
Patent No.
US 11,859,288
App. No.
17/611,768
Granted
Jan 2, 2024
Kind
B2
Abstract

A corrosion-resistant member including: a metal base material ( 10 ); a corrosion-resistant coating ( 30 ) formed on the surface of the base material ( 10 ); and a buffer layer ( 20 ) formed between the base material ( 10 ) and the corrosion-resistant coating ( 30 ). The base material ( 10 ) contains a main element having the highest mass content ratio among elements contained in the base material ( 10 ) and a trace element having a mass content ratio of 1% by mass or less. The corrosion-resistant coating ( 30 ) contains at least one kind selected from magnesium fluoride, aluminum fluoride, and aluminum oxide. The buffer layer ( 20 ) contains an element of the same kind as the trace element, and the content ratio obtained by energy dispersive X-ray analysis of the element of the same kind as the trace element contained in the buffer layer ( 20 ) is 2% by mass or more and 99% by mass or less.

Claims (19)

1. A corrosion-resistant member comprising:

a metal base material;

a corrosion-resistant coating formed on a surface of the base material; and

a buffer layer formed between the base material and the corrosion-resistant coating, wherein

the base material contains a main element which is an element having a highest mass content ratio among elements contained in the base material and a trace element which is an element having a mass content ratio of 1% by mass or less,

the corrosion-resistant coating contains at least one kind selected from magnesium fluoride, aluminum fluoride, and aluminum oxide, and

the buffer layer contains an element of a same kind as the trace element, and a content ratio obtained by energy dispersive X-ray analysis of the element of the same kind as the trace element contained in the buffer layer is 2% by mass or more and 99% by mass or less,

wherein the buffer layer includes chromium, nickel, iron, and copper.

2. The corrosion-resistant member according to claim 1 , wherein the main element is aluminum.

3. The corrosion-resistant member according to claim 2 , wherein the trace element is at least one kind selected from chromium, nickel, iron, and copper.

4. The corrosion-resistant member according to claim 2 , wherein a thickness of the buffer layer is 5 nm or more and 100 nm or less.

5. The corrosion-resistant member according to claim 2 , wherein a thickness of the corrosion-resistant coating is 100 nm or more and 50000 nm or less.

6. The corrosion-resistant member according to claim 1 , wherein the trace element is at least one kind selected from chromium, nickel, iron, and copper.

7. The corrosion-resistant member according to claim 6 , wherein a thickness of the buffer layer is 5 nm or more and 100 nm or less.

8. The corrosion-resistant member according to claim 6 , wherein a thickness of the corrosion-resistant coating is 100 nm or more and 50000 nm or less.

9. The corrosion-resistant member according to claim 1 , wherein a thickness of the buffer layer is 5 nm or more and 100 nm or less.

10. The corrosion-resistant member according to claim 9 , wherein a thickness of the corrosion-resistant coating is 100 nm or more and 50000 nm or less.

11. The corrosion-resistant member according to claim 1 , wherein a thickness of the corrosion-resistant coating is 100 nm or more and 50000 nm or less.

12. The corrosion-resistant member according to claim 1 , wherein the trace element comprises chromium, nickel, iron, and copper.

Assignments (3)
CHANGE OF ADDRESS Recorded Feb 14, 2024
From: RESONAC CORPORATION
To: RESONAC CORPORATION
Reel/Frame 066599/0037 →
CHANGE OF NAME Recorded Jun 23, 2023
From: SHOWA DENKO K.K.
To: RESONAC CORPORATION
Reel/Frame 064082/0513 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 19, 2021
From: MIYAISHI, SO; OKUBO, MASAHIRO; YOSHIMURA, MASAYUKI; SAKANE, WATARU; TANAKA, TEPPEI; NAKAMURA, SAEKO; YAMAKI, SAORI
To: SHOWA DENKO K.K.
Reel/Frame 058899/0363 →