Composition, and method for cleaning adhesive polymer
Provided is a composition which has an excellent affinity with the surface of an adhesive agent and can achieve a high etching rate. The composition according to one embodiment comprises: a quaternary alkylammonium fluoride or a hydrate of a quaternary alkylammonium fluoride; and, as an aprotic solvent, (A) an N-substituted amide compound having no active hydrogen on a nitrogen atom, and (B) a dipropylene glycol dimethyl ether, wherein (B) the dipropylene glycol dimethyl ether has the percentage of a structural isomer represented by formula (1) of at least 50 mass % with respect to the total amount of (B) the dipropylene glycol dimethyl ether.
1. A composition comprising a quaternary alkylammonium fluoride or a hydrate of a quaternary alkylammonium fluoride; and as an aprotic solvent, (A) an N-substituted amide compound having no active hydrogen on a nitrogen atom, and (B) dipropylene glycol dimethyl ether, wherein the proportion of the structural isomer represented by the formula (1):
in (B) dipropylene glycol dimethyl ether is 50% by mass or more with respect to the total amount of (B) dipropylene glycol dimethyl ether.
2. The composition according to claim 1 , wherein the proportion of the structural isomer represented by the formula (1) is 60% by mass or more with respect to the total amount of (B) dipropylene glycol dimethyl ether.
3. The composition according to claim 1 , wherein the (A) N-substituted amide compound is a 2-pyrrolidone derivative compound represented by the formula (2):
wherein, in the formula (2), R 1 represents an alkyl group having 1 to 4 carbon atoms.
4. The composition according to claim 3 , wherein the (A) N-substituted amide compound is a 2-pyrrolidone derivative compound wherein R 1 in the formula (2) is a methyl group or an ethyl group.
5. The composition according to claim 1 , wherein the content of the quaternary alkylammonium fluoride in the composition is 0.01 to 10% by mass.
6. The composition according to claim 1 , wherein the quaternary alkylammonium fluoride is a tetraalkylammonium fluoride represented by R 2 R 3 R 4 R 5 N + F − , wherein R 2 to R 5 are each independently an alkyl group selected from the group consisting of a methyl group, an ethyl group, an n-propyl group, an isopropyl group, and an n-butyl group.
7. The composition according to claim 1 , wherein the content of the (A) N-substituted amide compound is 50 to 95% by mass and the content of (B) dipropylene glycol dimethyl ether is 5 to 50% by mass, with respect to 100% by mass of the aprotic solvent.
8. The composition according to claim 1 , which is a decomposing cleaning composition for an adhesive polymer.
9. The composition according to claim 8 , wherein the adhesive polymer is a polyorganosiloxane compound.
10. A method for cleaning an adhesive polymer on a substrate by using the composition according to claim 1 .
11. The composition according to claim 1 , wherein the proportion of the structural isomer represented by the formula (1) is 60 to 95% by mass with respect to the total amount of (B) dipropylene glycol dimethyl ether.
12. The composition according to claim 1 , wherein the proportion of the structural isomer represented by the formula (1) is 70 to 95% by mass with respect to the total amount of (B) dipropylene glycol dimethyl ether.
13. The composition according to claim 1 , wherein the content of a protic solvent in the composition is 5% by mass or less.
14. The composition according to claim 1 , wherein the content of a protic solvent in the composition is 3% by mass or less.