Electrode-defined unsuspended acoustic resonator
A bulk acoustic resonator operable in a bulk acoustic mode includes a resonator body mounted to a separate carrier that is not part of the resonator body. The resonator body includes a piezoelectric layer, a device layer, and a top conductive layer on the piezoelectric layer opposite the device layer. The piezoelectric layer is a single crystal of LiNbO 3 cut at an angle of 130°±30°. A surface of the device layer opposite the piezoelectric layer is for mounting the resonator body to the carrier.
1. A bulk acoustic resonator for use on a carrier, the bulk acoustic resonator comprising:
a device layer having a surface configured to mount to the carrier;
a piezoelectric layer located above the device layer and being a single crystal of LiNbO 3 , the single crystal of LiNbO 3 being cut at an angle and having a thickness, the angle and the thickness being conducive to a Mode 3 resonance or a Mode 4 resonance with a predetermined coupling efficiency; and
a top conductive layer located above the piezoelectric layer opposite the device layer.
2. The bulk acoustic resonator of claim 1 , wherein the single crystal of LiNbO 3 is cut at the angle of 130°±70°; 130°±60°; 130°±50°; 130°±40°; 130°±30°; 130°±20°; 130°±10°; 0°±20°; 0°±30°; 0°±40°; 0°±50°; 0°±60°; or 0°±70°.
3. The bulk acoustic resonator of claim 1 , wherein the single crystal of LiNbO 3 is cut at the angle of 0°±10°; and wherein the Mode 3 or the Mode 4 resonance is at a frequency ≥0.1 GHz.
4. The bulk acoustic resonator of claim 1 , wherein at least one of:
the Mode 3 resonance has the predetermined coupling efficiency ≥8%; and
the Mode 4 resonance has the predetermined coupling efficiency ≥3%.
5. The bulk acoustic resonator of claim 4 , wherein the top conductive layer defines a pattern or feature having a dimension; and
wherein:
for the Mode 4 resonance, the single crystal of LiNbO 3 has the thickness ≤0.5λ, wherein a value of λ, is based on the dimension of the pattern or feature defined by the top conductive layer; or
for the Mode 3 resonance, the single crystal of LiNbO 3 has the first thickness ≤2λ, wherein a value of λ, is based on the dimension of the pattern or feature defined by the top conductive layer.
6. The bulk acoustic resonator of claim 1 , further comprising a bottom conductive layer located between the piezoelectric layer and the device layer and having a thickness ≥0.010λ, wherein a value of λ, is based on a dimension of a pattern or feature defined by the top conductive layer or is based on the thickness of the single crystal of LiNbO 3 .
7. The bulk acoustic resonator of claim 1 , further comprising a layer of low acoustic impedance material located between the piezoelectric layer and the device layer, the layer of low acoustic impedance material having an acoustic impedance between 10 6 Pa-s/m 3 and 30×10 6 Pa-s/m 3 and having a thickness ≥0.05λ, wherein a value of λ, is based on a dimension of a pattern or feature defined by the top conductive layer or is based on the thickness of the single crystal of LiNbO 3 .
8. The bulk acoustic resonator of claim 1 , further comprising a layer of high acoustic impedance material located between the piezoelectric layer and the device layer, the layer of high acoustic impedance material having a second having an acoustic impedance between 10 6 Pa-s/m 3 and 630×10 6 Pa-s/m 3 and having a thickness ≥0.05λ, wherein a value of λ, is based on a dimension of a pattern or feature defined by the top conductive layer or is based on the thickness of the single crystal of LiNbO 3 .
9. The bulk acoustic resonator of claim 1 , further comprising a temperature compensation layer located between the piezoelectric layer and the device layer and comprising Si and oxygen, the temperature compensation layer having a thickness ≤2λ, wherein a value of λ, is based on a dimension of a pattern or feature defined by the top conductive layer or is based on the thickness of the single crystal of LiNbO 3 .
10. The bulk acoustic resonator of claim 1 , further comprising plural alternating temperature compensation layers and high acoustic impedance layers located between the piezoelectric layer and the device layer.
11. The bulk acoustic resonator of claim 1 ,
wherein a passivation layer of a dielectric material is located on one or more exterior surfaces of the bulk acoustic resonator;
wherein the top conductive layer includes at least one pair of spaced conductive fingers;
wherein the device layer has a thickness ≥50 nm; and/or
wherein the device layer comprises at least one of the following: diamond; W; SiC; Ir, AN, Al; Pt; Pd; Mo; Cr; Ti; Ta; an element from Group 3A or 4A of the periodic table of the elements; a transition element from Group 1B, 2B, 3B, 4B, 5B, 6B, 7B, or 8B of the periodic table of the elements; ceramic; glass; and polymer.
12. The bulk acoustic resonator of claim 1 , wherein the piezoelectric layer is formed of ZnO, AIN, InN, alkali metal niobate, alkali earth metal niobate, alkali metal titanate, alkali earth metal titanate, alkali metal tantalite, alkali earth metal tantalite, GaN, AlGaN, lead zirconate titanate (PZT), polymer, or a doped form of any one thereof.
13. A bulk acoustic resonator used on a carrier, the bulk acoustic resonator comprising:
a device layer having a surface configured to mount to the carrier;
alternating layers located above the device layer, the alternating layers including a temperature compensation layer and a high acoustic impedance layer;
a piezoelectric layer located above the alternating layers and being a single crystal of LiNbO 3 ; and
a top conductive layer located on the piezoelectric layer.
14. The bulk acoustic resonator of claim 13 , wherein the single crystal of LiNbO 3 is cut at an angle of 130°±70°; 130°±60°; 130°±50°; 130°±40°; 130°±30°; 130°±20°; 130°±10°; 0°±20°; 0°±30°; 0°±40°; 0°±50°; 0°±60°; or 0°±70°.
15. The bulk acoustic resonator of claim 13 , wherein the single crystal of LiNbO 3 is cut at an angle of 0°±10°; and wherein the single crystal of LiNbO 3 has a Mode 3 or a Mode 4 resonance at a frequency ≥0.1 GHz.
16. The bulk acoustic resonator of claim 13 , wherein the single crystal of LiNbO 3 comprises at least one of the following:
a Mode 3 resonance having a predetermined coupling efficiency ≥8%; and
a Mode 4 resonance having a predetermined coupling efficiency ≥3%.
17. The bulk acoustic resonator of claim 16 , wherein the top conductive layer defines a pattern or feature having a dimension; and
wherein:
for the Mode 4 resonance, the single crystal of LiNbO 3 has a thickness ≤0.5λ, wherein a value of λ, is based on the dimension of the pattern or feature defined by the top conductive layer; or
for the Mode 3 resonance, the single crystal of LiNbO 3 has the thickness ≤2λ, wherein a value of λ, is based on the dimension of the pattern or feature defined by top conductive layer.
18. The bulk acoustic resonator of claim 13 , further comprising a bottom conductive layer located between the piezoelectric layer and the device layer, the bottom conductive layer having a thickness ≥0.010λ, wherein a value of λ, is based on a dimension of a pattern or feature defined by the top conductive layer or is based on a thickness of the single crystal of LiNbO 3 .
19. The bulk acoustic resonator of claim 13 , further comprising a layer of low acoustic impedance material, located between the piezoelectric layer and the device layer, the low acoustic impedance material having an acoustic impedance between 10 6 Pa-s/m 3 and 30×10 6 Pa-s/m 3 and a thickness ≥0.05λ, wherein a value of λ, is based on a dimension of a pattern or feature defined by the top conductive layer or is based on a thickness of the single crystal of LiNbO 3 .
20. The bulk acoustic resonator of claim 13 , wherein the high acoustic impedance layer of the alternating layers comprises a layer of high acoustic impedance material having an acoustic impedance between 10 6 Pa-s/m 3 and 630×106 Pa-s/m 3 and having a thickness ≥0.05λ, wherein a value of λ, is based on a dimension of a pattern or feature defined by the top conductive layer or is based on a thickness of the single crystal of LiNbO 3 .
21. The bulk acoustic resonator of claim 13 , wherein the temperature compensation layer of the alternating layers comprises a layer of temperature compensation material comprising Si and oxygen and having a thickness ≤2λ, wherein a value of λ, is based on a dimension of a pattern or feature defined by the top conductive layer or is based on a thickness of the single crystal of LiNbO 3 .
22. The bulk acoustic resonator of claim 13 ,
wherein a passivation layer of a dielectric material is located on one or more exterior surfaces of the bulk acoustic resonator;
wherein the top conductive layer includes at least one pair of spaced conductive fingers;
wherein the device layer has a thickness ≥50 nm; and/or
wherein the device layer comprises at least one of the following: diamond; W; SiC; Ir, AN, Al; Pt; Pd; Mo; Cr; Ti; Ta; an element from Group 3A or 4A of the periodic table of the elements; a transition element from Group 1B, 2B, 3B, 4B, 5B, 6B, 7B, or 8B of the periodic table of the elements; ceramic; glass; and polymer.
23. The bulk acoustic resonator of claim 1 , wherein the piezoelectric layer is formed of ZnO, AIN, InN, alkali metal niobate, alkali earth metal niobate, alkali metal titanate, alkali earth metal titanate, alkali metal tantalite, alkali earth metal tantalite, GaN, AlGaN, lead zirconate titanate (PZT), polymer, or a doped form of any one thereof.