Temperature measurement method, optical heating method, and optical heating device
A temperature measurement method comprises a step (A) of lighting a light source part to irradiate a substrate to be treated that is an object to be heated with light for heating, the light source part including a plurality of semiconductor light-emitting elements that emits light having a main emission wavelength range of 0.3 μm or more and less than 0.5 μm; a step (B) of turning off the light source part after the step (A); a step (C) of maintaining an unlit state of the light source part after the step (B); and a step (D) of measuring, during the step (C), a temperature of the substrate to be treated through observation of light emitted from the substrate to be treated using a thermometer having a sensitivity wavelength range different from the main emission wavelength range of light emitted from the light source part.
1. A temperature measurement method comprising:
a step (A) of lighting a light source part to irradiate a substrate to be treated that is an object to be heated with light for heating, the light source part including a plurality of semiconductor light-emitting elements that emit light having a main emission wavelength range of 0.3 μm or more and less than 0.5 μm
a step (B) of turning off the light source part after the step (A);
a step (C) of maintaining an unlit state of the light source part after the step (B); and
a step (D) of measuring, during the step (C), a temperature of the substrate to be treated through observation of light emitted from the substrate to be treated using a thermometer having a sensitivity wavelength range in a wavelength range different from the main emission wavelength range of light emitted from the light source part,
wherein the sensitivity wavelength range of the thermometer is within a range of 0.5 μm or more and less than 5 μm.
2. The temperature measurement method according to claim 1 , wherein the step (D) involves measuring the temperature of the substrate to be treated with a radiation thermometer.
3. An optical heating method comprising:
a step (A) of lighting a light source part to irradiate a substrate to be treated that is an object to be heated with light for heating, the light source part including a plurality of semiconductor light-emitting elements that emit light having a main emission wavelength range of 0.3 μm or more and less than 0.5 μm;
a step (B) of turning off the light source part after the step (A);
a step (C) of maintaining an unlit state of the light source part after the step (B);
a step (D) of measuring, during the step (C), a temperature of the substrate to be treated through observation of light emitted from the substrate to be treated using a thermometer having a sensitivity wavelength range in a wavelength range different from the main emission wavelength range of light emitted from the light source part; and
a step (E) of lighting the light source part after the step (D),
wherein the sensitivity wavelength range of the thermometer is within a range of 0.5 μm or more and less than 5 μm.
4. An optical heating device for performing heat treatment of a substrate to be treated, the device comprising:
a chamber that accommodates the substrate to be treated;
a supporter that supports the substrate to be treated in the chamber;
a light source part that irradiates the substrate to be treated supported by the supporter with light for heating, the light source part including a plurality of semiconductor light-emitting elements that emit light having a main emission wavelength range of 0.3 μm or more and less than 0.5 μm;
a thermometer that measures a temperature of the substrate to be treated by light emitted from the substrate to be treated, the thermometer having a sensitivity wavelength range in a wavelength range different from the main emission wavelength range of light emitted from the light source part;
a lighting controller that switches the light source part on and off; and
a measurement controller that controls the thermometer so as to measure the temperature of the substrate to be treated while the light source part is an unlit state,
wherein the sensitivity wavelength range of the thermometer is within a range of 0.5 μm or more and less than 5 μm.
5. The optical heating device according to claim 4 , wherein the thermometer is a radiation thermometer.
6. The optical heating device according to claim 4 , further comprising a timer that measures a lighting time of the light source part and outputs a notification signal for notifying the lighting controller of a timing of temperature measurement.