IP Library Granted Patent US 11,699,568
Granted Patent B2
US 11,699,568 · App. 17/659,800 · Granted Jul 11, 2023

Method and device for spatial charged particle bunching

Inventors: Mark Joseph Bennahmias (Mission Viejo, CA); Michael John Zani (Laguna Niguel, CA); Jeffrey Winfield Scott (Carpenteria, CA)
Assignee: NextGen Semi Holding, Inc.
H01J37/3007H01J37/3174H01J2237/04
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 11,699,568
App. No.
17/659,800
Granted
Jul 11, 2023
Kind
B2
Abstract

A charged particle buncher includes a series of spaced apart electrodes arranged to generate a shaped electric field. The series includes a first electrode, a last electrode and one or more intermediate electrodes. The charged particle buncher includes a waveform device attached to the electrodes and configured to apply a periodic potential waveform to each electrode independently in a manner so as to form a quasi-electrostatic time varying potential gradient between adjacent electrodes and to cause spatial distribution of charged particles that form a plurality of nodes and antinodes. The nodes have a charged particle density and the antinodes have substantially no charged particle density, and the nodes and the antinodes are formed from a charged particle beam configured to hit the target.

Claims (27)

1. A charged particle bunching system comprising:

a series of electrodes arranged to generate a shaped electric field, the series comprising a first electrode, a last electrode and one or more intermediate electrodes; and

a waveform device attached to the electrodes and configured to apply a periodic potential waveform to each electrode independently in a manner so as to form a quasi-electrostatic time varying potential gradient between adjacent electrodes and to spatially distribute charged particles propagating along the series of electrodes to form a charged particle beam comprising a plurality of nodes and antinodes, wherein the nodes have a charged particle density and the antinodes have substantially no charged particle density.

2. The system of claim 1 , further comprising a magnetically confined ion source configured to provide the charged particles to the electrodes.

3. The system of claim 1 , wherein the electrodes comprise apertures with tapered surfaces, the apertures configured to allow the charged particles to pass through the electrodes.

4. The system of claim 1 , further comprising a deflector comprising electrode deflection stages disposed longitudinally along an axis of the charged particle beam.

5. The system of claim 1 , further comprising a deflector comprising magnetic deflection stages disposed longitudinally along an axis of the charged particle beam.

6. The system of claim 1 , further comprising a deflector comprising a deflector lens configured to demagnify the nodes.

7. The system of claim 1 , further comprising an objective lens configured to demagnify and focus the nodes.

8. The system of claim 1 , further comprising a stage configured to continuously move a workpiece while the workpiece is exposed to the charged particle beam.

9. The system of claim 1 , wherein the charged particle beam is configured to be applied to a workpiece for biomedical research and alterations.

10. The system of claim 1 , wherein the charged particle beam is configured to be applied to a workpiece.

11. The system of claim 1 , wherein the charged particle beam is configured to provide spacecraft propulsion.

12. The system of claim 1 , wherein the charged particle beam is configured to be applied onto surveillance targets.

13. The system of claim 1 , wherein the charged particle beam is configured to be applied in open space for data transfer communications.

14. The system of claim 1 , wherein the charged particle beam is configured to interact with electromagnetic radiation that applies a pulsed incident neutralizing beam to the charged particle beam.

15. The system of claim 14 , wherein the electromagnetic radiation comprises a pulsed laser beam.

16. The system of claim 1 where the charged particle beam has a current greater than 1 nanoamp per node.

17. The system of claim 1 , wherein the charged particle beam has a total beam current greater than 1 milliamp.

18. A charged particle collimator comprising:

a beam buncher in operative communication with a source of charged particles;

a deflector configured to receive the charged particles; and

an objective lens assembly configured to receive the charged particles from the deflector, the objective lens comprising a lens, a mirror, and reflective and refractive optic lenses configured to demagnify, focus, and deflect groups of the charged particles received from the deflector to a workpiece.

19. The collimator of claim 18 , wherein the beam buncher is configured to apply a pulsed laser beam to the charged particle source.

20. The collimator of claim 18 , wherein the beam buncher is configured to modulate an on/off state of the charged particle source.

21. The collimator of claim 18 , further comprising an aperture configured to shape the charged particle beam.

22. The collimator of claim 18 , wherein the beam buncher is configured to deflect individual groups of the charged particles in a direction substantially perpendicular to an axis of propagation of the charged particle beam.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 20, 2022
From: BENNAHMIAS, MARK JOSEPH; ZANI, MICHAEL JOHN; SCOTT, JEFFREY WINFIELD
To: NEXGEN SEMI HOLDING, INC.
Reel/Frame 059971/0790 →
Continuity (5)
Continuation 17222756 · Apr 5, 2021
Continuation 16532368 · Aug 5, 2019
Continuation 12459478 · Jun 30, 2009
Provisional Application 61133604 · Jun 30, 2008
Related Publication 20220254603A1 · Aug 11, 2022