Two-dimensional vertical fins
View Patent ↗A method of forming a two dimensional (2D) vertical fin is provided. The method includes heat treating a periodic array of irregular openings in a substrate, wherein there are walls of substrate material between adjacent openings, to reduce the surface area of the openings, and etching the openings with a crystal-plane selective etch to form squared openings in the substrate.
1. A two-dimensional vertical fin field effect transistor device, comprising:
a two-dimensional vertical fin having intersecting arms with square corners where perpendicular crystal planes meet, wherein the square corners are atomically sharp.
2. The two-dimensional vertical fin field effect transistor device of claim 1 , wherein the two-dimensional vertical fin has a shape selected from the group consisting of a cross shape, an H-shape, a fence shape, and a lattice-shape.
3. The two-dimensional vertical fin field effect transistor device of claim 2 , wherein the two-dimensional vertical fin has the lattice-shape with at least two square openings.
4. The two-dimensional vertical fin field effect transistor device of claim 2 , wherein each of the intersecting arms has a thickness in a range of about 5 nm to about 20 nm.
5. The two-dimensional vertical fin field effect transistor device of claim 4 , wherein the two-dimensional vertical fin is present on a substrate material surface, wherein the substrate material is a semiconductor material selected from the group consisting of single crystal silicon (c-Si), silicon-germanium (SiGe), and germanium (Ge).
6. The two-dimensional vertical fin field effect transistor device of claim 5 , wherein the perpendicular crystal planes are {110} and {−110} crystal planes, which intersect at the atomically sharp square corners.
7. The two-dimensional vertical fin field effect transistor device of claim 5 , further comprising a gate dielectric layer on the parallel and/or intersecting walls of the two-dimensional vertical fin, and a gate conductor on the gate dielectric layer.
8. The two-dimensional vertical fin field effect transistor device of claim 7 , further comprising a bottom source/drain between the two-dimensional vertical fin and the substrate.
9. The two-dimensional vertical fin field effect transistor device of claim 8 , further comprising a bottom source/drain contact on and in electrical contact with the bottom source/drain, wherein the bottom source/drain contact is laterally adjacent to the gate conductor.
10. A two-dimensional vertical fin field effect transistor device, comprising:
a two-dimensional vertical fin, wherein the two-dimensional vertical fin has a shape selected from the group consisting of a cross shape, an H-shape, a fence shape, and a lattice-shape;
an extension region having the same shape as the two-dimensional vertical fin between the two-dimensional vertical fin and a substrate; and
a top source/drain on the two-dimensional vertical fin.
11. The two-dimensional vertical fin field effect transistor device of claim 10 , further comprising a rectangular region in the substrate below the two-dimensional vertical fin and a bottom source/drain that extends beyond the edges of the extension region.
12. The two-dimensional vertical fin field effect transistor device of claim 11 , wherein the top source/drain has the same shape as the two-dimensional vertical fin.
13. The two-dimensional vertical fin field effect transistor device of claim 12 , further comprising a bottom spacer layer directly on the bottom source/drain and laterally adjacent to the extension region.
14. The two-dimensional vertical fin field effect transistor device of claim 13 , further comprising a top spacer layer laterally adjacent to the top source/drain.
15. The two-dimensional vertical fin field effect transistor device of claim 14 , further comprising a gate dielectric layer directly on a sidewall of the two-dimensional vertical fin, wherein the gate dielectric layer is between the top spacer layer and the bottom spacer layer, and a conductive gate fill on the bottom spacer layer and the gate dielectric layer.
16. A two-dimensional vertical fin field effect transistor device, comprising:
a two-dimensional vertical fin, wherein the two-dimensional vertical fin has a shape selected from the group consisting of a cross shape, an H-shape, a fence shape, and a lattice-shape, and wherein the shape of the two-dimensional vertical fin is formed by intersecting arms with perpendicular crystal planes;
a bottom source/drain between the two-dimensional vertical fin and a substrate; and
a top source/drain on the two-dimensional vertical fin.
17. The two-dimensional vertical fin field effect transistor device of claim 16 , wherein corners formed by the intersecting arms with perpendicular crystal planes are atomically sharp.
18. The two-dimensional vertical fin field effect transistor device of claim 17 , wherein the each of the intersecting arms has a thickness in a range of about 5 nm to about 20 nm.
19. The two-dimensional vertical fin field effect transistor device of claim 18 , further comprising an extension region having the same shape as the two-dimensional vertical fin between the two-dimensional vertical fin and the bottom source/drain.
20. The two-dimensional vertical fin field effect transistor device of claim 19 , wherein the top source/drain has the same two-dimensional shape as the two-dimensional vertical fin.