IP Library Granted Patent US 11,716,055
Granted Patent B1
US 11,716,055 · App. 17/712,096 · Granted Aug 1, 2023

Low allan-deviation oscillator

Inventors: Aaron Partridge (Cupertino, CA); Sassan Tabatabaei (Sunnyvale, CA); Lijun Chen (San Jose, CA); Kamran Souri (The Hague, NL)
Assignee: SiTime Corporation
H03B5/36G01C19/56G01C19/5726H03F3/04H03F3/70H03B2200/005H03F2200/129
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Quick Facts
Patent No.
US 11,716,055
App. No.
17/712,096
Granted
Aug 1, 2023
Kind
B1
Abstract

An oscillator includes a resonator, sustaining circuit and detector circuit. The sustaining circuit receives a sense signal indicative of mechanically resonant motion of the resonator generates an amplified output signal in response. The detector circuit asserts, at a predetermined phase of the amplified output signal, one or more control signals that enable an offset-reducing operation with respect to the sustaining amplifier circuit.

Claims (48)

1. A device comprising:

a die;

a body on the die; and

circuitry comprising a sustaining amplifier to provide a drive signal to excite the body to vibrate at a frequency during operation of the device;

wherein the circuitry is further to assert, one or more control signals that provide for offset-cancellation for the sustaining amplifier at a rate equal to the frequency; and

wherein the sustaining amplifier is a bipolar junction circuit structure.

2. The device of claim 1 wherein the device is a microelectromechanical systems (MEMS) device.

3. The device of claim 2 wherein the MEMS device comprises a MEMS resonator.

4. The device of claim 3 wherein said resonator is a piezoelectric resonator.

5. The device of claim 3 wherein said resonator is an electrostatic resonator and wherein the body is to be coupled to a bias voltage, and where the offset cancelation is to cause the drive signal to swing symmetrically about the bias voltage.

6. The device of claim 1 wherein the device comprises a resonator, wherein the frequency is a resonant frequency (f) of oscillation, and wherein the device is structured to generate an oscillation signal that is characterized by a 1/f noise corner that is at a lower frequency than the Leeson integration corner of the resonator.

7. The device of claim 6 wherein the 1/f noise corner is below ten hertz.

8. The device of claim 6 wherein the resonator is a quartz crystal resonator.

9. The device of claim 6 wherein the resonator is a LC resonator.

10. The device of claim 1 wherein the circuitry also comprises an electrode to sense motion of the body and to provide an electrical output and a zero crossing detector to detect zero crossings based on the electrical output, and wherein the circuitry is to generate the one or more control signals that provide the offset-cancellation for the sustaining amplifier as a function of zero crossings detected by the zero crossing detector.

11. The device of claim 1 wherein the device comprises a resonator, wherein the frequency is a resonant frequency (f) of oscillation, and wherein the circuitry comprises a fractional-N phase locked loop to generate a frequency-multiplied clock signal at a frequency of f*N.

12. The device of claim 11 , embodied as a packaged integrated circuit device, further comprising a pin to output the frequency-multiplied clock signal.

13. A device comprising:

a die;

a body on the die; and

circuitry comprising a sustaining amplifier to provide a drive signal to excite the body to vibrate at a frequency during operation of the device;

wherein the circuitry is further to assert, one or more control signals that provide for offset-cancellation for the sustaining amplifier at a rate equal to the frequency; and

wherein the sustaining amplifier is a complementary metal oxide semiconductor (CMOS) structure.

14. The device of claim 1 wherein the circuitry is to assert the one or more control signals at a predetermined phase relative to the frequency.

15. A device comprising:

a die;

a microelectromechanical systems (MEMS) resonator having a body on the die; and

circuitry comprising a sustaining amplifier to provide a drive signal to excite the body to vibrate at a frequency (f) during operation of the device;

wherein the circuitry is further to assert, one or more control signals that provide for offset-cancellation for the sustaining amplifier at a rate equal to the frequency; and

wherein the sustaining amplifier comprises bipolar junction devices and is characterized by a 1/f noise corner that is at a lower frequency than the Leeson integration frequency of the MEMS resonator.

16. The device of claim 15 wherein the circuitry comprises a fractional-N phase locked loop to generate a frequency-multiplied clock signal at a frequency of f*N.

17. The device of claim 16 , embodied as a packaged integrated circuit device, further comprising a pin to output the frequency-multiplied clock signal.

18. The device of claim 15 wherein the circuitry is to assert the one or more control signals at a predetermined phase relative to the frequency.

19. An oscillator integrated circuit comprising:

a die;

a microelectromechanical systems (MEMS) resonator having a body on the die; and

circuitry comprising a sustaining amplifier to provide a drive signal to excite the body to vibrate at a frequency (f) during operation of the device;

wherein the circuitry is further to assert, one or more control signals that provide for offset-cancellation for the sustaining amplifier at a rate equal to the frequency;

wherein the sustaining amplifier comprises bipolar junction devices and is characterized by a 1/f noise corner that is at a lower frequency than the Leeson integration frequency of the MEMS resonator;

wherein the circuitry further comprises a fractional-N phase locked loop to generate a frequency-multiplied clock signal at a frequency of f*N; and

wherein the oscillator integrated circuit further comprises a pin to output the frequency-multiplied clock signal.

20. A device comprising:

a die;

a body on the die; and

circuitry comprising a sustaining amplifier to provide a drive signal to excite the body to vibrate at a frequency during operation of the device;

wherein the circuitry is further to assert, one or more control signals that provide for offset-cancellation for the sustaining amplifier at a rate equal to the frequency;

wherein the MEMS device comprises a MEMS resonator; and

wherein said MEMS resonator is a piezoelectric resonator.

Assignments (2)
SECURITY INTEREST Recorded Jun 30, 2026
From: SITIME CORPORATION
To: WELLS FARGO BANK, NATIONAL ASSOCIATION, AS COLLATERAL AGENT
Reel/Frame 075862/0712 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 2, 2022
From: PARTRIDGE, AARON; TABATABAEI, SASSAN; CHEN, LIJUN; SOURI, KAMRAN
To: SITIME CORPORATION
Reel/Frame 059479/0467 →
Continuity (4)
Division 17199772 · Mar 12, 2021
Division 16807952 · Mar 3, 2020
Division 16046992 · Jul 26, 2018
Provisional Application 62537453 · Jul 26, 2017