Image sensor having a gate electrode on a semiconductor pattern side wall
An image sensor is provided. The image sensor includes a semiconductor substrate including a first surface and a second surface opposite to each other. A semiconductor pattern is disposed on the first surface of the semiconductor substrate and it extends in a first direction perpendicular to the first surface. A buried transmission gate electrode is disposed in a transmission gate trench extending from the first surface of the semiconductor substrate to an interior of the semiconductor substrate. A first gate electrode at least partially surrounds a side wall of the semiconductor pattern and has a ring-shaped horizontal cross-section. A color filter is disposed on the second surface of the semiconductor substrate.
1. An image sensor, comprising:
a semiconductor substrate including a first surface and a second surface opposite to the first surface;
a semiconductor pattern disposed on the first surface of the semiconductor substrate;
a buried transmission gate electrode disposed in a transmission gate trench extending from the first surface of the semiconductor substrate to an interior of the semiconductor substrate; and
a first gate electrode having a ring-shaped horizontal cross-section and at least partially surrounding a side wall of the semiconductor pattern.
2. The image sensor of claim 1 , wherein the first gate electrode is spaced apart from the buried transmission gate electrode in a second direction parallel to the first surface.
3. The image sensor of claim 1 , wherein the first gate electrode comprises:
a main electrode portion extending on the side wall of the semiconductor pattern in a first direction perpendicular to the first surface; and
an extension portion disposed on the first surface of the semiconductor substrate and extending from the main electrode portion in a horizontal direction.
4. The image sensor of claim 3 , further comprising:
a first source/drain region disposed in the semiconductor substrate under the semiconductor pattern; and
a second source/drain region disposed in an upper portion of the semiconductor pattern.
5. The image sensor of claim 4 , further comprising:
a first contact disposed on the first surface of the semiconductor substrate and electrically connected to the first source/drain region;
a second contact disposed on the extension portion of the first gate electrode; and
a third contact disposed on a top surface of the semiconductor pattern and electrically connected to the second source/drain region.
6. The image sensor of claim 1 , further comprising a floating diffusion region adjacent to the transmission gate trench in the semiconductor substrate,
wherein the transmission gate trench has a ring-shaped horizontal cross-section and at least partially surrounds the floating diffusion region.
7. The image sensor of claim 1 , wherein a top surface of the semiconductor pattern is at a higher level than a top surface of the buried transmission gate electrode.
8. The image sensor of claim 1 , further comprising a second gate electrode at least partially surrounding the side wall of the semiconductor pattern and being spaced apart from the first gate electrode in a first direction perpendicular to the first surface.
9. The image sensor of claim 8 , wherein each of the first gate electrode and the second gate electrode has a ring-shaped horizontal cross-section, and
wherein the first gate electrode and the second gate electrode vertically overlap each other.
10. The image sensor of claim 8 , wherein the transmission gate trench has a ring-shaped horizontal cross section, and
wherein a lower side wall of the semiconductor pattern extends to an interior side wall of the transmission gate trench.
11. The image sensor of claim 8 , further comprising a floating diffusion region disposed in the semiconductor pattern at a level lower than a bottom surface of the first gate electrode and higher than a top surface of the buried transmission gate electrode.
12. An image sensor, comprising:
a semiconductor substrate including a first surface and a second surface opposite to the first surface;
a buried transmission gate electrode disposed in a transmission gate trench extending from the first surface of the semiconductor substrate to an interior of the semiconductor substrate;
a semiconductor pattern disposed on the first surface of the semiconductor substrate; and
a first gate electrode disposed on a side wall of the semiconductor pattern and including a main electrode portion extending in a first direction perpendicular to the first surface and an extension portion connected to the main electrode portion and extending onto the first surface of the semiconductor substrate.
13. The image sensor of claim 12 , further comprising:
a first source/drain region disposed in the semiconductor substrate under the semiconductor pattern;
a second source/drain region disposed in an upper portion of the semiconductor pattern;
a first contact disposed on the first surface of the semiconductor substrate and electrically connected to the first source/drain region;
a second contact disposed on the extension portion of the first gate electrode; and
a third contact disposed on a top surface of the semiconductor pattern and electrically connected to the second source/drain region.
14. The image sensor of claim 12 , further comprising a floating diffusion region adjacent to the transmission gate trench in the semiconductor substrate,
wherein the first gate electrode is spaced apart from the buried transmission gate electrode in a second direction parallel with the first surface.
15. The image sensor of claim 14 , wherein the transmission gate trench has a ring-shaped horizontal cross-section and at least partially surrounds the floating diffusion region.
16. The image sensor of claim 12 , a second gate electrode at least partially surrounding the side wall of the semiconductor pattern and being apart from the first gate electrode in the first direction; and
a third gate electrode at least partially surrounding the side wall of the semiconductor pattern and being spaced apart from the second gate electrode in the first direction.
17. The image sensor of claim 16 , wherein each of the second gate electrode and the third gate electrode has a ring-shaped horizontal cross-section, and
wherein the first gate electrode, the second gate electrode, and the third gate electrode vertically overlap one another.
18. The image sensor of claim 12 , further comprising a floating diffusion region disposed in the semiconductor pattern at a level that is lower than a bottom surface of the first gate electrode and higher than a top surface of the buried transmission gate electrode.
19. The image sensor of claim 12 , wherein the transmission gate trench has a ring-shaped horizontal cross section, and
wherein a lower side wall of the semiconductor pattern extends to an interior side wall of the transmission gate trench.
20. An image sensor, comprising:
a semiconductor substrate including a first surface and a second surface opposite to the first surface;
a semiconductor pattern disposed on the first surface of the semiconductor substrate;
a device isolation layer disposed on the first surface of the semiconductor substrate and defining an active region;
a buried transmission gate electrode spaced apart from the semiconductor pattern in a second direction parallel with the first surface of the semiconductor substrate and disposed in a transmission gate trench extending to an interior of the semiconductor substrate;
a first gate insulating layer at least partially surrounding a side wall of the semiconductor pattern;
a first gate electrode including a main electrode portion at least partially surrounding the side wall of the semiconductor pattern on the first gate insulating layer and having a ring-shaped horizontal cross-section;
a first source/drain region disposed in the semiconductor substrate under the semiconductor pattern; and
a second source/drain region disposed in an upper portion of the semiconductor pattern.