Semiconductor devices and methods of manufacturing semiconductor devices
In an example, a semiconductor device includes a region of semiconductor material with a buried doped region of a first conductivity type. A first well region of the first conductivity type is in the region of semiconductor material and is electrically coupled to the buried doped region. A second well region of a second conductivity type is in the region of semiconductor material and has a first peak dopant concentration. A third well region of the second conductivity type abuts edges of the second well region. The third well region is interposed between the first well region and the second well region and has a second peak dopant concentration that is different than the first peak dopant concentration. A doped anode region of the second conductivity type is in the first well region, a doped cathode region of the first conductivity type is in the second well region, and a doped contact region of the second conductivity type is in the second well region. The semiconductor device can be configured as a semiconductor-controlled rectifier (SCR) ESD device where the controlling mechanisms for DC breakdown voltage and holding voltage are decoupled. Other related examples and methods are disclosed herein.
1. A semiconductor device, comprising:
a region of semiconductor material comprising:
a top side;
a bottom side opposite to the top side;
a semiconductor substrate;
a first semiconductor region over the semiconductor substrate;
a buried doped region of a first conductivity type in the first semiconductor region; and
a second semiconductor region over the first semiconductor region and the buried doped region;
a first well region of the first conductivity type in the second semiconductor region and electrically coupled to the buried doped region;
a second well region of a second conductivity type opposite to the first conductivity type in the second semiconductor region and having a first peak dopant concentration;
a third well region of the second conductivity type in the second semiconductor region abutting edges of the second well region, wherein:
the third well region is interposed between the first well region and the second well region;
the third well region and the first well region are laterally spaced apart so that a portion of the second semiconductor region is interposed between the third well region and the first well region; and
the third well region has a second peak dopant concentration that is different than the first peak dopant concentration;
a doped anode region of the second conductivity type in the first well region;
a doped cathode region of the first conductivity type in the second well region; and
a doped region of the second conductivity type in the second well region.
2. The semiconductor device of claim 1 , further comprising:
a first doped region of the first conductivity type in the first well region interposed between the doped anode region and the second well region.
3. The semiconductor device of claim 2 , further comprising:
a first conductor coupled to the doped anode region and the first doped region.
4. The semiconductor device of claim 2 , wherein:
the first doped region is electrically floating.
5. The semiconductor device of claim 1 , wherein:
the second peak dopant concentration is less than the first peak dopant concentration.
6. The semiconductor device of claim 1 , wherein:
the second peak dopant concentration is greater than the first peak dopant concentration.
7. The semiconductor device of claim 1 , further comprising:
a first conductor coupled to the doped anode region; and
a second conductor coupled to the doped cathode region and the doped region.
8. The semiconductor device of claim 7 , wherein:
the second conductor is electrically coupled to the semiconductor substrate.
9. The semiconductor device of claim 1 , wherein:
the first well region abuts the buried doped region.
10. The semiconductor device of claim 1 , wherein:
the first well region is spaced part from the buried doped region; and
the semiconductor device further comprises a contact structure electrically coupling the first well region to the buried doped region.
11. The semiconductor device of claim 1 , further comprising:
a steering diode structure in the second semiconductor region coupled in series with the doped anode region.
12. The semiconductor device of claim 1 , wherein:
the semiconductor substrate is electrically isolated from the first well region, the second well region, and the third well region.
13. A semiconductor device, comprising:
a region of semiconductor material comprising:
a top side;
a bottom side opposite to the top side;
a semiconductor substrate;
a first semiconductor region over the semiconductor substrate;
a buried doped region of a first conductivity type in the first semiconductor region; and
a second semiconductor region over the first semiconductor region and the buried doped region;
a first well region of the first conductivity type in the second semiconductor region and electrically coupled to the buried doped region;
a second well region of a second conductivity type opposite to the first conductivity type in the second semiconductor region and having a first peak dopant concentration;
a third well region of the second conductivity type in the second semiconductor region adjacent to an edge of the second well region, wherein:
the third well region is interposed between the first well region and the second well region;
the third well region and the first well region are laterally spaced apart so that a portion of the second semiconductor region is interposed between the third well region and the first well region; and
the third well region has a second peak dopant concentration that is different than the first peak dopant concentration;
a doped anode region of the second conductivity type in the first well region;
a doped cathode region of the first conductivity type in the second well region;
a doped region of the second conductivity type in the second well region; and
a first doped region of the first conductivity type in the first well region interposed between the doped anode region and the second well region.
14. The semiconductor device of claim 13 , wherein:
the second semiconductor region has the second conductivity type.
15. The semiconductor device of claim 13 , wherein:
the third well region is separated from the first well region by a space.
16. The semiconductor device of claim 13 , further comprising:
an isolation structure extending from the top side, through the second semiconductor region, through the first semiconductor region, through the buried doped region, and into the semiconductor substrate, wherein:
the isolation structure and the buried doped region electrically isolate the first well region, the second well region, and the third well region from the semiconductor substrate.
17. A method of forming a semiconductor device, comprising:
providing a region of semiconductor material comprising:
a top side;
a bottom side opposite to the top side;
a semiconductor substrate;
a first semiconductor region over the semiconductor substrate;
a buried doped region of a first conductivity type in the first semiconductor region; and
a second semiconductor region over the first semiconductor region and the buried doped region;
providing a first well region of the first conductivity type in the second semiconductor region and electrically coupled to the buried doped region;
providing a second well region of a second conductivity type opposite to the first conductivity type in the second semiconductor region and having a first peak dopant concentration;
providing a third well region of the second conductivity type in the second semiconductor region abutting edges of the second well region, wherein:
the third well region is interposed between the first well region and the second well region;
the third well region and the first well region are laterally spaced apart so that a portion of the second semiconductor region is interposed between the third well region and the first well region; and
the third well region has a second peak dopant concentration that is different than the first peak dopant concentration;
providing a doped anode region of the second conductivity type in the first well region;
providing a doped cathode region of the first conductivity type in the second well region; and
providing a doped region of the second conductivity type in the second well region.
18. The method of claim 17 , further comprising:
providing a first doped region of the first conductivity type in the first well region interposed between the doped anode region and the second well region.
19. The method of claim 17 , wherein:
the second peak dopant concentration is less than the first peak dopant concentration.
20. The method of claim 17 , wherein:
the second peak dopant concentration is greater than the first peak dopant concentration.