IP Library › Granted Patent US 12,207,535
Granted Patent B2
US 12,207,535 · App. 17/684,168 · Granted Jan 21, 2025

Peel-off patterning method for fabrication of organic optoelectronic devices

Inventors: Stephen R. Forrest (Ann Arbor, MI); Xinjing Huang (Ann Arbor, MI); Dejiu Fan (Ann Arbor, MI)
Assignee: The Regents of the University of Michigan
H10K71/233H10K30/20H10K30/81
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Quick Facts
Patent No.
US 12,207,535
App. No.
17/684,168
Granted
Jan 21, 2025
Kind
B2
Abstract

A method of fabricating an organic optoelectronic device comprises positioning a patterning layer over a substrate, etching the patterning layer using a photolithographic process to create an etched patterning layer, positioning a layer of an organic material over the etched patterning layer, and removing at least a portion of the etched patterning layer and at least a portion of the layer of the organic material to create a patterned organic layer over the substrate.

Claims (35)

1. A method of fabricating an organic optoelectronic device, comprising:

positioning a patterning layer over a substrate;

etching the patterning layer using a photolithographic process to create an etched patterning layer;

positioning a layer of organic material over the etched patterning layer; and

lifting off at least a portion of the etched patterning layer and at least a portion of the layer of the organic material positioned over the portion of the etched patterning layer to create a patterned organic layer over the substrate.

2. The method of claim 1 , wherein the etched patterning layer includes a portion having a width of between 1 μm and 10 mm.

3. The method of claim 1 , wherein the etched patterning layer comprises a void having a width of between 1 μm and 10 mm.

4. The method of claim 1 , wherein the patterning layer comprises a polymer.

5. The method of claim 1 , further comprising applying a surface treatment in an interface between the substrate and the patterning layer.

6. The method of claim 1 , wherein the etching step comprises the steps of:

positioning a photoresist layer over the patterning layer;

positioning a mask over the photoresist layer;

exposing a portion of the photoresist layer to light through the mask; and

removing at least a portion of the patterning layer.

7. The method of claim 1 , further comprising positioning a second electrode over the patterned organic layer.

8. The method of claim 7 , further comprising the step of removing a second portion of the patterning layer and a portion of the second electrode to create a patterned second electrode over the substrate.

9. The method of claim 8 , wherein a portion of the patterned second electrode is electrically connected to a portion of the first electrode.

10. The method of claim 1 , wherein the patterning layer comprises a thin strip of material having a width of less than 100 μm.

11. An organic photovoltaic cell made using the method of claim 1 .

12. The method of claim 1 ,

wherein the substrate is a first electrode layer;

wherein the etched patterning layer comprises at least one pair of thin strips comprising first and second thin strips with a separation between the first and second strips;

wherein the organic material comprises a heterojunction layer;

wherein the portion of the etched patterning layer comprises the first thin strip of each of the at least one pair of thin strips; and

wherein the method further comprises the steps of:

depositing a second electrode over the heterojunction layer; and

lifting off the second thin strip of each of the at least one pair of thin strips, removing a portion of the second electrode.

13. The method of claim 12 , further comprising applying a surface treatment at an interface between the patterning layer and the first electrode layer.

14. The method of claim 12 , wherein each thin strip of the at least one pair of thin strips have a width of less than 100 μm.

15. The method of claim 14 , wherein the separation between the first and second thin strips in the at least one pair of thin strips is less than 100 μm.

16. The method of claim 12 , wherein the first electrode layer is a cathode and the second electrode layer is an anode.

17. The method of claim 16 , wherein the step of lifting off at least the portion of the etched patterning layer and at least the portion of the layer of the organic material positioned over the portion of the etched patterning later to create the patterned organic layer of the substrate or the step of lifting off the second thin strip of each of the at least one pair of thin strips, removing the portion of the second electrode comprises rolling at least one of the portion of the etched patterning layer, the portion of the layer of the organic material, and the second thin strip of the at least one pair of thin strips onto a roller and moving the roller along a plane parallel to the first electrode layer.

18. The method of claim 12 , wherein at least a portion of the second electrode layer is electrically connected to at least a portion of the first electrode layer.

19. The method of claim 10 , wherein the thin strip of material is connected at a distal end to a wedge-shaped handle, the wedge-shaped handle having a tapered shape at a proximal end beginning with a width of at least ten times the width of the thin strip and ending with a width at the distal end equal to the width of the thin strip of material.

20. The method of claim 1 , wherein the portion of the etched patterning layer is lifted off via an upward force.

Assignments (2)
CONFIRMATORY LICENSE Recorded Jan 19, 2024
From: UNIVERSITY OF MICHIGAN
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 066355/0891 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 8, 2022
From: FORREST, STEPHEN R.; HUANG, XINJING; FAN, DEJIU
To: THE REGENTS OF THE UNIVERSITY OF MICHIGAN
Reel/Frame 060744/0767 →
Continuity (2)
Provisional Application 63155071 · Mar 1, 2021
Related Publication 20220278280A1 · Sep 1, 2022
References Cited (74)
US 4769292A · Tang · 1988 [cited by applicant]
US 5247190A · Friend · 1993 [cited by applicant]
US 5703436A · Forrest · 1997 [cited by applicant]
US 5707745A · Forrest · 1998 [cited by applicant]
US 5834893A · Bulovic · 1998 [cited by applicant]
US 5844363A · Gu · 1998 [cited by applicant]
US 6013982A · Thompson · 2000 [cited by applicant]
US 6087196A · Sturm · 2000 [cited by applicant]
US 6091195A · Forrest · 2000 [cited by applicant]
US 6097147A · Baldo · 2000 [cited by applicant]
US 6294398B1 · Kim · 2001 [cited by applicant]
US 6303238B1 · Thompson · 2001 [cited by applicant]
US 6337102B1 · Forrest · 2002 [cited by applicant]
US 6468819B1 · Kim · 2002 [cited by applicant]
US 7279704B2 · Walters · 2007 [cited by applicant]
US 7431968B1 · Shtein · 2008 [cited by applicant]
US 7968146B2 · Wagner · 2011 [cited by applicant]
US 20030230980A1 · Forrest · 2003 [cited by applicant]
US 20040174116A1 · Lu · 2004 [cited by applicant]
US 20130026452A1 · Kottas · 2013 [cited by applicant]
US 20130119354A1 · Ma · 2013 [cited by applicant]
US 20150064628A1 · Guo · 2015 [cited by examiner]
EP 1238981 · 2002 [cited by applicant]
JP 2010135467 · 2010 [cited by applicant]
WO 2004111066A1 · 2004 [cited by applicant]
WO 2008044723 · 2008 [cited by applicant]
WO 2008057394A1 · 2008 [cited by applicant]
WO 2010011390A2 · 2010 [cited by applicant]
WO 2010111175 · 2010 [cited by applicant]
Banerjee et al., “Application of laser-spectroscopy on organic photovoltaic devices”, Lasers in Manufacturing Conference 2017. (Year: 2017). [cited by examiner]
Chopra et al., “Thin-Film Solar Cells: An Overview”, Prog. Photovolt: Res. Appl. 2004; 12:69-92. (Year: 2004). [cited by examiner]
Abbas, A.S., Alqarni, S., Shokouhi, B.B., Abbas, A.S., Yavuz, M., and Cui, B. (2014). Metal and organic nanostructure fabrication by electron beam lithography and dry liftoff. Proc. IEEE Conf. Nanotechnol., 392-395. [cited by applicant]
Bai, Y., Zhao, C., Chen, X., Zhang, S., Zhang, S., Hayat, T., Alsaedi, A., Tan, Z., Hou, J., and Li, Y. (2019). Interfacial engineering and optical coupling for multicolored semitransparent inverted organic photovoltaic… [cited by applicant]
Baldo et al., “Highly Efficient Phosphorescent Emission from Organic Electroluminescent Devices,” Nature, vol. 395, pp. 151-154 (1998). [cited by applicant]
Baldo et al., “Very High-Efficiency Green Organic Light-Emitting Devices Based on Electrophosphorescence,” Appl. Phys. Lett., vol. 75, No. 1, pp. 4-6 (1999). [cited by applicant]
Bernardo, G., Lopes, T., Lidzey, D.G., and Mendes, A. (2021). Progress in Upscaling Organic Photovoltaic Devices. Adv. Energy Mater. 11. [cited by applicant]
Burlingame, Q., Huang, X., Liu, X et al. Intrinsically stable organic solar cells under high-intensity illumination. Nature 573, 394-397 (2019). [cited by applicant]
Che, X. Z .; Li, Y. X .; Qu, Y .; Forrest, S. R. High fabrication yield organic tandem photovoltaics combining vacuum- and solutionprocessed subcells with 15% efficiency. Nature Energy 2018, 3, 422. [cited by applicant]
Chen, H., Zhang, R., Chen, X., Zeng, G., Kobera, L., Abbrent, S., Zhang, B., Chen, W., Xu, G., Oh, J., et al. (2021). A guest-assisted molecular-organization approach for >17% efficiency organic solar cells using enviro… [cited by applicant]
Cui, Y., Xu, Y., Yao, H., Bi, P., Hong, L., Zhang, J., Zu, Y., Zhang, T., Qin, J., Ren, J., et al. (2021). Single-Junction Organic Photovoltaic Cell with 19% Efficiency. Adv. Mater. 33, 2102420. 8 pages. [cited by applicant]
Cui, Y., Yao, H., Zhang, J., Xian, K., Zhang, T., Hong, L., Wang, Y., Xu, Y., Ma, K., An, C., et al. (2020). Single-Junction Organic Photovoltaic Cells with Approaching 18% Efficiency. Adv. Mater. 32. 7 pages. [cited by applicant]
Defranco, J.A., Schmidt, B.S., Lipson, M., and Malliaras, G.G. (2006). Photolithographic patterning of organic electronic materials. Org. Electron. 7, 22-28. [cited by applicant]
Distler, A., Brabec, C.J., and Egelhaaf, H.J. (2021). Organic photovoltaic modules with new world record efficiencies. Prog. Photovoltaics Res. Appl. 29, 24-31. [cited by applicant]
Dong, S., Jia, T., Zhang, K., Jing, J., and Huang, F. (2020). Single-Component Non-halogen Solvent-Processed High-Performance Organic Solar Cell Module with Efficiency over 14%. Joule 4, 2004-2016. [cited by applicant]
Dong, X., Jiang, Y., Sun, L., Qin, F., Zhou, X., Lu, X., Wang, W., Zhou, Y., Dong, X.Y., Jiang, Y.Y., et al. (2021). Large-Area Organic Solar Modules with Efficiency Over 14%. Adv. Funct. Mater., 2110209. 8 pages. [cited by applicant]
Heo, Y.-J., Jung, Y.-S., Hwang, K., Kim, J.-E., Yeo, J.-S., Lee, S., Jeon, Y.-J., Lee, D., and Kim, D.-Y. (2017). Small-Molecule Organic Photovoltaic Modules Fabricated via Halogen-Free Solvent System with Roll-to-Roll … [cited by applicant]
Huang, X., Zhang, L., Cheng, Y., Oh, J., Li, C., Huang, B., Zhao, L., Deng, J., Zhang, Y., Liu, Z., et al. (2021). Novel Narrow Bandgap Terpolymer Donors Enables Record Performance for Semitransparent Organic Solar Cell… [cited by applicant]
Ilic, B., and Craighead, H.G. (2000). Topographical patterning of chemically sensitive biological materials using a polymer-based dry lift off. Biomed. Microdevices 2, 317-322. [cited by applicant]
Jeong, H.I., Biswas, S., Yoon, S.C., Ko, S .- J., Kim, H., and Choi, H. (2021). Rational Design of Highly Efficient Semi-Transparent Organic Photovoltaics with Silver Nanowire Top Electrode via 3D Optical Simulation Stu… [cited by applicant]
Kubis, P., Li, N., Stubhan, T., Machui, F., Matt, G.J., Voigt, M.M., and Brabec, C.J. (2015). Patterning of organic photovoltaic modules by ultrafast laser. Prog. Photovoltaics Res. Appl. 23, 238-246. [cited by applicant]
Kutsarov, D.I., New, E., Bausi, F., Zoladek-Lemanczyk, A., Castro, F.A., and Silva, S.R.P. (2017). Fabrication of air-stable, large-area, PCDTBT:PC70BM polymer solar cell modules using a custom built slot-die coater. So… [cited by applicant]
Li, et al., “High Efficiency Near-Infrared and Semitransparent Non-Fullerene Acceptor Organic Photovoltaic Cells”, J. Am. Chem. Soc., 2017, 139, 17114-17119. [cited by applicant]
Li, Y., Guo, X., Peng, Z., Qu, B., Yan, H., Ade, H., Zhang, M., and Forrest, S.R. (2020). Color-neutral, semitransparent organic photovoltaics for power window applications. Proc. Natl. Acad. Sci. U. S. A. 117, 21147-21… [cited by applicant]
Li, Y., Huang, X., Ding, K., Sheriff, H.K.M., Ye, L., Liu, H., Li, C.-Z., Ade, H., and Forrest, S.R. (2021). Non-fullerene acceptor organic photovoltaics with intrinsic operational lifetimes over 30 years. Nat. Commun. … [cited by applicant]
Li, Y., Ji, C., Qu, Y., Huang, X., Hou, S., Li, C., Liao, L., Guo, L. J. & Forrest, S.R. Enhanced Light Utilization in Semitransparent Organic Photovoltaics Using an Optical Outcoupling Architecture. Adv. Mater. 31, 1-8… [cited by applicant]
Lim, D.C., Jeong, J.H., Hong, K., Nho, S., Lee, J.-Y., Hoang, Q.V., Lee, S.K., Pyo, K., Lee, D., and Cho, S. (2018). Semi-transparent plastic solar cell based on oxide-metal-oxide multilayer electrodes. Prog. Photovolta… [cited by applicant]
Liu, Q., Gerling, L.G., Bernal-Texca, F., Toudert, J., Li, T., Zhan, X., and Martorell, J. (2020). Light Harvesting at Oblique Incidence Decoupled from Transmission in Organic Solar Cells Exhibiting 9.8% Efficiency and … [cited by applicant]
Lucera, L., Kubis, P., Fecher, F.W., Bronnbauer, C., Turbiez, M., Forberich, K., Ameri, T., Egelhaaf, H.J., and Brabec, C.J. (2015). Guidelines for Closing the Efficiency Gap between Hero Solar Cells and Roll-To-Roll Pr… [cited by applicant]
Lucera, L., Machui, F., Kubis, P., Schmidt, H.D., Adams, J., Strohm, S., Ahmad, T., Forberich, K., Egelhaaf, H.J., and Brabec, C.J. (2016). Highly efficient, large area, roll coated flexible and rigid OPV modules with g… [cited by applicant]
Lucera, L., Machui, F., Schmidt, H.D., Ahmad, T., Kubis, P., Strohm, S., Hepp, J., Vetter, A., Egelhaaf, H.J., and Brabec, C.J. (2017). Printed semi-transparent large area organic photovoltaic modules with power convers… [cited by applicant]
Lunt, R. R.; Bulovic, V. Transparent, near-infrared organic photovoltaic solar cells for window and energy-scavenging applications. Applied Physics Letters 2011, 98, 113305, 5 pages. [cited by applicant]
Martinez, D., Py, C., Denhoff, M., Monette, R., Comas, T., Krantis, A., and Mealing, G. (2013). Polymer peel-off mask for high-resolution surface derivatization, neuron placement and guidance. Biotechnol. Bioeng. 110, 2… [cited by applicant]
Meiss, J., Holzmueller, F., Gresser, R., Leo, K., and Riede, M. (2011). Near-infrared absorbing semitransparent organic solar cells. Appl. Phys. Lett. 99, 10-13. [cited by applicant]
Meng et al., “Organic and solution-processed tandem solar cells with 17.3% efficiency”, Science vol. 361, Issue 6407, pp. 1094-1098; Sep. 14, 2018; [online] <https://science.sciencemag.org/content/361/6407/1094.full > 5… [cited by applicant]
Pascual-San-José, E., Sadoughi, G., Lucera, L., Stella, M., Martínez-Ferrero, E., Morse, G.E., Campoy-Quiles, M., and Burgués-Ceballos, I. (2020). Towards photovoltaic windows: Scalable fabrication of semitransparent mo… [cited by applicant]
Rowell, M.W., and McGehee, M.D. (2011). Transparent electrode requirements for thin film solar cell modules. Energy Environ. Sci. 4, 131-134. [cited by applicant]
Sheriff, H. K. M., Li, Y., Qu, B. & Forrest, S. R. Aperiodic optical coatings for neutral-color semi-transparent organic photovoltaics. Appl. Phys. Lett. 118, (2021). 15 pages. [cited by applicant]
Strohm, S., Machui, F., Langner, S., Kubis, P., Gasparini, N., Salvador, M., McCulloch, I., Egelhaaf, H.J., and Brabec, C.J. (2018). P3HT: Non-fullerene acceptor based large area, semi-transparent PV modules with power … [cited by applicant]
Tan, C.P., Cipriany, B.R., Lin, D.M., and Craighead, H.G. (2010). Nanoscale Resolution, Multicomponent Biomolecular Arrays Generated By Aligned Printing With Parylene Peel-Off. Nano Lett. 10, 719-725. [cited by applicant]
Tan, C.P., Ri Seo, B., Brooks, D.J., Chandler, E.M., Craighead, H.G., and Fischbach, C. (2009). Parylene peel-off arrays to probe the role of cell-cell interactions in tumour angiogenesis. Integr. Biol. 1, 587-594. [cited by applicant]
Wang, D., Qin, R., Zhou, G., Li, X., Xia, R., Li, Y., Zhan, L., Zhu, H., Lu, X., Yip, H.L., et al. (2020). High-Performance Semitransparent Organic Solar Cells with Excellent Infrared Reflection and See-Through Function… [cited by applicant]
Wang, G., Adil, M.A., Zhang, J., and Wei, Z. (2019). Large-Area Organic Solar Cells: Material Requirements, Modular Designs, and Printing Methods. Adv. Mater. 31, 1-34. [cited by applicant]
Xinjing Huang, Dejiu Fan, Stephen R. Forrest, Scalable semitransparent prototype organic photovoltaic module with minimal resistance loss, Organic Electronics, vol. 97, 2021, 106276, ISSN 1566-1199, https://doi.org/10.1… [cited by applicant]
Zou, C., Chang, C., Sun, D., Böhringer, K.F., and Lin, L.Y. (2020). Photolithographic patterning of perovskite thin films for multicolor display applications. Nano Lett. 20, 3710-3717. [cited by applicant]